公开(公告)号：US11580274B2

公开(公告)日：2023-02-14

申请号：US15559759

申请日：2016-03-24

Applicant: ASML Netherlands B.V.

Inventor： Lotte Marloes Willems ,  Kaustuve Bhattacharyya ,  Panagiotis Pieter Bintevinos ,  Guangqing Chen ,  Martin Ebert ,  Pieter Jacob Mathias Hendrik Knelissen ,  Stephen Morgan ,  Maurits Van Der Schaar ,  Leonardus Henricus Marie Verstappen ,  Jen-Shiang Wang ,  Peter Hanzen Wardenier

IPC: G03F7/20 ,  G06F30/20 ,  G03F9/00 ,  G06F111/10

Abstract: A method including performing a simulation to evaluate a plurality of metrology targets and/or a plurality of metrology recipes used to measure a metrology target, identifying one or more metrology targets and/or metrology recipes from the evaluated plurality of metrology targets and/or metrology recipes, receiving measurement data of the one or more identified metrology targets and/or metrology recipes, and using the measurement data to tune a metrology target parameter or metrology recipe parameter.

公开(公告)号：US09753296B2

公开(公告)日：2017-09-05

申请号：US14805402

申请日：2015-07-21

Applicant: ASML Netherlands B.V.

Inventor： Gerbrand Van Der Zouw ,  Martin Jacobus Johan Jak ,  Martin Ebert

IPC: G01N21/00 ,  G02B27/28 ,  G02F1/01 ,  G01J1/08 ,  G01N21/88 ,  G01N21/95 ,  G03F7/20

CPC classification number: G02B27/283 ,  G01J1/08 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/8848 ,  G01N2201/0675 ,  G02F1/01 ,  G03F7/70633

Abstract: In an illumination system (12, 13) for a scatterometer, first and second spatial light modulators lie in a common plane and are formed by different portions of a single liquid crystal cell (260). Pre-polarizers (250) apply polarization to first and second radiation prior to the spatial light modulators. A first spatial light modulator (236-S) varies a polarization state of the first radiation in accordance with a first programmable pattern. Second spatial light modulator (236-P) varies a polarization state of the second radiation accordance with a second programmable pattern. A polarizing beam splitter (234) selectively transmits each of the spatially modulated first and second radiation to a common output path, depending on the polarization state of the radiation. In an embodiment, functions of pre-polarizers are performed by the polarizing beam splitter.