公开(公告)号：KR1020020036465A

公开(公告)日：2002-05-16

申请号：KR1020000066639

申请日：2000-11-10

Applicant: 삼성전자주식회사

Inventor： 김형열 ,  김민규

IPC: H01L21/304

Abstract: PURPOSE: An apparatus for loading a brush for cleaning a wafer is provided to reduce an exchanging time of a brush by using a loading device for loading the brush on a support portion. CONSTITUTION: A brush(300) is supported by the first loading portion(10) and the third loading portion(20). The brush(300) is inserted into a support portion(400). The first loading portion(10) and the third loading portion(20) are practically inserted into the support portion(400) since the brush(300) is supported by the first loading portion(10) and the third loading portion(20). A plurality of pin are inserted into the support portion(400). The brush(300) is inserted into the support portion(400) by using the second loading portion(30). The third loading portion(20) and the first loading portion are ejected therefrom. Accordingly, the brush(300) is supported by the support portion(400).

Abstract translation: 目的：提供一种用于装载用于清洁晶片的刷子的装置，以通过使用用于将刷子装载在支撑部分上的装载装置来减少刷子的交换时间。 构成：刷子（300）由第一装载部分（10）和第三装载部分（20）支撑。 刷（300）插入到支撑部（400）中。 第一装载部分（10）和第三装载部分（20）实际上被插入到支撑部分（400）中，因为刷子（300）由第一装载部分（10）和第三装载部分（20）支撑。 多个销被插入到支撑部分（400）中。 刷子（300）通过使用第二装载部分（30）插入到支撑部分（400）中。 第三装载部分（20）和第一装载部分被弹出。 因此，刷（300）由支撑部（400）支撑。

公开(公告)号：KR1020040108224A

公开(公告)日：2004-12-23

申请号：KR1020030039130

申请日：2003-06-17

Applicant: 삼성전자주식회사

Inventor： 김형열

IPC: H01L21/304

Abstract: PURPOSE: An apparatus for a spin drying wafer having bumpers is provided to restrain a fixing pin from being deformed or damaged due to corrosion and to replace easily an old fixing pin with a new one by improving the structure of the fixing pin and using a stainless steel as a main material of the fixing pin. CONSTITUTION: An apparatus for a spin drying wafer includes a spindle assembly, a wafer support part, fingers, an L type member and a fixing pin. The spindle assembly(110) includes a spindle shaft(112) and a head(114). The wafer support part(120) includes a plurality of arms(124). The wafer support part is loaded on the spindle assembly. The finger(130) is protruded from an end of each arm. The L type member(160) is connected with a wafer bumper(170) at one end and includes a connection portion(162) at the other end. The connection portion includes an insertion hole for inserting the finger and screw holes penetrating through a wall of the connection portion. A fixing pin(190) is inserted into the screw hole to fix the finger and the L type member to each other. The fixing pin is made of a stainless steel.

Abstract translation: 目的：提供一种具有缓冲器的旋转干燥晶片的装置，以限制固定销由于腐蚀而变形或损坏，并且通过改善固定销的结构并使用不锈钢来容易地更换旧的固定销 钢作为固定销的主要材料。 构成：用于旋转干燥晶片的装置包括主轴组件，晶片支撑部分，指状物，L型部件和固定销。 主轴组件（110）包括主轴（112）和头部（114）。 晶片支撑部分（120）包括多个臂（124）。 晶片支撑部分装载在主轴组件上。 手指（130）从每个臂的端部突出。 L型构件（160）在一端与晶片缓冲器（170）连接，并且在另一端包括连接部分（162）。 连接部分包括用于插入手指的插入孔和穿过连接部分的壁的螺钉孔。 将固定销（190）插入到螺钉孔中，以将手指和L型构件彼此固定。 固定销由不锈钢制成。

公开(公告)号：KR1020040003478A

公开(公告)日：2004-01-13

申请号：KR1020020038193

申请日：2002-07-03

Applicant: 삼성전자주식회사

Inventor： 김형열

IPC: H01L21/304

Abstract: PURPOSE: A polishing solution supply arm of a semiconductor polishing apparatus is provided to be capable of removing the slurry remaining at the center portion of a polishing pad. CONSTITUTION: A semiconductor polishing apparatus is provided with a polishing pad capable of polishing the surface of a wafer, a polishing head for fixing the wafer, and a polishing solution supply arm(30). At this time, the polishing solution supply arm includes a slurry jet nozzle(32) for jetting slurry at the predetermined portion between the process object surface of the wafer fixed to the polishing head and the polishing pad, the first deionized water jet nozzle(34) for removing the slurry remaining at the polishing process progressed portion of the polishing pad, and the second deionized water jet nozzle(36) for removing the slurry remaining at the center portion of the polishing pad.

Abstract translation: 目的：提供半导体研磨装置的研磨液供给臂，能够除去残留在研磨垫的中心部分的浆料。 构成：半导体研磨装置具备能够抛光晶片表面的抛光垫，用于固定晶片的抛光头和抛光液供给臂（30）。 此时，抛光液供给臂包括浆料喷射喷嘴（32），用于在固定在抛光头的晶片的工艺物体表面与抛光垫之间的预定部分处喷射浆料，第一去离子水喷嘴（34） ），用于除去残留在抛光垫的抛光处理进程部分的浆料，以及用于除去残留在抛光垫中心部分处的浆料的第二去离子水喷嘴（36）。

公开(公告)号：KR1020030050796A

公开(公告)日：2003-06-25

申请号：KR1020010081318

申请日：2001-12-19

Applicant: 삼성전자주식회사

Inventor： 최재원 ,  김형열

IPC: H01L21/304

CPC classification number: B24B53/017 ,  H01L21/30625 ,  H01L21/67051

Abstract: PURPOSE: A planarization equipment of a semiconductor wafer is provided to be capable of preventing the contamination of a platen due to fume phenomenon by using a cleaning apparatus, and minimizing the contamination of a body part of the cleaning apparatus due to slurry by forming the upper portion of the body part into an arch shape. CONSTITUTION: A planarization equipment of a semiconductor wafer is provided with a polishing station having a base, a platen(124) installed on the base, a polishing pad(122) attached on the platen, a polishing head(152) installed at the upper portion of the polishing pad for polishing a wafer loaded on the polishing pad, and a cleaning apparatus(130) installed on the base of the polishing station. The cleaning apparatus includes a body part(132) and the first cleaning part installed at the body part for cleaning the platen. Preferably, a spout hole(140a) for jetting a cleaning solution toward the lateral portion of the platen, is used as the first cleaning part. Preferably, the upper portion of the body part is shaped into arch type.

Abstract translation: 目的：提供一种半导体晶片的平面化设备，以能够通过使用清洁设备来防止由于烟雾现象而导致的压板污染，并且通过形成上部的上部部件来最小化由于浆料引起的清洁设备的主体部分的污染 身体部分的一部分成拱形。 构成：半导体晶片的平面化设备设置有具有基座的抛光台，安装在基座上的压板（124），安装在压板上的抛光垫（122），安装在上部的抛光头（152） 用于抛光装载在抛光垫上的晶片的抛光垫的一部分，以及安装在抛光台的基部上的清洁装置（130）。 清洁装置包括主体部分（132）和安装在主体部分处的用于清洁压板的第一清洁部件。 优选地，将用于向台板的侧面部分喷射清洁溶液的喷口（140a）用作第一清洁部件。 优选地，主体部分的上部被成形为拱形。

公开(公告)号：KR1020030025678A

公开(公告)日：2003-03-29

申请号：KR1020010058842

申请日：2001-09-22

Applicant: 삼성전자주식회사

Inventor： 이봉우 ,  남효학 ,  김형열

IPC: G02F1/1337

CPC classification number: G02F1/133784 ,  G02F1/1303

Abstract: PURPOSE: A rubbing equipment for forming alignment grooves is provided to continuously load or unload substrates through transfer arms by forming loading/unloading grooves to be inserted by the transfer arms, thereby minimizing the time loss during the substrate conveying process. CONSTITUTION: A rubbing equipment for forming alignment grooves includes a rubbing stage(110) and a rubbing roller unit for forming the alignment grooves to a substrate loaded on the rubbing stage. The rubbing stage includes a body part(105) of an area enough to load the substrate, and at least one or more loading/unloading grooves(107) formed at positions corresponding to gaps between the body part and the substrate to directly insert substrate loading/unloading elements such as transfer arms(140) which supports a bottom surface of the substrate.

Abstract translation: 目的：提供一种用于形成对准槽的摩擦设备，通过形成由传送臂插入的装载/卸载槽，通过传送臂连续地装载或卸载衬底，从而最小化衬底传送过程中的时间损失。 构成：用于形成对准槽的摩擦设备包括摩擦台（110）和用于将对准槽形成到装载在摩擦台上的基板上的摩擦辊单元。 摩擦台包括足够加载基底的区域的主体部分（105）和形成在对应于主体部分和基底之间的间隙的位置处的至少一个或多个装载/卸载槽（107），以直接插入基板装载 /卸载元件，例如支撑衬底的底表面的转移臂（140）。

公开(公告)号：KR1020020081718A

公开(公告)日：2002-10-30

申请号：KR1020010021040

申请日：2001-04-19

Applicant: 삼성전자주식회사

Inventor： 이봉우 ,  남효학 ,  김형열 ,  이동원

IPC: G02F1/1339

CPC classification number: G02F1/13392 ,  G02F1/0107 ,  G02F1/1341 ,  G02F1/136286 ,  G02F2202/28

Abstract: PURPOSE: A method for manufacturing a liquid crystal display is provided to prevent poor joining of a first substrate and a second substrate by completely hardening a sealant with ultraviolet rays. CONSTITUTION: A method for manufacturing a liquid crystal display includes the steps of completing a first substrate(100) having red, green, blue color filters; completing a second substrate(200) transmitting gate lines transmitting a scanning signal and an image signal, having data lines crossing the gate lines; forming a sealant(300) made of ultraviolet hardened material around the upper part of the first substrate or the second substrate; making liquid cells by joining the first substrate and the second substrate together with hardening the sealant by irradiating ultraviolet rays from the outside of the first substrate.

Abstract translation: 目的：提供一种用于制造液晶显示器的方法，以通过用紫外线完全硬化密封剂来防止第一基板和第二基板的接合不良。 构成：制造液晶显示器的方法包括：完成具有红色，绿色，蓝色滤色器的第一基板（100）的步骤; 完成传输扫描信号的栅极线和具有与栅极线交叉的数据线的图像信号的第二衬底（200）; 在所述第一基板或所述第二基板的上部周围形成由紫外线硬化材料制成的密封剂（300）; 通过从第一基板的外部照射紫外线，连同第一基板和第二基板一起使密封剂硬化来制造液体电池。

公开(公告)号：KR1020020079152A

公开(公告)日：2002-10-19

申请号：KR1020010019871

申请日：2001-04-13

Applicant: 삼성전자주식회사

Inventor： 이봉우 ,  남효학 ,  김형열

IPC: G02F1/1339

CPC classification number: G02F1/1339 ,  B05C5/0216 ,  G02F1/0107 ,  G02F1/1341

Abstract: PURPOSE: A panel fabricating method of a flat display device is provided to maximize the space use of an equipment by forming an injection molding material on a substrate by moving a dispenser, and more precisely control the equipment. CONSTITUTION: A panel of a flat display device is fabricated by using a dispenser which injects an injection molding material containing a sealant for defining cell areas and a conductive material for connecting two substrates(110,120) electrically to either one of the substrates while moving, wherein the dispenser includes a container(210) receiving the material, a supporting die(230) for supporting the container, a plurality of nozzles(220) connected to the container for injecting the material, a container driving part(250) for driving the container, and a supporting die driving part(240) for driving the supporting die.

Abstract translation: 目的：提供一种平板显示装置的面板制造方法，以通过移动分配器在基板上形成注射成型材料来最大化设备的空间使用，并且更精确地控制设备。 构成：通过使用注射含有用于限定电池区域的密封剂的注射成型材料的分​​配器和用于在移动时将两个基板（110,120）电连接到任一个基板的导电材料来制造平板显示装置的面板，其中 所述分配器包括容纳所述材料的容器（210），用于支撑所述容器的支撑模具（230），连接到所述容器的注入材料的多个喷嘴（220），用于驱动所述容器的容器驱动部件（250） ，以及用于驱动支撑模的支撑模驱动部（240）。

公开(公告)号：KR1020020066656A

公开(公告)日：2002-08-21

申请号：KR1020010006968

申请日：2001-02-13

Applicant: 삼성전자주식회사

Inventor： 이봉우 ,  남효학 ,  김형열

IPC: G02F1/1339

CPC classification number: G02F1/1303 ,  B05B5/032 ,  G02F1/0107 ,  G02F1/1339

Abstract: PURPOSE: A spacer chamber for an LCD is provided to clean the inside of the chamber without any damage of the inner wall of the spacer chamber by having a spray and reduce the cleaning time. CONSTITUTION: An LCD spacer chamber includes a chamber(100) having a reaction chamber inside, a spacer spraying nozzle(200) attached to an upper end of the chamber for spraying spacers for maintaining an interval between two substrate components of an LCD uniformly, a supporting die(300) for supporting a substrate when spraying the spacers, and a cleaner(400) mounted in the chamber for cleaning the inside of the chamber, wherein the cleaner is in the shape of spray or nozzle composed of a spraying part(410) for spraying a cleaning agent and a conveying part(420) for introducing the cleaning agent into the spraying part.

Abstract translation: 目的：提供用于LCD的间隔室，以通过喷雾并且减少清洁时间来清洁室的内部，而不会损坏间隔室的内壁。 构成：LCD间隔室包括在内部具有反应室的室（100），附接到室的上端的间隔物喷射喷嘴（200），用于喷射间隔件以均匀地保持LCD的两个基板部件之间的间隔， 支撑模具（300），用于在喷涂间隔物时支撑基底;以及清洁器（400），其安装在所述腔室中以清洁所述腔室的内部，其中，所述清洁器为喷雾形式， ），用于喷射清洁剂和用于将清洁剂引入喷射部分的输送部（420）。

公开(公告)号：KR1020020065264A

公开(公告)日：2002-08-13

申请号：KR1020010005695

申请日：2001-02-06

Applicant: 삼성전자주식회사

Inventor： 남효학 ,  이봉우 ,  김형열

IPC: G02F1/1339

CPC classification number: G02F1/13394 ,  B32B37/10 ,  G02F1/0107

Abstract: PURPOSE: A method for manufacturing an LCD(Liquid Crystal Display) is provided to precisely align and join two substrates by adding heat process, thereby preventing the deformation of the substrates. CONSTITUTION: A method for manufacturing an LCD includes the steps of dispersing spacers on either first or second substrate(10,12) formed with alignment keys(14), forming a sealant(16) to an outer edges of the first or second substrate, measuring a size deviation between the first and second substrates by comparing the positions of the alignment keys after aligning the first and second substrates, correcting the size deviation for according the alignment keys of the first and second substrates by heat process, and joining the first and second substrates.

Abstract translation: 目的：提供一种用于制造LCD（液晶显示器）的方法，通过加热来精确对准和接合两个基板，从而防止基板的变形。 构成：一种用于制造LCD的方法包括以下步骤：将间隔物分散在形成有对准键（14）的第一或第二衬底（10,12）上，形成密封剂（16）到第一或第二衬底的外边缘， 通过比较对准第一和第二基板之后的对准键的位置，通过热处理来校正第一和第二基板的对准键的尺寸偏差，测量第一和第二基板之间的尺寸偏差，并且将第一和第二基板 第二基板。

公开(公告)号：KR100777693B1

公开(公告)日：2007-11-21

申请号：KR1020010006969

申请日：2001-02-13

Applicant: 삼성전자주식회사

Inventor： 이봉우 ,  남효학 ,  김형열

IPC: G02F1/1339

Abstract: 본 발명의 따른 액정 표시 장치용 스페이서 산포 장치는 내부에 반응실을 가지고 있는 챔버, 챔버 내부의 상단에 부착되어 있으며 액정 표시 장치에 포함되는 두 기판의 간격을 균일하게 유지하기 위해 기판의 상부에 스페이서를 산포하기 위한 스페이서 산포 노즐, 스페이서 산포시 기판을 지지하는 지지대 및 챔버의 안쪽 벽면에 붙어 있는 스페이서가 기판의 상부에 떨어지는 것을 방지하기 위한 보호 덮개를 포함한다. 여기서, 보호 덮개는 챔버 내부에서 산포를 통하여 기판의 상부에 기판 간격재를 형성하지 않고 유기막으로 기판 간격재가 이미 형성되어 있는 기판이 이송되었을 때 스페이서가 기판의 상부에 떨어지는 것을 방지한다. 이때, 보호 덮개는 챔버의 상부 또는 하부에 고리 또는 기둥을 이용하여 위치를 고정할 수 있으며, 기판의 상부에 스페이서를 산포할 때 또는 필요 없는 경우에는 용이하게 제거할 수 있도록 설치되어 있다.
스페이서, 유기막, 덮개