公开(公告)号：WO2014172617A1

公开(公告)日：2014-10-23

申请号：PCT/US2014/034620

申请日：2014-04-18

Applicant: CORNELL UNIVERSITY

Inventor： LAL, Amit ,  NADIG, Sachin ,  ARDANUC, Serhan

IPC: H01L41/277 ,  H01L41/08

CPC classification number: H01L41/0933 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/0922 ,  H01L41/0471 ,  H01L41/053 ,  H01L41/0953 ,  H01L41/096 ,  H01L41/113 ,  H01L41/1132 ,  H01L41/29 ,  H01L41/332 ,  H01L41/335 ,  H02N2/0095 ,  H02N2/108

Abstract: A monolithic, bulk piezoelectric actuator includes a bulk piezoelectric substrate having a starting top surface and an opposing starting bottom surface and a at least two electrodes operatively disposed on the bulk piezoelectric substrate consisting of at least two discrete electrodes disposed on either/both of the starting top surface and the starting bottom surface and at least one electrode disposed on the respective other starting bottom surface or starting top surface. A stage includes a base, at least two of the monolithic, bulk piezoelectric actuators disposed on the base, a movable platform disposed on the base, and a respective number of deformable connectors each having a first connection to a respective one of the piezoelectric actuators and a second connection to a respective portion of the movable platform. A method for monolithically making a monolithic, bulk piezoelectric actuator involves a direct write micropatterning technique.

Abstract translation: 整体式体积压电致动器包括具有起始顶表面和相对的起始底表面的体压电基片，以及可操作地设置在体压电基片上的至少两个电极，该至少两个电极由设置在起动 顶表面和起始底表面以及设置在相应的其它起始底表面或起始顶表面上的至少一个电极。 舞台包括基座，设置在基座上的整体式体积压电致动器中的至少两个，设置在基座上的可移动平台和相应数量的可变形连接器，每个可变形连接器均具有与相应的一个压电致动器的第一连接， 与可移动平台的相应部分的第二连接。 用于单片制造单体体积压电致动器的方法涉及直接写入微图案技术。

公开(公告)号：WO2012075272A2

公开(公告)日：2012-06-07

申请号：PCT/US2011/062871

申请日：2011-12-01

Applicant: CORNELL UNIVERSITY ,  LAL, Amit ,  AMPONSAH, Kwame

Inventor： LAL, Amit ,  AMPONSAH, Kwame

IPC: H01L25/16 ,  B81B7/02

CPC classification number: H01L25/16 ,  B81C1/00246 ,  B81C2203/075 ,  H01L29/42316 ,  H01L29/66893 ,  H01L29/66901 ,  H01L29/735 ,  H01L29/8086 ,  H01L29/8126 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A device including a NEMS/MEMS machine(s) and associated electrical circuitry. The circuitry includes at least one transistor, preferably JFET, that is used to: (i) actuate the NEMS/MEMS machine; and/or (ii) receive feedback from the operation of the NEMS/MEMS machine The transistor (e.g., the JFET) and the NEMS/MEMS machine are monolithically integrated for enhanced signal transduction and signal processing. Monolithic integration is preferred to hybrid integration (e.g., integration using wire bonds, flip chip contact bonds or the like) due to reduce parasitics and mismatches. In one embodiment, the JFET is integrated directly into a MEMS machine, that is in the form of a SOI MEMS cantilever, to form an extra-tight integration between sensing and electronic integration. When a cantilever connected to the JFET is electrostatically actuated; its motion directly affects the current in the JFET through monolithically integrated conduction paths (e.g., traces, vias, etc.) In one embodiment, devices according to the present invention were realized in 2?m thick SOI cross-wire beams, with a MoSi2 contact metallization for stress minimization and ohmic contact. In this embodiment, the pull-in voltage for the MEMS cantilever was 21V and the pinch-off voltage of the JFET was -19V.

Abstract translation: 包括NEMS / MEMS机器和相关电路的设备。 该电路包括至少一个晶体管，优选JFET，其用于：（i）致动NEMS / MEMS机器; 和/或（ii）从NEMS / MEMS机器的操作接收反馈。晶体管（例如，JFET）和NEMS / MEMS机器单片集成以增强信号转换和信号处理。 由于减少了寄生和失配，单片集成优于混合集成（例如，使用引线键合，倒装芯片接触键等的集成）。 在一个实施例中，JFET直接集成到MEMS机器中，即以SOI MEMS悬臂的形式，以在感测和电子集成之间形成非常紧密的集成。 当连接到JFET的悬臂被静电致动时; 其运动通过单片集成传导路径（例如，迹线，过孔等）直接影响JFET中的电流。在一个实施例中，根据本发明的器件在2μm厚的SOI交叉线束中实现，其中MoSi2 用于应力最小化和欧姆接触的接触金属化。 在此实施例中，MEMS悬臂的拉入电压为21V，JFET的夹断电压为-19V。

公开(公告)号：WO2019226862A1

公开(公告)日：2019-11-28

申请号：PCT/US2019/033688

申请日：2019-05-23

Applicant: CORNELL UNIVERSITY

Inventor： LAL, Amit ,  XU, Chris ,  SINGH, Ankur

IPC: B81B3/00 ,  G01N3/04 ,  G06K9/00

Abstract: An integrated GHz ultrasonic neuro-cognitive system including a chip-cyborg having a network of biological neurons that forms a biological information processor, which can be controlled by electronics, optics, and GHz ultrasonic beams. In one example, the chip-scale microsystem includes a CMOS chip with RF CMOS and piezoelectric thin film transducers that can generate GHz ultrasonic waves, which can be phased to form narrow beams, achieving significant ultrasonic intensity to affect neurons. With a sufficient number of ultrasonic pixels, the focal point of the beam can be narrow enough to focus effect specific section of a neuron to enhance or decrease synaptic weights owing to ultrasonic radiation forces and acoustic streaming.

公开(公告)号：WO2019152961A1

公开(公告)日：2019-08-08

申请号：PCT/US2019/016564

申请日：2019-02-04

Applicant: CORNELL UNIVERSITY

Inventor： LAL, Amit ,  ABDELMEJEED, Mamdouh ,  KUO, Justin, C.

IPC: G01B17/00 ,  A01G7/04

Abstract: Disclosed are devices, systems and methods for touch, force and/or thermal sensing by an ultrasonic transceiver chip. In some aspects, an ultrasonic transceiver sensor device includes a semiconductor substrate; a CMOS layer attached to the substrate; an array of piezoelectric transducers coupled to the CMOS layer to generate ultrasonic pulses; and a contact layer attached to the substrate on a side opposite the substrate for providing a surface for contact with an object, where an ultrasonic pulse generated by a piezoelectric transducer propagates through the substrate and the contact layer, such that when the object is in contact with the surface of the contact layer, a reflected ultrasonic pulse is produced and propagates through the contact layer and the substrate to be received at the array of piezoelectric transducers, and the CMOS layer receive and process outputs from the piezoelectric transducers produced in response to the received reflected ultrasonic pulses.

公开(公告)号：WO2015113072A1

公开(公告)日：2015-07-30

申请号：PCT/US2015/013154

申请日：2015-01-27

Applicant: CORNELL UNIVERSITY

Inventor： LAL, Amit ,  GUND, Ved

IPC: G01N1/22 ,  G01N27/64 ,  G01N33/00

CPC classification number: G01N27/64 ,  G01N27/62 ,  G01N27/622

Abstract: Methods, systems, and devices are disclosed for implementing molecular sensors. In one aspect, an ion-gas sensor device includes a pre-concentration module to collect and concentrate a gas-phase chemical for analysis; a piezoelectric fan to produce an air-flow through acoustic streaming to drive the gas-phase chemical released by the pre-concentration module to one or more downstream modules; an ionizer downstream from the piezoelectric fan to ionize the gas-phase chemical; and a gas sensor downstream from the piezoelectric fan and the ionizer to detect the ionized gas-phase chemical driven by the piezoelectric fan. The piezoelectric fan can include a stack of thin- film layers that includes a thin-film piezoelectric layer. The ion-gas sensor device is made into an ultra-portable package capable of integration with mobile communication devices, such as PDA devices or smart phones.

Abstract translation: 公开了用于实现分子传感器的方法，系统和装置。 一方面，离子气体传感器装置包括用于收集和浓缩用于分析的气相化学品的预浓缩模块; 压电风扇，通过声流输出产生空气流，以将由预浓缩模块释放的气相化学品驱动到一个或多个下游模块; 压电风扇下游的离子发生器离子化气相化学物质; 以及压电风扇和离子发生器下游的气体传感器，用于检测由压电风扇驱动的电离气相化学物质。 压电风扇可以包括薄膜层叠层，其包括薄膜压电层。 离子气体传感器装置被制成能够与移动通信设备（例如PDA设备或智能电话）集成的超便携式包装。

公开(公告)号：WO2014123591A3

公开(公告)日：2014-08-14

申请号：PCT/US2013/065549

申请日：2013-10-17

Applicant: CORNELL UNIVERSITY

Inventor： LAL, Amit ,  SHI, Yue ,  ARDANUC, Serhan ,  HWANG, June-Ho ,  RANA, Farhan

IPC: H05H7/06

Abstract: A system that generates short charged particle packets or pulses (e.g., electron packets) without requiring a fast-switching-laser source is described. This system may include a charged particle source that produces a stream of continuous charged particles to propagate along a charged particle path. The system also includes a charged particle deflector positioned in the charged particle path to deflect the stream of continuous charged particles to a set of directions different from the charged particle path. The system additionally includes a series of beam blockers located downstream from the charged particle deflector and spaced from one another in a linear configuration as a beam-blocker grating. This beam-blocker grating can interact with the deflected stream of charged particles and divide the stream of the charged particles into a set of short particle packets. In one embodiment, the charged particles are electrons. The beam blockers can be conductors.

公开(公告)号：WO2014039943A1

公开(公告)日：2014-03-13

申请号：PCT/US2013/058696

申请日：2013-09-09

Applicant: CORNELL UNIVERSITY

Inventor： LAL, Amit ,  ARDANUC, Serhan

IPC: A01M17/00 ,  A01G11/00

CPC classification number: G02B19/0042 ,  A01G9/246 ,  A01G11/00 ,  A01M3/007 ,  A01M17/00 ,  A01M19/00 ,  A01M21/04 ,  G02B19/0023 ,  G02B26/0816 ,  G02B27/0006 ,  Y02A40/268

Abstract: Methods, structures, devices and systems are disclosed for solarizing soil using a moveable optical focusing array. In one example, an apparatus to solarize soil from a moveable platform includes a vehicle, an array of mirrors located on the exterior of the vehicle, in which the mirrors are steerable to control the orientation of the mirrors to direct sunlight to a spot on soil that generates heat to solarize the soil, and a sensor coupled to the vehicle to measure the temperature of the soil, in which the orientation of the mirrors is determined based at least in part on the measured temperature to control the temperature of the soil.

Abstract translation: 公开了使用可移动光学聚焦阵列使土壤日晒的方法，结构，装置和系统。 在一个示例中，从可移动平台使土壤日晒的装置包括车辆，位于车辆外部的反射镜阵列，其中反射镜可操纵以控制反射镜的定向以将阳光直射到土壤上的斑点 其产生热量以使土壤太阳化，以及耦合到车辆的传感器以测量土壤的温度，其中至少部分地基于测量的温度来确定反射镜的取向以控制土壤的温度。

公开(公告)号：WO2012151360A2

公开(公告)日：2012-11-08

申请号：PCT/US2012/036251

申请日：2012-05-03

Applicant: CORNELL UNIVERSITY ,  LAL, Amit ,  PIRATLA, Sarvani

Inventor： LAL, Amit ,  PIRATLA, Sarvani

IPC: G01P15/18 ,  G01P15/02

CPC classification number: G01P21/00

Abstract: An inertial sensor calibration method and inertial sensor calibration apparatus. One or more diffraction patterns are generated by one or more fixed and/or moveable gratings (inertial sensors) illuminated by an atomically stabilized source attached to a base and detected by an imager. The grating and/or inertial sensor has a designed parameter value and an actual respective parameter value, such as motion or distance that can be determined upon ultra-precise measurement. Such ultra-precise measurement can be used to calibrate the grating or inertial sensor.

Abstract translation: 惯性传感器校准方法和惯性传感器校准装置。 一个或多个衍射图案由一个或多个固定和/或可移动的光栅（惯性传感器）产生，该光栅由附接到基座的原子稳定的光源照射并由成像器检测。 光栅和/或惯性传感器具有设计参数值和实际相应的参数值，例如可以在超精密测量时确定的运动或距离。 这种超精密测量可用于校准光栅或惯性传感器。

公开(公告)号：WO2010065702A2

公开(公告)日：2010-06-10

申请号：PCT/US2009/066517

申请日：2009-12-03

Applicant: CORNELL UNIVERSITY ,  LAL, Amit ,  SHI, Yue

Inventor： LAL, Amit ,  SHI, Yue

IPC: H05H13/04

CPC classification number: G21B1/15 ,  H05H15/00 ,  Y02E30/16

Abstract: A charged particle accelerator having a curvilinear beam trajectory maintained solely by a laterally directed, constant electric field; requiring no magnetic field. A method for controlling the trajectory of a charged particle in an accelerator by applying only a constant electric field for beam trajectory control. Curvilinear steering electrodes held at a constant potential create the beam path. A method for making a chip-scale charged particle accelerator involves integrated circuit-based processes and materials. A particle accelerator that can generate 110 KeV may a footprint less than about 1 cm 2 .

Abstract translation: 具有仅由横向恒定电场维持的曲线光束轨迹的带电粒子加速器; 不需要磁场。 一种通过仅施加用于光束轨迹控制的恒定电场来控制加速器中的带电粒子的轨迹的方法。 保持恒定电位的曲线转向电极产生光束路径。 制造芯片级带电粒子加速器的方法涉及基于集成电路的工艺和材料。 可以产生110keV的粒子加速器可以具有小于约1cm 2的足迹。

公开(公告)号：WO2010030698A1

公开(公告)日：2010-03-18

申请号：PCT/US2009/056400

申请日：2009-09-09

Applicant: CORNELL UNIVERSITY ,  LAL, Amit ,  YOSHIMIZU, Norimasa

Inventor： LAL, Amit ,  YOSHIMIZU, Norimasa

IPC: B23Q17/09

CPC classification number: G01B11/25 ,  G01B11/2518 ,  G01Q40/02 ,  G01Q80/00 ,  G03F7/70383 ,  G03F7/7085

Abstract: A wafer-scale nano-metrology system (10) for sensing position of a nanofabrication element (16) when illuminated by a patterned optical projection defining a grid or position measuring gauge includes a frequency stabilized laser emitter (12) configured to generate a laser emission at a selected frequency, where the laser emission forms a diverging beam configured to illuminate a selected area occupied by a target fabrication object (18) having a proximal surface. An optical pattern generator (14) is illuminated by laser (12) and generates a patterned optical projection grid or gauge for projection upon the target fabrication object (18). A movable tool or nanofabrication element (16) carries an optical sensor array (50), and the sensor array detect at least a portion of the optical projection grid, and, in response to that detection, generates grid position data for use in controlling the position of the tool (16).

Abstract translation: 用于感测纳米加工元件（16）的位置的晶片级纳米测量系统（10）当被限定网格或位置测量计的图案化光学投影仪照射时，包括频率稳定的激光发射器（12），其被配置为产生激光发射 在选定的频率处，其中激光发射形成发散光束，其被配置为照射由具有近端表面的目标制造物体（18）占据的选定区域。 光学图案发生器（14）被激光（12）照射，并且产生用于在目标制造对象（18）上投影的图案化的光学投影栅格或量规。 可移动工具或纳米制造元件（16）承载光学传感器阵列（50），并且传感器阵列检测光学投影栅格的至少一部分，并且响应于该检测，生成栅格位置数据以用于控制 工具（16）的位置。