公开(公告)号：US20180058453A1

公开(公告)日：2018-03-01

申请号：US15251567

申请日：2016-08-30

Applicant: Agilent Technologies, Inc.

Inventor： George Galica ,  John Calhoun ,  Ronald J. Forni ,  Vannie Lu

IPC: F04C28/24 ,  F04C18/02 ,  F04C25/02 ,  F04C29/12

CPC classification number: F04C28/24 ,  F04C18/0215 ,  F04C18/126 ,  F04C18/30 ,  F04C23/005 ,  F04C25/02 ,  F04C28/28 ,  F04C29/12 ,  F04C2220/10 ,  F04C2240/40

Abstract: A vacuum pump isolation (VPI) valve is interposed between a vacuum pump and a vacuum chamber. During normal operation of the vacuum pump, the VPI valve is open, allowing fluid communication between the vacuum pump and the vacuum chamber. When the vacuum pump becomes non-operational such as by losing power, the VPI valve closes, thereby isolating the vacuum chamber from the vacuum pump. The closing of the VPI valve is driven by the exhaust gas pressure of the vacuum pump. The VPI valve becomes exposed to the exhaust gas pressure by the opening of a pilot valve, which may occur as a result of the vacuum pump ceasing to operate. By this configuration, the VPI valve is hermetic and does not require ambient air for its operation.

公开(公告)号：US09435339B2

公开(公告)日：2016-09-06

申请号：US13800028

申请日：2013-03-13

Applicant: AGILENT TECHNOLOGIES, INC.

Inventor： John Calhoun ,  Ronald J. Forni ,  George Galica ,  Vannie (Yucong) Lu

IPC: F04B35/04 ,  F04C15/00 ,  F04C29/06 ,  F04C18/02

CPC classification number: F04C15/0057 ,  F04C18/0215 ,  F04C29/066 ,  F04C2270/12

Abstract: A scroll pump isolates vibrations of a pump head/motor assembly of the pump from the exterior of the pump and thus, suppresses the production of airborne noise. The pump includes a sound-muffling enclosure surrounding the pump head/motor assembly, feet supporting the enclosure, and elastic vibration isolators. The pump head/motor assembly is fixed to the tops of the vibration isolators, and the sound-muffling enclosure is fixed to the vibration isolators at the bottoms of the isolators. The scroll pump also has a locking system by which motion of the pump head/motor assembly relative to the sound-muffling enclosure can be limited or prevented, and by which the sound-muffling enclosure can be hard-mounted to a support surface independently of the feet.

Abstract translation: 涡旋泵将泵的泵头/马达组件的振动与泵的外部隔离，从而抑制空气噪声的产生。 泵包括围绕泵头/马达组件，支撑外壳的脚和弹性隔振器的声音消声罩。 泵头/马达组件固定在隔振器的顶部，隔音罩固定在隔离器底部的隔振器上。 涡旋泵还具有锁定系统，通过该锁定系统可以限制或防止泵头/马达组件相对于声音消声外壳的运动，并且可以将声音消音外壳硬安装到支撑表面，独立于 脚。

公开(公告)号：US09328730B2

公开(公告)日：2016-05-03

申请号：US13857490

申请日：2013-04-05

Applicant: AGILENT TECHNOLOGIES, INC.

Inventor： John Calhoun ,  George Galica ,  Vannie (Yucong) Lu ,  James Pierce

IPC: F04C18/02 ,  F01C17/06

CPC classification number: F04C18/0269 ,  F01C17/06 ,  F04C2/025 ,  F04C18/0215 ,  F04C2230/603 ,  Y10T29/4924

Abstract: Parts of a pump head of a scroll pump facilitate an assembly process in which the stationary and orbiting scroll blades of the pump are angularly aligned or synchronized with one another. A metallic bellows of the pump head provides a primary means of synchronizing the stationary and orbiting scroll blades. The assembly process may be carried out using a fixture configured to be mountable to an assemblage including the bellows and the orbiting plate scroll. The fixture has a reference feature, and the orbiting plate scroll or the frame has another reference feature that can be aligned with the reference feature of the fixture, in the circumferential direction of the bellows, during the course of the assembly process.

Abstract translation: 涡旋泵的泵头的部分有助于组装过程，其中泵的静止和绕动涡旋叶片彼此成角度地对准或同步。 泵头的金属波纹管提供使固定和绕动涡旋叶片同步的主要手段。 组装过程可以使用被配置为可安装到包括波纹管和轨道板卷轴的组合件的固定装置来执行。 固定装置具有参考特征，并且轨道板涡旋件或框架具有另一参考特征，其可以在组装过程中在波纹管的圆周方向上与固定装置的参考特征对准。

公开(公告)号：US20160356273A1

公开(公告)日：2016-12-08

申请号：US14732637

申请日：2015-06-05

Applicant: AGILENT TECHNOLOGIES, INC.

Inventor： John Calhoun ,  Ronald J. Forni ,  Kevin Flynn

IPC: F04C23/00 ,  F04C25/02 ,  F04C18/02

CPC classification number: F04C25/02 ,  F04C18/0215 ,  F04C18/0261 ,  F04C23/005 ,  F04C28/02

Abstract: A rough vacuum pump system includes a primary vacuum pump and a secondary vacuum pump. The primary vacuum pump is an oil-free positive displacement pump, and has an inlet opening, an outlet opening, a compression stage between the inlet and outlet openings, and an intermediate gas passageway that connects to a gas flow path running through the compression stage. The secondary vacuum pump is connected to the intermediate gas passageway of the primary vacuum pump. The compression ratio of the primary and secondary vacuum pumps operating in combination is greater than that of the compression ratio of either of the primary and secondary vacuum pumps operating individually. A vacuum apparatus includes a tracer gas detector connected to an inlet of the primary vacuum pump.

Abstract translation: 粗抽真空泵系统包括一次真空泵和二次真空泵。 主真空泵是无油正排量泵，具有入口开口，出口开口，入口和出口之间的压缩级，以及连接到穿过压缩级的气体流路的中间气体通道 。 二次真空泵连接到初级真空泵的中间气体通道。 一次和二次真空泵组合的压缩比大于单独运行的一次和二次真空泵的压缩比。 真空装置包括连接到初级真空泵的入口的示踪气体检测器。

公开(公告)号：US20160201670A1

公开(公告)日：2016-07-14

申请号：US15075123

申请日：2016-03-19

Applicant: AGILENT TECHNOLOGIES, INC.

Inventor： John Calhoun ,  George Galica ,  Vannie (Yucong) Lu ,  James Pierce

IPC: F04C18/02 ,  F04C2/02

CPC classification number: F04C18/0269 ,  F01C17/06 ,  F04C2/025 ,  F04C18/0215 ,  F04C2230/603 ,  Y10T29/4924

Abstract: Parts of a pump head of a scroll pump facilitate an assembly process in which the stationary and orbiting scroll blades of the pump are angularly aligned or synchronized with one another. A metallic bellows of the pump head provides a primary means of synchronizing the stationary and orbiting scroll blades. The assembly process may be carried out using a fixture configured to be mountable to an assemblage including the bellows and the orbiting plate scroll. The fixture has a reference feature, and the orbiting plate scroll or the frame has another reference feature that can be aligned with the reference feature of the fixture, in the circumferential direction of the bellows, during the course of the assembly process.

Abstract translation: 涡旋泵的泵头的部分有助于组装过程，其中泵的静止和绕动涡旋叶片彼此成角度地对准或同步。 泵头的金属波纹管提供使固定和绕动涡旋叶片同步的主要手段。 组装过程可以使用被配置为可安装到包括波纹管和轨道板卷轴的组合件的固定装置来执行。 固定装置具有参考特征，并且轨道板涡旋件或框架具有另一参考特征，其可以在组装过程中在波纹管的圆周方向上与固定装置的参考特征对准。

公开(公告)号：US08961160B2

公开(公告)日：2015-02-24

申请号：US13853536

申请日：2013-03-29

Applicant: Agilent Technologies, Inc.

Inventor： John Calhoun

IPC: F04C18/02 ,  F04C27/00 ,  F04C23/00

CPC classification number: F04C27/001 ,  F04C18/0223 ,  F04C18/0284 ,  F04C23/001 ,  F04C23/003 ,  F04C27/005 ,  F04C28/02 ,  Y10T29/49238

Abstract: A scroll pump facilitates the installation of a new tip seal between an axial end of the scroll blade of one of inner stationary and orbiting plate scrolls of the pump and the plate of the other of the inner stationary plate and orbiting plate scrolls. To this end, the orbiting plate scroll has a central portion and an outer peripheral portion extending around and seated on the central portion. The outer peripheral portion of the orbiting plate scroll is keyed to and/or fastened to the central portion such that the outer peripheral portion is not rotatable relative to the central portion and yet is axially removable from the central portion. The tip seal can be readily accessed and replaced by removing the outer peripheral portion of the orbiting scroll plate from the central portion.

Abstract translation: 涡旋泵有助于在泵的内部静止涡旋盘和涡旋盘涡旋件之一的涡旋叶片的轴向端部与另一个内部固定板和旋转板涡旋件的板之间安装新的尖端密封件。 为此，旋转板涡旋件具有中心部分和围绕中心部分并且安置在其上的外周部分。 旋转板涡旋件的外周部分键合到和/或紧固到中心部分，使得外周部分不能相对于中心部分旋转，并且可从中心部分轴向移除。 通过从中心部分去除绕动涡盘的外周部分，可以容易地接近并替换顶端密封。