Vacuum pump system with light gas pumping and leak detection apparatus comprising the same

    公开(公告)号:US10094381B2

    公开(公告)日:2018-10-09

    申请号:US14732637

    申请日:2015-06-05

    Abstract: A rough vacuum pump system includes a primary vacuum pump and a secondary vacuum pump. The primary vacuum pump is an oil-free positive displacement pump, and has an inlet opening, an outlet opening, a compression stage between the inlet and outlet openings, and an intermediate gas passageway that connects to a gas flow path running through the compression stage. The secondary vacuum pump is connected to the intermediate gas passageway of the primary vacuum pump. The compression ratio of the primary and secondary vacuum pumps operating in combination is greater than that of the compression ratio of either of the primary and secondary vacuum pumps operating individually. A vacuum apparatus includes a tracer gas detector connected to an inlet of the primary vacuum pump.

    VACUUM SCROLL PUMP HAVING PRESSURE-BALANCED ORBITING PLATE SCROLL
    4.
    发明申请
    VACUUM SCROLL PUMP HAVING PRESSURE-BALANCED ORBITING PLATE SCROLL 有权
    具有压力平衡板式滚筒的真空泵

    公开(公告)号:US20150184656A1

    公开(公告)日:2015-07-02

    申请号:US14140591

    申请日:2013-12-26

    CPC classification number: F04C18/0215 F04C25/02 F04C29/0021 F04C29/0057

    Abstract: A vacuum scroll pump has a frame, a stationary plate scroll fixed to the frame, an orbiting plate scroll, an eccentric drive mechanism for driving the orbiting plate scroll, and counterbalancing features by which axial loads produced on the eccentric drive mechanism are offset. Scroll blades of the stationary and orbiting plate scrolls are nested to define pockets which constitute a compression stage between opposing front sides of plates of the stationary and orbiting plate scrolls. The counterbalancing features include an axial counterbalancing chamber defined at a back side of the plate of the orbiting plate scroll, i.e., opposite the side at which the compression stage is provided, and a mechanism by which an intermediate one of the pockets can be placed in communication with the counterbalancing chamber through the plate of the orbiting plate scroll.

    Abstract translation: 真空涡旋泵具有框架,固定在框架上的固定板卷轴,旋转板卷轴,用于驱动旋转板卷轴的偏心驱动机构以及偏心驱动机构上产生的轴向载荷偏移的平衡特征。 固定和旋转板卷轴的涡旋叶片嵌套以形成在静止和旋转板卷轴的板的相对前侧之间构成压缩级的凹穴。 平衡特征包括限定在轨道板涡旋盘的背面侧的轴向平衡室,即与设置压缩段的一侧相对的一个轴向平衡腔,以及可以将中间的一个凹穴放置在其中的机构 通过平板滚动板与平衡室通信。

    Vacuum scroll pump having pressure-balanced orbiting plate scroll

    公开(公告)号:US09605674B2

    公开(公告)日:2017-03-28

    申请号:US14140591

    申请日:2013-12-26

    CPC classification number: F04C18/0215 F04C25/02 F04C29/0021 F04C29/0057

    Abstract: A vacuum scroll pump has a frame, a stationary plate scroll fixed to the frame, an orbiting plate scroll, an eccentric drive mechanism for driving the orbiting plate scroll, and counterbalancing features by which axial loads produced on the eccentric drive mechanism are offset. Scroll blades of the stationary and orbiting plate scrolls are nested to define pockets which constitute a compression stage between opposing front sides of plates of the stationary and orbiting plate scrolls. The counterbalancing features include an axial counterbalancing chamber defined at a back side of the plate of the orbiting plate scroll, i.e., opposite the side at which the compression stage is provided, and a mechanism by which an intermediate one of the pockets can be placed in communication with the counterbalancing chamber through the plate of the orbiting plate scroll.

    MODULAR PUMP PLATFORM
    8.
    发明申请
    MODULAR PUMP PLATFORM 审中-公开
    模块泵平台

    公开(公告)号:US20140271233A1

    公开(公告)日:2014-09-18

    申请号:US13832004

    申请日:2013-03-15

    Abstract: A modular pump platform includes a pump head module, a pump motor module, an electronics module and a separable tray. The pump motor module includes a pump motor having a rotary output removably coupled to a crank shaft of the pump head, the pump motor being one of multiple types of pump motors, and the pump motor module being detachably connected to the pump head module. The electronics module includes an electronic control circuit configured control operation of the pump motor, the electronic control circuit being one of multiple types of electronic control circuits corresponding to the types of pump motors. Each of the pump head module, the pump motor module and the electronics module is detachably connected to the separable tray. At least the pump motor module is interchangeable with another pump motor module comprising a pump motor of another type.

    Abstract translation: 模块化泵平台包括泵头模块,泵电机模块,电子模块和可分离托盘。 泵电动机模块包括泵电动机,其具有可移除地联接到泵头的曲轴的旋转输出,泵电动机是多种类型的泵电动机之一,并且泵电动机模块可拆卸地连接到泵头模块。 电子模块包括电子控制电路,其构造为泵电动机的控制操作,电子控制电路是与泵电动机类型对应的多种类型的电子控制电路之一。 泵头模块,泵电机模块和电子模块中的每一个可拆卸地连接到可分离托盘。 至少泵电机模块可与包括另一类型的泵电动机的另一个泵电动机模块互换。

    Modular pump platform
    9.
    发明授权

    公开(公告)号:US10473096B2

    公开(公告)日:2019-11-12

    申请号:US13832004

    申请日:2013-03-15

    Abstract: A modular pump platform includes a pump head module, a pump motor module, an electronics module and a separable tray. The pump motor module includes a pump motor having a rotary output removably coupled to a crank shaft of the pump head, the pump motor being one of multiple types of pump motors, and the pump motor module being detachably connected to the pump head module. The electronics module includes an electronic control circuit configured to control operation of the pump motor, the electronic control circuit being one of multiple types of electronic control circuits corresponding to the types of pump motors. Each of the pump head module, the pump motor module and the electronics module is detachably connected to the separable tray. At least the pump motor module is interchangeable with another pump motor module comprising a pump motor of another type.

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