Abstract:
PURPOSE: A robot unit for carrying a PCB(printed circuit board) is provided to prevent unnecessary damage to the PCB by installing an additional sensor for sensing an obstacle on an arm unit of the robot and rapidly recognizing the existence of the obstacle. CONSTITUTION: A robot unit(10) for carrying a PCB consists of a body(11) and an arm unit(13). The arm unit is protruded on the outside of the body so that a sufficient space is provided to stably handle a PCB(1). A sensor for recognizing the existence of the PCB is installed on the arm unit. Upon finishing a deposition process, the PCB loaded is carried out of a deposition chamber(20) by controlling the robot unit. As a door(21) of the deposition chamber is rapidly opened, a sufficient gate of a specific area where the PCB is carried out is secured. In this state, the robot unit inserts the arm unit in the deposition chamber and the PCB is carried out of the deposition chamber. Herein, a sensor(14) for sensing an obstacle is installed on an end of the arm unit. Thus, the robot unit rapidly recognizes the existence of the obstacle. Further, even if there is an obstacle, a collision with the obstacle does not occur.
Abstract:
LCD 글래스 모기판에 플라즈마 식각을 위하여 패터닝된 포토레지스트의 버닝을 방지한 플라즈마 식각 설비가 개시되고 있다. 본 발명에 의하면 LCD 글래스 모기판에 RF 파워를 공급 및 LCD 글래스 모기판을 냉각시키는 캐소드 전극을 보호하기 위하여 캐소드의 에지(edge)에 설치된 캐소드 보호 커버를 캐소드 전극의 상면 높이보다 높게 설치하여 캐소드와 LCD 글래스 모기판이 밀착되도록 하여 LCD 글래스의 냉각 성능 저하를 사전에 예방하여 패터닝된 포토레지스트의 버닝을 방지한다.
Abstract:
PURPOSE: A plasma etching apparatus is provided to prevent a burning of a patterned photoresist by tightly coupling an LCD glass substrate and a cathode using a cathode protection cover. CONSTITUTION: The apparatus comprises a plasma chamber (200) for etching an LCD glass substrate (305); an anode (400) formed at opposite sidewalls of the plasma chamber; a cathode (300) and an RF generator (180). The cathode (300) further includes a rotating axis (312) formed in the plasma chamber; an insulator (310) formed in the rotating axis (312); a cathode electrode (320) formed at both sides of the insulator and connected to the rotating axis; a cathode protection cover (330) surrounding an edge of the cathode electrode (320) being not covered by the LCD glass substrate (305); and a clamping unit (340) for clamping an edge (326) of the LCD glass substrate to the cathode electrode (320), wherein the height of cathode protection cover (330) is higher than that of the cathode electrode (320).