公开(公告)号：DE3706833A1

公开(公告)日：1987-09-10

申请号：DE3706833

申请日：1987-03-03

Applicant: CANON KK

Inventor： BAN MIKICHI ,  KAKUCHI OSAMU ,  YAMAMOTO HIRONORI ,  OHTSUKA MASARU ,  SHIBA OSAMU ,  HARA KAZUHIKO

IPC: G01J3/26

Abstract: Fabri-Pérot spectroscopy method comprises a step of directing a light beam at a first refraction angle to a first Fabri-Pérot interference plate and a step of directing a light beam transmitted through the first Fabri-Pérot interference plate to a second Fabri-Pérot interference plate at a second refraction angle, and Fabri-Pérot spectroscopy apparatus comprises Fabri-Pérot interference plates, a control device for changing a spacing between the Fabri-Pérot interference plates, a first optical device for directing a light beam to the first Fabri-Pérot interference plate at a first refraction angle, a second optical device for directing the light beam transmitted through the Fabri-Pérot interference plate at a second refraction angle different from the first refraction angle to the second Fabri-Pérot interference plate, and a seal for externally sealing the Fabri-Pérot interference plates. Gas for protecting the Fabri-Pérot interference plates is filled in the sealed space.