반도체 설비의 냉각 장치의 설치 구조
    17.
    发明公开
    반도체 설비의 냉각 장치의 설치 구조 无效
    半导体制造设备冷却装置的安装结构

    公开(公告)号:KR1020110072631A

    公开(公告)日:2011-06-29

    申请号:KR1020090129643

    申请日:2009-12-23

    CPC classification number: H01L21/67098 G05D7/00 H01L21/67034 H01L21/67242

    Abstract: PURPOSE: The installation structure of a cooling apparatus for a semiconductor facility is provided to maximize spatial efficiency by minimizing a space for the cooling apparatus. CONSTITUTION: A chiller(5) lowers the temperature of coolant. A coolant supplying unit(250) is installed to be spaced apart from the chipper and supplies coolant into the coolant tank of the chiller. The chipper is installed at the lower side of the bottom of an operation space. A semiconductor facility is arranged in the operational space. The coolant supplying unit includes a coolant supplier, a connector(310), and a valve. The connect forms a flow path by connecting the coolant supplier and the coolant tank of the chiller. The valve controls the flow of the coolant.

    Abstract translation: 目的:提供用于半导体设备的冷却装置的安装结构,以通过最小化冷却装置的空间来最大化空间效率。 构成:冷却器(5)降低冷却液的温度。 冷却剂供应单元(250)安装成与切片机间隔开并将冷却剂供应到冷却器的冷却剂箱中。 切屑机安装在操作空间底部的下侧。 半导体设备安排在操作空间中。 冷却剂供应单元包括冷却剂供应器,连接器(310)和阀。 连接通过连接冷却器的冷却剂供应器和冷却水箱形成流动路径。 阀门控制冷却液的流量。

    온도제어시스템
    19.
    发明公开
    온도제어시스템 无效
    温度控制系统

    公开(公告)号:KR1020110054837A

    公开(公告)日:2011-05-25

    申请号:KR1020090111626

    申请日:2009-11-18

    CPC classification number: H01L21/67248 H01L21/67098 H01L21/6831

    Abstract: PURPOSE: A temperature control system is provided to rapidly control the temperature of a facility by previously compensating the temperature of refrigerant. CONSTITUTION: A temperature control system includes a refrigerator(100), a facility, a refrigerant supply tube(106) and a refrigerant returning pipe(108). The refrigerant supply tube moves refrigerant between the refrigerator and the facility. The refrigerator previously compensates the temperature of the refrigerant in proportion to the time delay calculated according to the length of the refrigerant supply tube and the speed of the refrigerant. The refrigerator controls the temperature of the facility by supplying the compensated temperature.

    Abstract translation: 目的:提供温度控制系统,通过预先补偿制冷剂的温度来快速控制设备的温度。 构成:温度控制系统包括冰箱(100),设备,制冷剂供应管(106)和制冷剂返回管(108)。 制冷剂供给管在冰箱和设备之间移动制冷剂。 冰箱预先根据制冷剂供给管的长度和制冷剂的速度计算的时间延迟成比例地补偿制冷剂的温度。 冰箱通过提供补偿温度来控制设备的温度。

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