公开(公告)号：JP2014117628A

公开(公告)日：2014-06-30

申请号：JP2012272034

申请日：2012-12-13

Applicant: Ebara Corp ,  株式会社荏原製作所

Inventor： OZAWA TAKU

IPC: B01F1/00 ,  B01F3/04 ,  C01B13/10 ,  C01B13/11

Abstract: PROBLEM TO BE SOLVED: To provide a circulation type method and a circulation type apparatus for supplying ozone water which enable supplying ozone water of a constant concentration and a constant pressure, independent of the amount of ozone water used at a use point, without complicated control and allow reuse of unused ozone water.SOLUTION: A circulation type method of supplying ozone water comprises supplying water and ozone gas to an ozone dissolution tank 12 to produce ozone water, supplying the ozone water from the ozone dissolution tank 12 to a circulation tank 21 and from the circulation tank 21 to a use point through an ozone water delivery pipe 22, returning ozone water not consumed at the use point to the circulation tank 21 through an ozone water return pipe 23 and supplying ozone water again from the circulation tank 21 to the use point. The inside pressure of the ozone dissolution tank 12 and the inside pressure of the circulation tank 21 and the inside pressure of the ozone water return pipe 23 are kept constant, and the inside pressure of the circulation tank is controlled to be lower than the inside pressures of the ozone dissolution tank and the ozone water return pipe.

Abstract translation: 要解决的问题：提供一种循环型方法和用于供应臭氧水的循环型装置，其能够提供恒定浓度和恒定压力的臭氧水，与使用点上使用的臭氧水量无关，而无需复杂的控制 并允许再利用未使用的臭氧水。解决方案：提供臭氧水的循环型方法包括向臭氧溶解罐12供应水和臭氧气体以产生臭氧水，将臭氧水从臭氧溶解罐12供应到循环罐21 并且通过臭氧水输送管22从循环箱21到使用点，通过臭氧回水管23将使用时未消耗的臭氧水返回到循环罐21，并从循环罐21再次向臭氧水供给臭氧水 使用点。 臭氧溶解罐12的内部压力和循环罐21的内部压力以及臭氧回水管23的内部压力保持恒定，并且将循环罐的内部压力控制为低于内部压力 的臭氧溶解罐和臭氧回水管。

公开(公告)号：JP2000237705A

公开(公告)日：2000-09-05

申请号：JP4458999

申请日：1999-02-23

Applicant: EBARA CORP

Inventor： KATO TOSHIYUKI ,  ONO HARUKO ,  OZAWA TAKU ,  YAMADA KAORU

IPC: B08B3/08 ,  B08B3/10 ,  H01L21/304

Abstract: PROBLEM TO BE SOLVED: To provide a method and device for cleaning a substrate by which the generation of water marks is minimized, and the consumption of an org. solvent such as isopropylalcohol is reduced. SOLUTION: This substrate cleaning device consists of a cleaning mechanism 3 for cleaning a substrate to be treated with a cleaning soln., a rinsing mechanism 4 for removing the cleaning soln. depositing on the cleaned substrate and a drying mechanism 5 for removing a rinse depositing on the rinsed substrate. The rinsing mechanism 4 is provided with a rinse tank storing a rinse Q2, the cleaned substrate is dipped in the rinse Q2 to remove the droplets of the cleaning soln. depositing on the substrate, and a mechanism for cooling the rinse Q2 stored in the tank and/or a cooled rinse supply mechanism for supplying the rinse Q2 cooled in a coller 6 to the rinse tank. Further, the rinsed substrate is rotated by a drying mechanism 5 and dried while spraying cooled ultrapure water.

公开(公告)号：JP2007289842A

公开(公告)日：2007-11-08

申请号：JP2006119653

申请日：2006-04-24

Applicant: Ebara Corp ,  株式会社荏原製作所

Inventor： MAISHIGI KEIJI ,  OZAWA TAKU ,  HATTORI HIROSHI

IPC: C02F1/00 ,  C02F1/44

Abstract: PROBLEM TO BE SOLVED: To provide a wastewater treatment method and a wastewater treatment apparatus which can treat gas dissolved water not used for wet treatment, generated from a wet treatment device carrying out the wet treatment of a washing device etc. in the vicinity of the wet treatment device, and can supply the treated gas dissolved water as raw water to a gas dissolved water generator installed in the vicinity of the wet treatment device.
SOLUTION: A tank 3 for recovering ozone water, a cooler 5, and a filter 6 are installed. Unused ozone water 106 not used for washing, generated from the washing device 2 is recovered by the tank 3. After the recovered unused ozone water 106 is sent to the cooler 5 by a pump 4 to be cooled to a prescribed temperature (20-25°C), fine particles in the unused ozone water 106 are removed by the filter, and the unused ozone water is supplied to the dissolving part 12 of an ozone water generator 1. Ozone gas is dissolved to a prescribed concentration by the dissolving part 12 to be supplied to the washing device 2 as ozone water 103.
COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供一种废水处理方法和废水处理装置，该处理装置可以处理在湿处理中从未进行湿处理的湿式处理装置中进行的湿式处理， 并且可以将经处理的气体溶解水作为原水提供给安装在湿处理装置附近的气体溶解水发生器。 解决方案：安装用于回收臭氧水的罐3，冷却器5和过滤器6。 由洗涤装置2产生的不用于洗涤的未使用的臭氧水106由罐3回收。回收的未使用的臭氧水106通过泵4送到冷却器5中以冷却到规定的温度（20-25℃） ℃）中，通过过滤器除去未使用的臭氧水106中的微粒，将未使用的臭氧水供给臭氧发生器1的溶解部12.臭氧气体通过溶解部12溶解至规定浓度 作为臭氧水103供给到洗涤装置2.版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2007275744A

公开(公告)日：2007-10-25

申请号：JP2006104500

申请日：2006-04-05

Applicant: Ebara Corp ,  株式会社荏原製作所

Inventor： OZAWA TAKU ,  MAISHIGI KEIJI ,  HATTORI HIROSHI ,  HARADA MINORU ,  MURAKAWA KEIICHI

IPC: B01D61/00 ,  B01F1/00

Abstract: PROBLEM TO BE SOLVED: To provide a gas recovery and recycling method recovering and recycling gas contained in gas-dissolved liquid and a gas recovering and recycling apparatus, by dissolving dissolved gas contained in gas-dissolved liquid discharged from an apparatus using gas-dissolved liquid of a washing device into liquid like pure water able to dissolved gas.
SOLUTION: The gas recovering and recycling apparatus is composed to pass liquid through a recovering vessel 12 recovering gas-dissolved liquid discharged from the washing device 10, a gas permeating membrane 20 provided in the recovering vessel 12 and to supply liquid passing through the gas permeating membrane 20 to the washing device 10 via a gas-dissolved water production apparatus 11. The gas-dissolved liquid is stored in the recovering vessel 12, super-pure water from a deaerating means is passed through the gas permeating membrane 20, and the gas in the gas-dissolved liquid is dissolved into ultrapure water via the gas permeating membrane 20.
COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供气体回收和再循环方法，回收和再循环气体溶解液体中所含的气体和气体回收和回收设备，通过将从气体溶解的液体中排出的溶解气体溶解， 将洗涤装置的液体溶解成液体，如能够溶解气体的纯水。 解决方案：气体回收和再循环设备被构成为使液体通过回收容器12，回收容器12回收从洗涤装置10排出的气体溶解液体，设置在回收容器12中的气体渗透膜20，并且供应通过的液体 气体渗透膜20通过气体溶解水生产装置11流到洗涤装置10.将气体溶解的液体储存在回收容器12中，来自脱气装置的超纯水通过气体渗透膜20， 气体溶解液中的气体通过气体渗透膜20溶解于超纯水中。（C）2008，JPO＆INPIT

公开(公告)号：JP2002316027A

公开(公告)日：2002-10-29

申请号：JP2001120828

申请日：2001-04-19

Applicant: EBARA CORP

Inventor： OZAWA TAKU ,  SHINJO RYOICHI ,  HARADA MINORU ,  SAITO TAKAYUKI ,  SASAKI KENICHI ,  MURAKAWA KEIICHI ,  SHIMAMURA KAZUHIDE

IPC: B01F1/00 ,  B01D53/22 ,  B01D61/00 ,  B01F3/04 ,  B01F15/04 ,  C02F1/36 ,  C02F1/44 ,  C02F1/68 ,  C02F1/74 ,  C02F1/78 ,  H01L21/00

Abstract: PROBLEM TO BE SOLVED: To provide a device for manufacturing gas-dissolved water which can efficiently manufacture gas-dissolved water 31 wherein concentration of a dissolved gas 3 is at or below saturated concentration in a short time. SOLUTION: The device for manufacturing gas-dissolved water 1 which is constituted so that a gas to be dissolved 3 is dissolved in water to be treated 4 to obtain the gas-dissolved water 5 is provided with a dissolving section 11 for dissolving the gas to be dissolved in the water to be treated, a gas to be dissolved supply passage 12 for guiding the gas to be dissolved to the dissolving section, a first water to be treated supply passage 13 for guiding the water to be treated to the dissolving section, a gas-dissolved water discharging passage 14 for guiding the gas-dissolved water from the dissolving section and a second water to be treated supply passage 15 for guiding the water to be treated without passing through the dissolving section. The second water to be treated supply passage is joined to the gas-dissolved water discharging passage and the water to be treated guided by the second water to be treated supply passage dilutes concentration of the dissolved gas in the gas-dissolved water to a prescribed concentration.

公开(公告)号：JP2002236093A

公开(公告)日：2002-08-23

申请号：JP2001029792

申请日：2001-02-06

Applicant: EBARA CORP ,  APURIKUSU KK

Inventor： SAITO TAKAYUKI ,  HARADA MINORU ,  OZAWA TAKU ,  NOGUCHI YASUSHI ,  KIDAI MAKOTO

IPC: G01N31/00 ,  G01N21/33

Abstract: PROBLEM TO BE SOLVED: To provide a concentration measuring device with which the concentration of peroxosulfuric acid in a solution is measured. SOLUTION: The concentration measuring device is provided with a light source lamp 111, an optical cell 106 which is installed on the optical path of light irradiated from the lamp 111 and in which the light is transmitted through the solution to be measured, filled in the inside, a measurement-side light receiving element 113 which detects the intensity of light in a wavelength region near 190 nm, transmitted through the solution to be measured, inside the optical cell 106, an absorbance-measuring part 115 which finds the absorbance of the solution to be measured, on the basis of the intensity of light detected by the measurement-side light-receiving element and a conversion part 131 which finds the concentration of the peroxosulfuric acid in the solution to be measured, on the basis of the absorbance found.

公开(公告)号：JP2002236092A

公开(公告)日：2002-08-23

申请号：JP2001029783

申请日：2001-02-06

Applicant: EBARA CORP ,  TOSHIBA CORP

Inventor： SAITO TAKAYUKI ,  HARADA MINORU ,  OZAWA TAKU ,  TOMITA HIROSHI

IPC: G01N31/00 ,  C01B13/11 ,  G01N21/05 ,  G01N21/11 ,  G01N21/27 ,  G01N21/33

Abstract: PROBLEM TO BE SOLVED: To provide a concentration measuring device with which the concentration of peroxosulfuric acid and ozone in a solution is measured. SOLUTION: The concentration measuring device is provided with light source lamps 111, 121, an optical cell 106 filled with the solution through which beams of light from the lamps 111, 121 are transmitted, a first measurement-side light-receiving element 113 which measures the intensity of light, in a wavelength region of 190 nm transmitted through the solution inside the optical cell 106, a first absorbance-measuring part 115 which finds absorbance in the wavelength region of 190 nm on the basis of the measured intensity of light, a second measurement-side light-receiving element 123 which measures the intensity of light at a wavelength close to 254 nm transmitted through the cell 106, a second absorbance measuring part 125 which finds an absorbance at the wavelength near 254 nm on the basis of the measured intensity of light and a conversion part 131 which finds the concentration of the ozone and peroxosulfuric acid in the solution to be measured, on the basis of the respective absorbances found in the two absorbance-measuring parts.