公开(公告)号：KR1020000059302A

公开(公告)日：2000-10-05

申请号：KR1019990006768

申请日：1999-03-02

Applicant: 삼성전자주식회사

Inventor： 김대식 ,  박창훈 ,  이성호 ,  서영갑

IPC: G02F1/13

CPC classification number: G02F1/1303 ,  H01L21/3065

Abstract: PURPOSE: A dry etching device for manufacturing an image display panel is provided to maintain the heating temperature in a predetermined region so as to prevent abrupt temperature variation of a window plate. CONSTITUTION: A dry etching device for manufacturing an image display panel includes an electrode plate(1), a window plate(20), a heating pad(21) and a voltage variation member(30). The electrode plate(1) is allocated inside of a vacuum chamber in which a glass substrate(1) is aligned. The electrode plate(1) receives electrical power from outside. The window plate(20) is aligned with the electrode plate and is divided into plurality of window plates. The gas is ionized by a reaction with the electrode plate after the electrical power from outside is received. The heating pad(21) covers the upper portion of the electrode plate. The voltage variation member(30) is electrically coupled with the heating pad. The member grounds the heating pad or supplies a predetermined power to the heating pad.

Abstract translation: 目的：提供一种用于制造图像显示面板的干蚀刻装置，以将加热温度保持在预定区域，以防止窗板的突然的温度变化。 构成：用于制造图像显示面板的干蚀刻装置包括电极板（1），窗板（20），加热垫（21）和电压变化构件（30）。 电极板（1）分配在玻璃基板（1）对准的真空室内部。 电极板（1）从外部接收电力。 窗板（20）与电极板对准并分成多个窗板。 在接收到来自外部的电力之后，气体通过与电极板的反应离子化。 加热垫（21）覆盖电极板的上部。 电压变化构件（30）与加热垫电耦合。 构件对加热垫进行接地或向加热垫提供预定的电力。