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公开(公告)号：DE69530446T2
公开(公告)日：2004-03-25
申请号：DE69530446
申请日：1995-08-24
Applicant: TOSHIBA KAWASAKI KK , EBARA CORP
Inventor： HARADA MINORU , SHINJO RYOICHI , TSUJIMURA MANABU , NAKATA REMPEI , MIYAZAKI KUNIHIRO , KAJI NARUHIKO
IPC: C01B13/11
Abstract: In an improved ozonizer, at least those parts of an ozone gas delivery path located downstream of an ozone generating cell which are to come into contact with ozone gas are either composed of or coated with at least one ozone-resistant, Cr-free material selected from among aluminum (Al), an aluminum alloy, Teflon, fluorinated nickel, a nickel alloy, a silicon oxide based glass and a high-purity aluminium oxide. The ozonizer is capable of producing ozone that is not contaminated with Cr compounds at all or which is insufficiently contaminated to cause any practical problem in the fabrication of highly integrated semiconductor devices.
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公开(公告)号：DE69321409D1
公开(公告)日：1998-11-12
申请号：DE69321409
申请日：1993-07-02
Applicant: EBARA CORP
Inventor： SHINJO RYOICHI , KAMIYA ICHIRO , HARADA MINORU , NISHIOKA YUKIKO
Abstract: In an electric discharge type ozonizer using highly pure oxygen gas having a purity of not lower than 99.99% as a raw material gas, the pressure of a gas in the discharge space of a discharger is raised to a level higher than atmospheric pressure by at least 1.1 kgf/cm and/or in which a liquid-cooled discharger is used, and the temperature of the cooling liquid is set at a level not lower than 15 DEG C, whereby the ozonizer is capable of stably producing ozone gas at a high ozone concentration without causing lowering of the ozone concentration with time.
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公开(公告)号：DE69311957D1
公开(公告)日：1997-08-14
申请号：DE69311957
申请日：1993-04-22
Applicant: EBARA CORP
Inventor： KAMIYA ICHIRO , SHINJO RYOICHI , MURAKAMI TAKESHI , NISHIOKA YUKIKO , HARADA MINORU
Abstract: A discharge reactor that generates silent discharge and/or creeping discharge between dielectric and high voltage electrode and/or grounded electrode, said dielectric being located between high voltage electrode and grounded electrode, and which generates clean ozone in the discharge space 1 as it passes through said discharge space 1 or as it is held within said discharge space 1, which discharge reactor is characterized in that the dielectric is made of highly purified quartz glass (SiO2) or single-crystal sapphire which is a highly purified crystallized aluminium oxide or high-purity alumina ceramics which is the firing of highly purified aluminum oxide. Further, in order to obtain cleaner and highly concentration ozone, at least the electrode or electrodes in the area of the discharge space which is to be exposed to discharge are made of a high-purity aluminum material and at least the area of the discharge space which is to be exposed to discharge is further coated with an anodic oxidation film.
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公开(公告)号：DE69117267T2
公开(公告)日：1996-10-02
申请号：DE69117267
申请日：1991-11-29
Applicant: EBARA CORP
Inventor： NODA YUMIKO , KAMIYA ICHIRO , TOSHIMITSU MANABU , SATO YOSHIO , SHINJO RYOICHI
Abstract: A ceramic hydrodynamic bearing used as a radial or a thrust bearing in a spindle motor for a hard disk driver. The bearing includes a ceramic bearing base having hydrodynamic pressure generating grooves. A sliding surface of the bearing base is irradiated with an energy beam with a high energy density to remove said material, thereby forming hydrodynamic pressure generating groove, and at the same time the grooves are coated with a modification layer that is formed by melting the ceramic material that constitutes said ceramic bearing base with the energy beam and by solidifying said ceramic bearing base.
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公开(公告)号：DE69117267D1
公开(公告)日：1996-03-28
申请号：DE69117267
申请日：1991-11-29
Applicant: EBARA CORP
Inventor： NODA YUMIKO , KAMIYA ICHIRO , TOSHIMITSU MANABU , SATO YOSHIO , SHINJO RYOICHI
Abstract: A ceramic hydrodynamic bearing used as a radial or a thrust bearing in a spindle motor for a hard disk driver. The bearing includes a ceramic bearing base having hydrodynamic pressure generating grooves. A sliding surface of the bearing base is irradiated with an energy beam with a high energy density to remove said material, thereby forming hydrodynamic pressure generating groove, and at the same time the grooves are coated with a modification layer that is formed by melting the ceramic material that constitutes said ceramic bearing base with the energy beam and by solidifying said ceramic bearing base.
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Patent Agency Ranking
公开(公告)号：JP2004201823A
公开(公告)日：2004-07-22
申请号：JP2002372957
申请日：2002-12-24
Applicant: Ebara Corp , Watanabe Cleaning:Kk , 有限会社ワタナベクリーニング , 株式会社荏原製作所
Inventor： SHINJO RYOICHI , ISHII YOSHIHIRO , WATANABE MUNETAKA
IPC: D06F39/08 , H01L21/304
Abstract: PROBLEM TO BE SOLVED: To develop the sufficient washing or purifying actions by making magnetic forces work on an ozone solution having ozone dissolved thereinto.
SOLUTION: A washing apparatus supplies the ozone solution having ozone dissolved thereinto into a tub to wash the washing in the tub. The washing apparatus is provided with a magnetism supply means which makes the magnetic forces (fluxes from permanent magnets 30 and 30) work on the ozone solution to be supplied into the washing tub or the ozone solution Q in the tub. In the washing apparatus, by the action of the magnetic forces on the ozone solution, the Lorenz force works on the charged particles existing in the water to activate the ozone solution, thereby effectively removing the dirt and the pollutants in the objects to be washed or purified.
COPYRIGHT: (C)2004,JPO&NCIPI-
17.发明专利
公开(公告)号：JP2002316027A
公开(公告)日：2002-10-29
申请号：JP2001120828
申请日：2001-04-19
Applicant: EBARA CORP
Inventor： OZAWA TAKU , SHINJO RYOICHI , HARADA MINORU , SAITO TAKAYUKI , SASAKI KENICHI , MURAKAWA KEIICHI , SHIMAMURA KAZUHIDE
IPC: B01F1/00 , B01D53/22 , B01D61/00 , B01F3/04 , B01F15/04 , C02F1/36 , C02F1/44 , C02F1/68 , C02F1/74 , C02F1/78 , H01L21/00
Abstract: PROBLEM TO BE SOLVED: To provide a device for manufacturing gas-dissolved water which can efficiently manufacture gas-dissolved water 31 wherein concentration of a dissolved gas 3 is at or below saturated concentration in a short time. SOLUTION: The device for manufacturing gas-dissolved water 1 which is constituted so that a gas to be dissolved 3 is dissolved in water to be treated 4 to obtain the gas-dissolved water 5 is provided with a dissolving section 11 for dissolving the gas to be dissolved in the water to be treated, a gas to be dissolved supply passage 12 for guiding the gas to be dissolved to the dissolving section, a first water to be treated supply passage 13 for guiding the water to be treated to the dissolving section, a gas-dissolved water discharging passage 14 for guiding the gas-dissolved water from the dissolving section and a second water to be treated supply passage 15 for guiding the water to be treated without passing through the dissolving section. The second water to be treated supply passage is joined to the gas-dissolved water discharging passage and the water to be treated guided by the second water to be treated supply passage dilutes concentration of the dissolved gas in the gas-dissolved water to a prescribed concentration.
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公开(公告)号：JP2002020105A
公开(公告)日：2002-01-23
申请号：JP2000195421
申请日：2000-06-29
Applicant: EBARA CORP
Inventor： SHINJO RYOICHI , HARADA MINORU , NISHIOKA YUKIKO
Abstract: PROBLEM TO BE SOLVED: To provide a discharge body of an ozone generating device having high ozone generating efficiency and capable of generating high concentration ozone. SOLUTION: The ozone generating device is provided with a pair of electrodes 22 and 42 having electrode surfaces facing each other, a high voltage AC power source 17 for applying high voltage between the electrodes, a dielectric 43 arranged between the opposed electrodes and a gas flow passage for passing the raw material gas G between the opposed electrodes. At least electrode surface 22 of one of the pair electrodes is provided with many grooves 16 extending nearly parallel to each other and the raw material gas G is made to flow through a pace between many grooves 16 and the dielectric 43 in a direction crossing many grooves 16.
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公开(公告)号：JPH0624710A
公开(公告)日：1994-02-01
申请号：JP19900592
申请日：1992-07-03
Applicant: EBARA CORP
Inventor： NISHIOKA YUKIKO , KAMIYA ICHIRO , HARADA MINORU , SHINJO RYOICHI
Abstract: PURPOSE:To prevent dew condensation in a discharge body, etc., and prevent the discharge body, etc., from causing abnormal discharge in an ozone generator cooling the discharge body, etc., generating ozone by discharging at high voltage. CONSTITUTION:In an ozone generator 1 housing a discharge body 10 for generating ozone by discharge, an electric source 12 applying alternating current high voltage to the discharge body and a cooling part 11, etc., for cooling the discharge body 10 and/or electron source 12 in one housing 2, a dehumidifier 15 for outside air is provided in an outside air suction port 14 for ventilation. A cooling liquid passage of the outside air dehumidifier 15 is provided on upstream side of the cooling part 11 for the discharge body 10, etc., to keep the interior of the device in drying atmosphere. A dehumidifier 6 is provided in the outlet of a compressor 5 for introducing a raw material gas and simultaneously a discharge port 24 of a discharge gas piping 23 of an oxygen enriching device or heatless drier 8 passing the dehumidified raw material gas through is provided in the device.
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公开(公告)号：JPH04203618A
公开(公告)日：1992-07-24
申请号：JP33784590
申请日：1990-11-30
Applicant: EBARA CORP
Inventor： NODA YUMIKO , KAMIYA ICHIRO , SHINJO RYOICHI , TOSHIMITSU MANABU , SATO YOSHIO
Abstract: PURPOSE:To enhance machining accuracy by applying surface finish to a portion forming a slide surface of a bearing base body made of ceramics after being sintered, bonding an organic material for absorbing a YAG laser beam according to a predetermined pattern of a machining groove so as to radiate the laser beam along the bonded pattern. CONSTITUTION:A portion of a slide surface of a bearing base body 1 made of ceramics after being sintered is applied to surface finish. A black organic material capable of efficiently absorbing a YAG laser beam is bonded onto the slide surface according to a pattern of a predetermined machining groove, thus obtaining portions 2a as shown by slash marks. A YQG laser processor radiates a YAGQ switch pulse laser beam onto the portions 2a with the organic material bonded thereto, to machine the groove 2. The bearing base body 1 is immersed into 1-trichloroethane, followed by ultrasonic cleaning, and then, the residual organic material is removed.
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