Abstract:
본발명에따른계층적미세구조물은다중스케일구조의효과를극대화하기위해상기계층적미세구조물의윗면뿐만아니라측면에도나노패턴이형성된미세구조물을제공하여보다높은표면적을포함할수 있다. 또한, 본발명은상기한계층적미세구조물을제조하기위한몰드의제조방법에있어서, 순차적인임프린팅법및 크리프현상을이용함으로써, 표면적이확대된계층적미세구조물형성용몰드를보다효과적이고용이하게제조할수 있다.
Abstract:
PURPOSE: A reversible electrical connector using interlocking of fine cilia, a multifunctional sensor using the electrical connector, and a method for manufacturing the multifunctional sensor are provided to supply flexibility and lower electrical resistance during electrical connection. CONSTITUTION: A first connection member includes a first fine cilium(122) formed on a first substrate(110). A second connection member contacts the first fine cilium. The second connection member includes a second fine cilium(222) formed on a second substrate(210). Metal films(124,224) are formed on surfaces of the first and second fine cilia and surfaces of the first and second substrates.
Abstract:
본발명에따른계층적미세구조물은다중스케일구조의효과를극대화하기위해상기계층적미세구조물의윗면뿐만아니라측면에도나노패턴이형성된미세구조물을제공하여보다높은표면적을포함할수 있다. 또한, 본발명은상기한계층적미세구조물을제조하기위한몰드의제조방법에있어서, 순차적인임프린팅법및 크리프현상을이용함으로써, 표면적이확대된계층적미세구조물형성용몰드를보다효과적이고용이하게제조할수 있다.