公开(公告)号：DE69625126T2

公开(公告)日：2003-07-31

申请号：DE69625126

申请日：1996-06-04

Applicant: CANON KK

Inventor： HASEGAWA NORIYASU ,  OZAWA KUNITAKA ,  KUROSAWA HIROSHI ,  YOSHIMURA KEIJI

IPC: G03F7/20 ,  H01S3/134 ,  H01S3/225 ,  H01L21/30

Abstract: An output control method for an excimer laser includes providing plural light pulses, and changing an emission interval for the light pulses, wherein the emission interval is controlled so that an average laser output of each light pulse becomes higher than that when the emission interval is unchanged.

公开(公告)号：JPH097926A

公开(公告)日：1997-01-10

申请号：JP15942595

申请日：1995-06-26

Applicant: CANON KK

Inventor： KUROSAWA HIROSHI ,  OZAWA KUNITAKA ,  HASEGAWA NORIYASU ,  YOSHIMURA KEIJI

IPC: G03F7/20 ,  H01L21/027

Abstract: PURPOSE: To provide a luminaire and an aligner which accurately control the emission strength and reduce exposure nonuniformity. CONSTITUTION: A laser control system 103 is provided with an emission strength control means, which controls the emission strength of a pulse laser light source 1, and an emission time control means, which controls the emission time. The laser control system 103 controls the emission strength and the emission time by an illuminance monitor signal 203, which is outputted on the basis of the detection results from a first exposure quantity detector 14. At the same time, the laser control system performs estimation control, which estimates the subsequent emission strength. Thus, exposure nonuniformity is reduced and accurate exposure is performed.