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公开(公告)号：KR101260457B1
公开(公告)日：2013-05-06
申请号：KR1020100047322
申请日：2010-05-20
Applicant: 충남대학교산학협력단
IPC: G01N27/12 , H01L21/363 , B82B3/00
Abstract: 불소처리된탄소재료를이용한고감도가스센스및 이의제조방법이개시된다. 본발명에의한불소처리된탄소재료를이용한고감도가스센서의제조방법은, (1) 탄소재료를반응기내에안착시키고, 열처리하는제1단계; (2) 반응기내에불소가스를주입하여, 제1단계를통하여열처리된탄소재료를불소처리하는제2단계; 및 (3) 상기제2단계를통하여불소처리된탄소재료를실리콘웨이퍼전극사이에증착시켜가스센서를제조하는제3단계;를포함하여이루어진다. 본발명에의할경우, 상온에서도타깃가스에대한민감도와응답성이우수한가스센서를제조할수 있게된다.
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Patent Agency Ranking
公开(公告)号：KR1020110127851A
公开(公告)日：2011-11-28
申请号：KR1020100047322
申请日：2010-05-20
Applicant: 충남대학교산학협력단
IPC: G01N27/12 , H01L21/363 , B82B3/00
Abstract: PURPOSE: A highly sensitive gas sense using a fluoride treated carbon material and a manufacturing method thereof are provided to improve the sensitivity and response rate about a target gas in a room temperature by having the fluorine functional group in which the electro negativity is big in the surface of a carbon material. CONSTITUTION: A highly sensitive gas sense manufacturing method using a fluoride treated carbon material comprises the following steps. The inert gas is injected into a reactor and it is exhausted. The carbon material is settled within a reactor and is heat-treated. The fluoride gas is injected within the reactor. The heat-treated carbon material is fluoride treated. The fluoride treated carbon material is vaporized between a silicon wafer electrode and a gas sensor is manufactured.
Abstract translation: 目的：提供使用氟化物处理的碳材料的高灵敏度气体检测方法及其制造方法，以通过使具有氟负极性的氟官能团在室温下提高对目标气体的敏感性和响应率， 碳材料表面。 构成：使用氟化物处理的碳材料的高灵敏度气体感制造方法包括以下步骤。 将惰性气体注入反应器并将其排出。 将碳材料沉积在反应器内并进行热处理。 在反应器内注入氟化物气体。 经热处理的碳材料经过氟化处理。 氟化处理的碳材料在硅晶片电极和气体传感器之间被蒸发。
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公开(公告)号：KR101252232B1
公开(公告)日：2013-04-05
申请号：KR1020100052332
申请日：2010-06-03
Applicant: 충남대학교산학협력단
Abstract: 본 발명은 전기장을 이용한 가스센서, 이의 제조방법 및 이를 이용한 가스센싱방법에 관한 것으로, 본 발명에 따른 가스센서는, 전기장 인가용 제1전극판과; 상기 제1전극판의 상부면에 접합된 제1절연판과; 상기 제1절연판의 상부면에 배치되며, 센싱전극들이 패터닝되고 상기 센싱전극들 사이에 가스흡착용 물질이 로딩된 센싱기판과; 상기 제1절연판과는 일정간격 이격되어, 상기 제1절연판과 대향하도록 배치되는 제2절연판과; 상기 제2절연판의 상부면에 접합되는 전기장 인가용 제2전극판을 구비한다. 본 발명에 따르면, 상온에서 사용이 가능하며, 고민감성 및 고회복성을 가지는 가스센싱이 가능하다.
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公开(公告)号：KR1020120018684A
公开(公告)日：2012-03-05
申请号：KR1020100081674
申请日：2010-08-23
Applicant: 충남대학교산학협력단
CPC classification number: B82Y15/00 , G01N27/125
Abstract: PURPOSE: A high-sensitivity gas sensor using a carbonaceous material, in which ion metallic catalyst is introduced, and a manufacturing method thereof are provided to improve the sensitivity and response rate in the room temperature. CONSTITUTION: A high-sensitivity gas sensor using a carbonaceous material is as follows Hydroxide is dissolved in the distilled water in order to manufacture hydroxide solution. The metallic catalyst is in thrown in the manufactured hydroxide solution. The carbonaceous material is dipped and mixed in solution. The mixture getting is heat-treated. The heat-treated carbonaceous material is washed. The cleaned carbonaceous material is dried. The carbonaceous material is loaded in a substrate in order to make the gas sensor.
Abstract translation: 目的：提供使用引入离子金属催化剂的碳质材料的高灵敏度气体传感器及其制造方法，以提高室温下的灵敏度和响应速度。 构成：使用碳质材料的高灵敏度气体传感器如下将氢氧化物溶解在蒸馏水中以制造氢氧化物溶液。 将金属催化剂投入制造的氢氧化物溶液中。 将碳质材料浸渍并在溶液中混合。 混合物得到热处理。 热处理的碳质材料被洗涤。 清洁的含碳材料被干燥。 将碳质材料装载在基板中以制造气体传感器。
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公开(公告)号：KR1020110068293A
公开(公告)日：2011-06-22
申请号：KR1020090125174
申请日：2009-12-16
Applicant: 충남대학교산학협력단
CPC classification number: G01N27/127
Abstract: PURPOSE: A gas sensor using porous nano fiber containing a metallic oxide and a manufacturing method thereof are provided to have very high sensitivity at room temperature by oxidizing, carbonizing and activating nano fiber and depositing between silicon wafer electrodes. CONSTITUTION: A manufacturing method of a gas sensor using porous nano fiber containing a metallic oxide comprises the steps of: mixing a polymer precursor and a solvent; dispersing a metallic dioxide to the obtained mixture; electro-spinning the obtained mixture, thereby manufacturing nano fiber; oxidizing the obtained nano fiber; carbonizing the oxidized nano fiber; activating the carbonized nano fiber; and depositing the activated nano fiber between silicon wafer electrodes.
Abstract translation: 目的：使用含有金属氧化物的多孔纳米纤维的气体传感器及其制造方法，通过氧化，碳化和活化纳米纤维并在硅晶片电极之间沉积，在室温下具有非常高的灵敏度。 构成：使用含有金属氧化物的多孔纳米纤维的气体传感器的制造方法包括以下步骤：混合聚合物前体和溶剂; 将金属二氧化物分散到所得混合物中; 对所得混合物进行电纺，从而制造纳米纤维; 氧化所得纳米纤维; 碳化氧化纳米纤维; 活化碳化纳米纤维; 以及将活化的纳米纤维沉积在硅晶片电极之间。
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公开(公告)号：KR1020110068094A
公开(公告)日：2011-06-22
申请号：KR1020090124929
申请日：2009-12-15
Applicant: 충남대학교산학협력단
Abstract: PURPOSE: A gas sensor using porous nano fiber and a manufacturing method thereof are provided to have high reliability to have high sensitivity at room temperature by forming anon fiber by electro-spinning and oxidizing, carbonizing and activating, and then depositing between silicon wafer electrodes. CONSTITUTION: A manufacturing method of a gas sensor using porous nano fiber comprises the steps of: mixing a polymer precursor and a solvent; electro-spinning the mixture, thereby manufacturing nano fiber; oxidizing the manufactured nano fiber; carbonizing the oxidized nano fiber; activating the carbonized nano fiber; and depositing the activated nano fiber between silicon wafer electrodes.
Abstract translation: 目的：提供一种使用多孔纳米纤维的气体传感器及其制造方法，通过电纺，氧化，碳化和活化形成肛门纤维，然后在硅晶片电极之间沉积，在室温下具有高灵敏度的高可靠性。 构成：使用多孔纳米纤维的气体传感器的制造方法包括以下步骤：混合聚合物前体和溶剂; 将混合物电纺，从而制造纳米纤维; 氧化制造的纳米纤维; 碳化氧化纳米纤维; 活化碳化纳米纤维; 以及将活化的纳米纤维沉积在硅晶片电极之间。
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