公开(公告)号：EP2340148A1

公开(公告)日：2011-07-06

申请号：EP09813558.5

申请日：2009-09-09

Applicant: Cornell University

Inventor： LAL, Amit ,  YOSHIMIZU, Norimasa

IPC: B23Q17/09

CPC classification number: G01B11/25 ,  G01B11/2518 ,  G01Q40/02 ,  G01Q80/00 ,  G03F7/70383 ,  G03F7/7085

Abstract: A wafer-scale nano-metrology system (10) for sensing position of a nanofabrication element (16) when illuminated by a patterned optical projection defining a grid or position measuring gauge includes a frequency stabilized laser emitter (12) configured to generate a laser emission at a selected frequency, where the laser emission forms a diverging beam configured to illuminate a selected area occupied by a target fabrication object (18) having a proximal surface. An optical pattern generator (14) is illuminated by laser (12) and generates a patterned optical projection grid or gauge for projection upon the target fabrication object (18). A movable tool or nanofabrication element (16) carries an optical sensor array (50), and the sensor array detect at least a portion of the optical projection grid, and, in response to that detection, generates grid position data for use in controlling the position of the tool (16).

公开(公告)号：EP2266199A1

公开(公告)日：2010-12-29

申请号：EP09731448.8

申请日：2009-04-08

Applicant: Cornell University

Inventor： LAL, Amit ,  ARDANUC, Serhan, M.

IPC: H02N6/00

CPC classification number: G02B7/1821 ,  B81B3/0054 ,  B81B2201/042 ,  B81B2203/058 ,  F24S23/80 ,  F24S30/452 ,  F24S2023/85 ,  G02B7/182 ,  G02B26/0841 ,  H01L31/0543 ,  H01L31/0547 ,  Y02E10/47 ,  Y02E10/52

Abstract: A system (120) for reflecting or redirecting incident light, microwave or sound energy includes a first substrate (144) configured to support an array of reflective elements (130) that can be angularly displaced through a range of substantially (90) degrees in response to a reflector angle control signal and a controller programmed to generate the reflector angle control signal to achieve desired incident energy, beam or wavefront redirection. The reflective elements (130) preferably comprise MEMS micro-reflector elements hingedly or movably attached to the first substrate (130) and define a reflective surface that is aimed at the source of incident light, microwave or sound energy.

Abstract translation: 用于反射或重定向入射光，微波或声能的系统（120）包括被配置为支撑反射元件阵列（130）的第一基板（144），所述反射元件阵列可以在基本上（90）度的范围内成角度地移位 反射器角度控制信号和被编程为产生反射器角度控制信号以实现期望的入射能量，波束或波前重定向的控制器。 反射元件（130）优选地包括MEMS微反射器元件，其被铰接地或可移动地附接到第一基板（130）并且限定针对入射光源，微波或声能源的反射表面。

公开(公告)号：EP3100024B1

公开(公告)日：2020-09-09

申请号：EP15739947.8

申请日：2015-01-27

Applicant: Cornell University

Inventor： LAL, Amit ,  GUND, Ved

IPC: G01N1/22 ,  G01N27/64 ,  G01N33/00 ,  G01N27/62

公开(公告)号：EP3100024A1

公开(公告)日：2016-12-07

申请号：EP15739947.8

申请日：2015-01-27

Applicant: Cornell University

Inventor： LAL, Amit ,  GUND, Ved

IPC: G01N1/22 ,  G01N27/64 ,  G01N33/00

Abstract: Methods, systems, and devices are disclosed for implementing molecular sensors. In one aspect, an ion-gas sensor device includes a pre-concentration module to collect and concentrate a gas-phase chemical for analysis; a piezoelectric fan to produce an air-flow through acoustic streaming to drive the gas-phase chemical released by the pre-concentration module to one or more downstream modules; an ionizer downstream from the piezoelectric fan to ionize the gas-phase chemical; and a gas sensor downstream from the piezoelectric fan and the ionizer to detect the ionized gas-phase chemical driven by the piezoelectric fan. The piezoelectric fan can include a stack of thin-film layers that includes a thin-film piezoelectric layer. The ion-gas sensor device is made into an ultra-portable package capable of integration with mobile communication devices, such as PDA devices or smart phones.

Abstract translation: 公开了用于实现分子传感器的方法，系统和装置。 一方面，离子气体传感器装置包括用于收集和浓缩用于分析的气相化学品的预浓缩模块; 压电风扇，通过声流输出产生空气流，以将由预浓缩模块释放的气相化学品驱动到一个或多个下游模块; 在压电风扇下游的离子化器离子化气相化学物质; 以及压电风扇和离子发生器下游的气体传感器，用于检测由压电风扇驱动的电离气相化学物质。 压电风扇可以包括薄膜层叠层，其包括薄膜压电层。 离子气体传感器装置被制成能够与诸如PDA装置或智能电话的移动通信装置集成的超便携式包装。

公开(公告)号：WO2017196945A1

公开(公告)日：2017-11-16

申请号：PCT/US2017/031909

申请日：2017-05-10

Applicant: CORNELL UNIVERSITY

Inventor： LAL, Amit ,  GUPTA, Sahil ,  NADIG, Sachin ,  DAVAJI, Benyamin

IPC: G01H11/02 ,  H02K35/02

Abstract: A vibration transducer module for detecting a vibratory signal, comprising a base, a spring connected to the base at a first location, a mass mechanically coupled to the spring at a second location remote from the first location, and a wall configured to position a first wall electrode and a second wall electrode a selected distance from the first location, the conductive element positioned and sized to contact the first wall electrode and the second wall electrode. The mass comprises a conductive element, and an energy harvester to provide a first voltage signal. The energy harvester may comprise a piezoelectric material or be construct as a SAW device. The module may be combined with a rectifier and an oscillator to form a vibration sensor.

Abstract translation: 一种用于检测振动信号的振动换能器模块，包括基座，在第一位置连接到基座的弹簧，在远离第一位置的第二位置机械连接到弹簧的质量块， 以及构造成将第一壁电极和第二壁电极定位成离开第一位置选定距离的壁，所述导电元件被定位和定尺寸为接触第一壁电极和第二壁电极。 质量块包括导电元件和能量采集器以提供第一电压信号。 能量采集器可以包括压电材料或者构造为SAW器件。 该模块可以与一个整流器和一个振荡器组合成振动传感器。

公开(公告)号：WO2017192834A1

公开(公告)日：2017-11-09

申请号：PCT/US2017/031029

申请日：2017-05-04

Applicant: CORNELL UNIVERSITY

Inventor： LAL, Amit ,  SCHENKEL, Thomas ,  PERSAUD, Arun ,  JI, Qing ,  SEIDL, Peter ,  WALDRON, Will ,  ARDANUC, Serhan ,  KADAYRA BASAVARAJAPPA, Vinaya, Kumar

IPC: H05H13/00 ,  H05H7/08

CPC classification number: H05H7/22 ,  H05H7/02 ,  H05H7/08 ,  H05H9/04 ,  H05H13/00 ,  H05H2007/025 ,  H05H2007/045

Abstract: A wafer-based charged particle accelerator includes a charged particle source and at least one RF charged particle accelerator wafer sub-assembly and a power supply coupled to the at least one RF charged particle accelerator wafer sub-assembly. The wafer-based charged particle accelerator may further include a beam current-sensor. The wafer-based charged particle accelerator may further include at least a second RF charged particle accelerator wafer sub-assembly and at least one ESQ charged particle focusing wafer. Fabrication methods are disclosed for RF charged particle accelerator wafer sub-assemblies, ESQ charged particle focusing wafers, and the wafer-based charged particle accelerator.

Abstract translation: 基于晶片的带电粒子加速器包括带电粒子源和至少一个RF带电粒子加速器晶片子组件以及耦合到所述至少一个RF带电粒子加速器晶片子组件的电源 。 基于晶片的带电粒子加速器可以进一步包括射束电流传感器。 基于晶片的带电粒子加速器还可以包括至少第二RF带电粒子加速器晶片子组件和至少一个ESQ带电粒子聚焦晶片。 针对RF带电粒子加速器晶片子组件，ESQ带电粒子聚焦晶片和基于晶片的带电粒子加速器公开了制造方法。

公开(公告)号：WO2017066436A2

公开(公告)日：2017-04-20

申请号：PCT/US2016/056826

申请日：2016-10-13

Applicant: CORNELL UNIVERSITY

Inventor： LAL, Amit ,  MOLNAR, Alyosha

IPC: H01L41/113 ,  H01L41/187 ,  H01H1/00 ,  H01H59/00 ,  H02N2/18

CPC classification number: H01H1/00 ,  G01D21/02 ,  H01H59/00 ,  H01L27/20 ,  H01L41/1132

Abstract: A zero power sensor node includes a sensor suite including two or more different types of zero power sensors, particularly including at least two of a zero power PZT-bimorph accelerometer, a zero power PZT-bimorph rotation sensor, a zero power PZT-bimorph magnetic sensor, a zero power PZT-bimorph gyroscope, and a zero power acoustic sensor, which may be a PZT-bimorph acoustic sensor or an resonant cavity, and a near zero power-consuming, multi gate electrostatic switch. The node output can send a wake-up signal to trigger a higher power consuming device.

Abstract translation: 零功率传感器节点包括传感器套件，传感器套件包括两种或更多种不同类型的零功率传感器，特别是包括零功率PZT双晶片加速度计，零功率PZT双晶片旋转传感器 ，零功率PZT双压电晶片磁性传感器，零功率PZT双压电晶片陀螺仪和零功率声学传感器，其可以是PZT双压电晶片声学传感器或谐振腔，以及近零功耗的多栅极静电 开关。 节点输出可以发送唤醒信号来触发更高功耗的设备。

公开(公告)号：WO2010054368A3

公开(公告)日：2010-05-14

申请号：PCT/US2009/063855

申请日：2009-11-10

Applicant: CORNELL UNIVERSITY ,  LAL, Amit ,  TIN, Steven

Inventor： LAL, Amit ,  TIN, Steven

IPC: H02N2/00 ,  H02J7/00

Abstract: An autonomous, self -powered device includes a radioisotope-powered current impulse generator including a spring assembly comprising a cantilever, and a piezoelectric- surface acoustic wave (P-SAW) structure connected in parallel to the current impulse generator. Positive charges are accumulated on an electrically isolated 63 Ni thin film due to the continuous emission of β-particles (electrons), which are collected on the cantilever. The accumulated charge eventually pulls the cantilever into the radioisotope thin-film until electrical discharge occurs. The electrical discharge generates a transient magnetic and electrical field that can excite the RF modes of a cavity in which the electrical discharge occurs. A piezoelectric-SAW resonator is connected to the discharge assembly to control the RF frequency output. A method for generating a tuned RF signal includes inputting an energy pulse to a P-SAWresonator, exciting the resonant frequency thereof, and outputting an RF signal having a frequency tuned to the resonator frequency.

公开(公告)号：WO2019018328A1

公开(公告)日：2019-01-24

申请号：PCT/US2018/042371

申请日：2018-07-17

Applicant: CORNELL UNIVERSITY

Inventor： LAL, Amit ,  BATTEN, Christopher

IPC: H01L23/58 ,  H01L23/00 ,  H01L41/107 ,  H01L41/187

Abstract: A system, comprising: (i) an interposer layer; (ii) a circuit layer positioned on the interposer layer and comprising a plurality of sonically-enabled pads; and (iii) an interrogator layer positioned on the circuit layer and comprising a plurality of ultrasonic transducers configured to sonically interrogate the circuit layer; wherein the sonically-enabled pads are configured to generate an electrical signal in response to sonic interrogation from the interrogator layer, if the sonically-enabled pad is functional.

公开(公告)号：WO2015138058A2

公开(公告)日：2015-09-17

申请号：PCT/US2015/014324

申请日：2015-02-03

Applicant: CORNELL UNIVERSITY

Inventor： LAL, Amit ,  KUO, Justin, C.

CPC classification number: G11C21/023 ,  B06B1/0215 ,  B06B2201/20 ,  B06B2201/55 ,  B06B2201/70 ,  G11C7/16 ,  G11C19/00 ,  G11C2013/0095

Abstract: Delay line memory device, systems and methods are disclosed. In one aspect, a delay line memory device includes a substrate; an electronic unit disposed on the substrate and operable to receive, amplify, and/or synchronize data signals into a bit stream to be transmitted as acoustic pulses carrying data stored in the delay line memory device; a first and a second piezoelectric transducer disposed on the substrate and in communication with the electronic unit, in which the first piezoelectric transducer is operable to transmit the data signals to the acoustic pulses that carry the data through the bulk of the substrate, and the second piezoelectric transducer is operable to transduce the received acoustic pulses to intermediate electrical signals containing the data, which are transferred to the electronic unit via an electrical interconnect to cause refresh of the data in the delay line memory device.

Abstract translation: 延迟线存储器件，系统和方法被公开。 一方面，延迟线存储器件包括衬底; 电子单元，其设置在所述基板上并且可操作以将数据信号接收，放大和/或同步到作为携带存储在所述延迟线存储器装置中的数据的声脉冲发送的比特流; 第一和第二压电换能器，其设置在所述基板上并与所述电子单元连通，其中所述第一压电换能器可操作以将所述数据信号传送到通过所述基板的所述主体承载所述数据的声脉冲， 压电传感器可操作以将接收到的声脉冲转换成包含数据的中间电信号，其经由电互连传送到电子单元以引起延迟线存储器件中的数据刷新。