Abstract:
PURPOSE: Anisotropic electric connection materials and a manufacturing method thereof are provided to implement a fine pitch connection method by including a nanostructure or a microstructure. CONSTITUTION: An insulator layer is formed on sacrifice layers laminated on a silicon wafer(b). A photosensitive film is formed on the insulator layer, and a pattern for the photosensitive film is formed(c). After the insulator layer is selectively etched, the photosensitive film is removed(d). A barrier metal layer is formed on a surface of the insulator layer(e). A conductive metal plug is formed inside a penetration hole of the insulator layer laminated on the barrier metal layer(f). An upper surface in which the conductive metal plug is ground(g). [Reference numerals] (AA) Start; (B1) Step a; (B2) Laminating a sacrifice layer on an Si wafer; (C1) Step b; (C2) Forming an insulator thin film; (D1) Step c; (D2) Forming a photosensitive film, and patterning; (E1) Step d; (E2) Etching, and removing the photosensitive film; (F1) Step e; (F2) Forming a barrier metal film; (G1) Step f; (G2) Forming a conductive metal plug; (H1) Step g; (H2) Separating a node; (I1) Step h; (I2) Cutting the wafer; (J1) Step i; (J2) Separating an anisotropic thin film; (KK) End
Abstract:
PURPOSE: A manufacturing method of an anisotropy element and a method thereof are provided to implement fine pitch connection by forming a nanostructure or a microstructure with the anisotropy element. CONSTITUTION: After a plate-shaped substrate is annealed, an electro polishing process of the plate-shaped substrate is executed(a-1). The pre-processed substrate is firstly anodized(a-2). An oxide layer of the substrate which is firstly anodized is eliminated in an etching process(a-3). The plate-shaped substrate is secondly anodized(a-4). A plurality of minute through holes is extended by acid treatment(a-5). [Reference numerals] (AA) Surface; (BB) Lateral cross section; (CC) Start; (DD) Pre-treatment; (EE) Firstly anodizing; (FF) Oxide etching; (GG) Secondly anodizing; (HH) Through hole extension; (II) End; (JJ) Step a-1; (KK) Step a-2; (LL) Step a-3; (MM) Step a-4; (NN) Step a-5;
Abstract:
본 발명은 액체를 이용한 플렉서블 에너지 전환 장치에 관한 것으로, 보다 상세하게는 전기습윤(electrowetting)현상의 반대현상을 응용하여 기계적 에너지를 전기 에너지로 전환시키는 방법 및 장치에 관한 것으로 한쌍의 전극사이에서 액체와의 접촉면을 변화시키고, 그에 따른 액체와의 접촉면 변화를 전기에너지 생성에 활용하여, 채널 막힘현상이나 윤활층, 혹은 채널상에 복잡하게 패터닝된 전극들을 필요로 하지 않도록 하므로써 장치의 단순화, 제조원가 절감과 함께 고장이 적은 에너지 전환장치를 구현한다는 효과가 있다.
Abstract:
광학특성이 우수하고 이미지 품질이 높은 반사형 컬러디스플레이가 제안된다. 제안된 반사형 컬러디스플레이는 상부기판, 하부기판, 상부전극, 하부전극, 상부기판과 하부기판 사이에 배치되어 대전입자가 충전되어 있는 셀을 구획하는 격벽과 셀 내에 형성되는 380 nm 내지 780 nm에서 투과도가 35% 이상인 적색필터, 녹색필터 및 청색필터 중 적어도 하나를 포함하는 컬러필터를 포함한다.
Abstract:
PURPOSE: An LED chip, an LED chip package, and an LED module for fishing squids are provided to have a blue LED and a fluorescent material layer optimized for collecting squids, thereby inexpensively maximizing squid collecting efficiency. CONSTITUTION: An LED chip comprises a blue LED(110) and a fluorescent material layer(120). The blue LED has an emitting wavelength which is in 405 to 470 nm. The blue LED comprises a first conductive semiconductor layer(111), a second conductive semiconductor layer(112), and an active layer(113). The fluorescent material layer is located on the light emitting surface of the blue LED. The fluorescent material layer comprises a fluorescent object(121) which converts the wavelength of light emitted from the blue LED into 480 to 500 nm.