公开(公告)号：EP4261616A1

公开(公告)日：2023-10-18

申请号：EP22168094.5

申请日：2022-04-13

Applicant: ASML Netherlands B.V.

Inventor： SU, Jing ,  ZOU, Yi ,  VAN MIERLO, Willem, Louis ,  VAN DER STRATEN, Koen, Wilhelmus, Cornelis, Adrianus ,  CAO, Peigen ,  ENGBLOM, Peter, David ,  DILLEN, Hermanus, Adrianus ,  SLACHTER, Abraham ,  TEL, Wim, Tjibbo ,  NECHAEV, Konstantin, Sergeevich ,  ANUNCIADO, Roy

IPC: G03F7/20

Abstract: A method of grouping pattern features of a substantially irregular pattern layout for patterning a substrate in a lithographic process. The method comprises obtaining at least one substantially irregular pattern representation, each at least one substantially irregular pattern representation relating to a respective layer of interest; grouping a plurality of pattern features comprised within the substantially irregular pattern representation based on geometry and/or at least one processing attribute relating to processing performance into a plurality of groups, each group comprising a plurality of pattern features which are similar in terms of geometry and/or the at least one processing attribute; and deriving a parameter of interest associated with one or more groups of the plurality of groups.

公开(公告)号：EP3910418A1

公开(公告)日：2021-11-17

申请号：EP20174556.9

申请日：2020-05-14

Applicant: ASML Netherlands B.V.

Inventor： BATISTAKIS, Chrysostomos ,  PISARENCO, Maxim ,  OYARZUN RIVERA, Bernardo Andres ,  SLACHTER, Abraham

IPC: G03F7/20 ,  G06T7/00

Abstract: Described herein is a method for decomposing error contributions from multiple sources to multiple features of a pattern printed on a substrate. The method includes obtaining an image of the pattern on the substrate and obtaining, using the image, a plurality of measurement values (615;620;625) of a feature of the pattern. The measurement values are obtained for different sensor values. Further, the method includes correlating, using a decomposition algorithm (320), each measurement value of the plurality of measurement values to a linear mixture of the error contributions to generate a plurality of linear mixtures of the error contributions, and deriving, from the linear mixtures and using the decomposition algorithm, each of the error contributions (601;602;603).

公开(公告)号：EP3688529A1

公开(公告)日：2020-08-05

申请号：EP18759092.2

申请日：2018-08-22

Applicant: ASML Netherlands B.V.

Inventor： TEL, Wim Tjibbo ,  MASLOW, Mark John ,  VAN INGEN SCHENAU, Koenraad ,  WARNAAR, Patrick ,  SLACHTER, Abraham ,  ANUNCIADO, Roy ,  VAN GORP, Simon Hendrik Celine ,  STAALS, Frank ,  JOCHEMSEN, Marinus

IPC: G03F7/20