-
公开(公告)号：DE3926949A1
公开(公告)日：1990-02-22
申请号：DE3926949
申请日：1989-08-14
Applicant: CANON KK
Inventor： IWATA MIKIO , KARIYA TAKAO , OHTSUKA MASARU
IPC: G12B5/00 , G03F7/20 , H01L21/027 , H01L21/30
Abstract: Disclosed is a stage device suitably usable in a semiconductor microcircuit device manufacturing exposure apparatus for printing a pattern of a mask on a semiconductor wafer, for supporting and positioning the wafer with respect to plurality of directions. The device includes two plate members coupled to each other with a predetermined distance maintained therebetween. Each plate member has formed therein X, Y and theta stages defined by plural cutout grooves. Each stage is resiliently supported by a leaf spring functioning portion formed in the plate member. A Z stage for displacing the wafer in the Z direction is mounted to an outer circumferential part of one plate member, and a measuring mirror operable in combination with a laser interferometer is provided as a unit with the Z stage. Any motion of each stage can be controlled on the basis of the measurement made by using this mirror. The structure of the stage device ensures high precision and high rigidity and, therefore, the Z axis can be set substantially horizontally. Consequently the stage device is suitably applicable to an exposure apparatus to be used with an SOR ring.
-
公开(公告)号：DE69023279D1
公开(公告)日：1995-12-07
申请号：DE69023279
申请日：1990-06-06
Applicant: CANON KK
Inventor： OHTSUKA MASARU
IPC: G01B9/02
Abstract: A semiconductor-laser length measuring apparatus includes first and second semiconductor lasers (11a, 11b) which oscillate in wavelength regions different from each other, frequency modulation means (104a, 104b) for modulating an oscillation frequency of the first semiconductor laser, light beam dividing means (2, 31) for dividing first and second laser light beams output from the first and second semiconductor lasers (11a, 11b), respectively, into third and fourth, and fifth and sixth light beams, respectively, phase difference detection means for projecting the third and fifth laser light beams onto and making them reflect from an object (10) to be measured, and for detecting a phase difference between the third and fourth laser light beams, and a phase difference between the fifth and sixth laser light beams, and means for obtaining an optical path difference between the divided laser beams according to the result of the detection. When incremental measurement is performed, there is provided means for incrementally obtaining an optical path difference between divided laser light beams, for example, according to a difference between a beat signal produced from interference between the third and fourth laser light beams, or from interference between the fifth and sixth laser light beams, and an oscillation frequency for driving the first and second AO modulators (104a, 104b). The apparatus switches to incremental measurement after measuring an absolute optical path difference.
-
公开(公告)号：DE3932449A1
公开(公告)日：1990-04-26
申请号：DE3932449
申请日：1989-09-28
Applicant: CANON KK
Inventor： OHTSUKA MASARU
Abstract: An inchworm type driving mechanism usable as a fine positioning device is disclosed. The mechanism includes at least two clamps for clamping a movable member, and an expansible/contractable device for driving the movable member. Each clamp includes a plurality of levers each having a pivot provided by a resilient hinge and an electrostrictive device disposed between end portions of the levers. Through the actuation of the electrostrictive device, the other end portions of the levers sandwich the opposite sides of the movable member to clamp the same. In one preferred form, each clamp is supported by a support, with low rigidity in the clamping direction, but with high rigidity in a direction perpendicular to the clamping direction. Thus, undesirable deformation or distortion of the movable member can be avoided and, therefore, high-precision positioning of the movable member is assured.
-
公开(公告)号：DE10309586A1
公开(公告)日：2003-10-02
申请号：DE10309586
申请日：2003-03-05
Applicant: CANON KK
Inventor： OHTSUKA MASARU , KAMIYA SEIICHI , IIJIMA HITOSHI
IPC: G01B11/24
-
公开(公告)号：DE69023279T2
公开(公告)日：1996-04-18
申请号：DE69023279
申请日：1990-06-06
Applicant: CANON KK
Inventor： OHTSUKA MASARU
IPC: G01B9/02
Abstract: A semiconductor-laser length measuring apparatus includes first and second semiconductor lasers (11a, 11b) which oscillate in wavelength regions different from each other, frequency modulation means (104a, 104b) for modulating an oscillation frequency of the first semiconductor laser, light beam dividing means (2, 31) for dividing first and second laser light beams output from the first and second semiconductor lasers (11a, 11b), respectively, into third and fourth, and fifth and sixth light beams, respectively, phase difference detection means for projecting the third and fifth laser light beams onto and making them reflect from an object (10) to be measured, and for detecting a phase difference between the third and fourth laser light beams, and a phase difference between the fifth and sixth laser light beams, and means for obtaining an optical path difference between the divided laser beams according to the result of the detection. When incremental measurement is performed, there is provided means for incrementally obtaining an optical path difference between divided laser light beams, for example, according to a difference between a beat signal produced from interference between the third and fourth laser light beams, or from interference between the fifth and sixth laser light beams, and an oscillation frequency for driving the first and second AO modulators (104a, 104b). The apparatus switches to incremental measurement after measuring an absolute optical path difference.
-
Patent Agency Ranking
公开(公告)号：DE3740561A1
公开(公告)日：1988-07-21
申请号：DE3740561
申请日：1987-11-30
Applicant: CANON KK
Inventor： FURUKAWA MOTOMU , HIGOMURA MAKOTO , OHTSUKA MASARU , YAMAMOTO HIRONORI , OHKAWA SHINKICHI , MATSUSHITA KOICHI , KAWAI YASUO , KARIYA TAKAO , KUSUNOKI HARUYUKI , YAMAURA TOSHIHIKO
Abstract: A stage device usable, e.g., in an X-ray exposure apparatus, for moving a semiconductor wafer placed in a vacuum ambience and held by a wafer chuck, is disclosed. In the stage device, the wafer chuck holds the wafer so that the surface of the wafer onto which a circuit pattern is to be transferred is placed in a vertical plane, and the wafer chuck is moved vertically and horizontally for step-and-repeat exposure of the wafer. The device includes a guide mechanism, locking mechanism and a constant-tension spring mechanism, to thereby ensure high-accuracy movement of the wafer chuck in the vertical direction as well as high-precision positioning of the wafer. Further, in the stage device, a drive source producing a drive to move the wafer chuck is disposed in a vacuum ambience while, on the other hand, the supply of operating fluids to air bearing assemblies, for guiding the movement of the wafer chuck, is achieved by use of metal pipes coupled by rotary joints. The wafer chuck is resiliently supported by one of the air bearing assemblies, such that the wafer chuck can be moved in the vacuum ambience very accurately and without difficulties.
-
公开(公告)号：DE10309586B4
公开(公告)日：2007-02-22
申请号：DE10309586
申请日：2003-03-05
Applicant: CANON KK
Inventor： OHTSUKA MASARU , KAMIYA SEIICHI , IIJIMA HITOSHI
IPC: G01B11/24 , G01B11/255 , G01M11/02
-
公开(公告)号：DE3740561C2
公开(公告)日：1997-07-10
申请号：DE3740561
申请日：1987-11-30
Applicant: CANON KK
Inventor： FURUKAWA MOTOMU , HIGOMURA MAKOTO , OHTSUKA MASARU , YAMAMOTO HIRONORI , OHKAWA SHINKICHI , MATSUSHITA KOICHI , KAWAI YASUO , KARIYA TAKAO , KUSUNOKI HARUYUKI , YAMAURA TOSHIHIKO
Abstract: A stage device usable, e.g., in an X-ray exposure apparatus, for moving a semiconductor wafer placed in a vacuum ambience and held by a wafer chuck, is disclosed. In the stage device, the wafer chuck holds the wafer so that the surface of the wafer onto which a circuit pattern is to be transferred is placed in a vertical plane, and the wafer chuck is moved vertically and horizontally for step-and-repeat exposure of the wafer. The device includes a guide mechanism, locking mechanism and a constant-tension spring mechanism, to thereby ensure high-accuracy movement of the wafer chuck in the vertical direction as well as high-precision positioning of the wafer. Further, in the stage device, a drive source producing a drive to move the wafer chuck is disposed in a vacuum ambience while, on the other hand, the supply of operating fluids to air bearing assemblies, for guiding the movement of the wafer chuck, is achieved by use of metal pipes coupled by rotary joints. The wafer chuck is resiliently supported by one of the air bearing assemblies, such that the wafer chuck can be moved in the vacuum ambience very accurately and without difficulties.
-
公开(公告)号：DE3926949C2
公开(公告)日：1995-11-30
申请号：DE3926949
申请日：1989-08-14
Applicant: CANON KK
Inventor： IWATA MIKIO , KARIYA TAKAO , OHTSUKA MASARU
Abstract: Disclosed is a stage device suitably usable in a semiconductor microcircuit device manufacturing exposure apparatus for printing a pattern of a mask on a semiconductor wafer, for supporting and positioning the wafer with respect to plurality of directions. The device includes two plate members coupled to each other with a predetermined distance maintained therebetween. Each plate member has formed therein X, Y and theta stages defined by plural cutout grooves. Each stage is resiliently supported by a leaf spring functioning portion formed in the plate member. A Z stage for displacing the wafer in the Z direction is mounted to an outer circumferential part of one plate member, and a measuring mirror operable in combination with a laser interferometer is provided as a unit with the Z stage. Any motion of each stage can be controlled on the basis of the measurement made by using this mirror. The structure of the stage device ensures high precision and high rigidity and, therefore, the Z axis can be set substantially horizontally. Consequently the stage device is suitably applicable to an exposure apparatus to be used with an SOR ring.
-
公开(公告)号：DE3932449C2
公开(公告)日：1995-06-01
申请号：DE3932449
申请日：1989-09-28
Applicant: CANON KK
Inventor： OHTSUKA MASARU
Abstract: An inchworm type driving mechanism usable as a fine positioning device is disclosed. The mechanism includes at least two clamps for clamping a movable member, and an expansible/contractable device for driving the movable member. Each clamp includes a plurality of levers each having a pivot provided by a resilient hinge and an electrostrictive device disposed between end portions of the levers. Through the actuation of the electrostrictive device, the other end portions of the levers sandwich the opposite sides of the movable member to clamp the same. In one preferred form, each clamp is supported by a support, with low rigidity in the clamping direction, but with high rigidity in a direction perpendicular to the clamping direction. Thus, undesirable deformation or distortion of the movable member can be avoided and, therefore, high-precision positioning of the movable member is assured.
-
-
-
-
-
-
-
-
-
Search Results
11
records
(took 0.019 seconds)
