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11.发明授权
公开(公告)号：KR101234603B1
公开(公告)日：2013-02-19
申请号：KR1020110049656
申请日：2011-05-25
Applicant: 한국교통대학교산학협력단
Inventor： 김경범
Abstract: 본 발명은 라만 산란을 이용한 검사체 표면 결함 검사 장치를 제공한다. 상기 검사체 표면 결함 검사 장치는 검사체가 안착되는 안착부와; 상기 검사체로 라만 레이저 광을 조사하는 광원부와; 상기 검사체에서 산란되는 산란광을 검출하는 광 검출부; 및 상기 광 검출부와 전기적으로 연결되며, 상기 검출되는 산란광으로부터 라만 스펙트럼 및 라만 시프트를 측정하고, 상기 측정되는 라만 시프트를 결함 종류 별로 이를 기설정되는 다수의 결함 판별 라만 시프트와 비교하여, 검사체의 결함 여부 및 결함의 종류를 판단하는 결함 판별부를 포함한다. 또한, 본 발명은 라만 산란을 이용한 검사체 표면 결함 검사 방법도 제공한다.
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12.发明公开
公开(公告)号：KR1020120131469A
公开(公告)日：2012-12-05
申请号：KR1020110049656
申请日：2011-05-25
Applicant: 한국교통대학교산학협력단
Inventor： 김경범
Abstract: PURPOSE: A device and a method for inspecting defects on a surface of an inspection target using a Raman scattering are provided to inspect the existence of defects on a surface of a wafer surface by using a Raman scattering and distinguishing a sort of the defects. CONSTITUTION: A device for inspecting defects on a surface of an inspection target using a Raman scattering comprises a seating part(200), a light source part, a photo detector(400), and a defect determination unit(600). An inspection target object is seated in the seating part. The light source part irradiates Raman laser lights to the inspection target object. The photo detector detects scattering lights scattered from the inspection target object. The defect determination unit is electrically connected to the photo detector and measures Raman spectrum and a Raman shift from the scattering lights. The defect determination unit determines the defect existence defects and a sort of the defects of the inspection target object by comparing the measured Raman shift with a plurality of detect distinguishing Raman shifts preset per each sort of the defects.
Abstract translation: 目的：提供使用拉曼散射检查检查对象的表面的缺陷的装置和方法，通过使用拉曼散射来检查晶片表面的缺陷的存在，并区分缺陷的种类。 构成：使用拉曼散射检查检查对象的表面的缺陷的装置，具有座部（200），光源部，光检测器（400）和缺陷判定部（600）。 检查目标物体就座在座位部分。 光源部分向检查对象物体照射拉曼激光。 光检测器检测从检查对象物体散射的散射光。 缺陷确定单元电连接到光电检测器，并测量来自散射光的拉曼光谱和拉曼偏移。 缺陷确定单元通过将所测量的拉曼移位与针对每种缺陷预先设定的多个检测区分拉曼位移进行比较来确定缺陷存在缺陷和检查对象物的缺陷的种类。
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公开(公告)号：KR1020080102728A
公开(公告)日：2008-11-26
申请号：KR1020070049536
申请日：2007-05-22
Applicant: 한국교통대학교산학협력단 , 기가비스주식회사
IPC: G01N21/958 , G01N21/88
Abstract: A glass surface test apparatus can analyze all scattering components according to the surface state of a glass substrate, analyze the transmitted light according to the material and roughness of the upper and lower surfaces of the glass substrate, and inspect the inner component of the glass substrate. A glass surface test apparatus comprises a glass jig apparatus(10) in which a glass substrate is set and which moves the glass substrate through the motor transfer in X-Y direction; an upper vision apparatus(16) inspecting the surface of the glass substrate, capable of adjusting the angle on a vertically arranged upper plate(11), and including a lighting system(12), a camera(13), a lighting system platform(14) and a camera platform(15a); and a lower vision apparatus(18) inspecting the lower surface of the glass substrate and the component refracted and transmitted on the surface of the glass substrate, capable of adjusting the angle on a vertically arranged lower plate(17), and including a camera and a camera platform(15b).
Abstract translation: 玻璃表面试验装置可以根据玻璃基板的表面状态分析所有散射成分，根据玻璃基板的上下表面的材质和粗糙度分析透射光，并检查玻璃基板的内部部件 。 一种玻璃表面检测装置，其特征在于，具备玻璃基板，玻璃基板通过X-Y方向的电动机移动使玻璃基板移动的玻璃夹具装置（10） 检查玻璃基板的表面的能够调节垂直布置的上板（11）上的角度的上视觉设备（16），并且包括照明系统（12），照相机（13），照明系统平台 14）和相机平台（15a）; 和检查玻璃基板的下表面的下视觉装置（18），并且该部件在玻璃基板的表面上被折射和透射，能够调节垂直布置的下板（17）上的角度，并且包括相机和 相机平台（15b）。
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公开(公告)号：KR100860786B1
公开(公告)日：2008-09-29
申请号：KR1020070046980
申请日：2007-05-15
Applicant: 한국교통대학교산학협력단
Inventor： 김경범
Abstract: A radio controlled helicopter model control system is provided to enable a user to do piloting exercise by using a model helicopter by realizing vertical motion, rolling, pitching or yawing of an actual helicopter. A radio controlled helicopter model control system includes a power supply, a helicopter installation tool(11), a support(13) and a multi-axial motion portion(10). The support is supported inside a body in a slide structure and is capable of vertical motion according to the rotation amount of a main rotor of a radio model helicopter. The multi-axial motion portion connects the helicopter installation tool and the support, and includes a multi-axial joint(14). A wire that passes through a pulley is installed between a bracket and a weight of the support to let the radio model helicopter move vertically by being guided by a guide rail.
Abstract translation: 提供无线电控制的直升机模型控制系统，以使用户能够通过实现直升机的垂直运动，滚动，俯仰或偏航来使用模型直升机来进行驾驶练习。 无线电控制的直升机模型控制系统包括电源，直升机安装工具（11），支撑件（13）和多轴向运动部分（10）。 支撑体支撑在滑动结构的主体内，并且能够根据无线电模型直升机的主转子的旋转量进行垂直运动。 多轴运动部分连接直升机安装工具和支撑件，并且包括多轴接头（14）。 通过滑轮的电线安装在支架和支架的重量之间，以使无线电模型直升机由导轨引导而垂直移动。
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