LITHOGRAPHIC STRUCTURE AND METHOD FOR MAKING FIELD EMITTERS
    12.
    发明公开
    LITHOGRAPHIC STRUCTURE AND METHOD FOR MAKING FIELD EMITTERS 审中-公开
    VERFAHREN ZUR HERSTELLUNG VON FELDEMISSIONS - VORRICHTUNGEN LITHOGRAPHISCHE STRUKTUR

    公开(公告)号:EP1002328A4

    公开(公告)日:2001-01-31

    申请号:EP98938275

    申请日:1998-08-04

    Applicant: FED CORP

    CPC classification number: H01J9/025

    Abstract: A mask structure (220) may be formed on a field emitter substrate(100) for use in forming emitter wells (110) on and in the substrate. The mask structure (220) may be formed from a multilayered structure on the surface of the substrate (100) using a laser lithography process. From the substrate up, the multilayered structure may include an antireflective coating (200), a photoresistive layer (300), an optional etch resistant layer (600) between the antireflective coating and the photoresistive layer, and an optional second antireflective coating (700) between the optional etch resistant layer and the photoresistive layer. The pattern of the mask structure (220) may be transferred to the multilayer structure by exposing the photoresistive layer (300) to laser light. The antireflective coatings (200, 700) may reduce the amount of stray laser light that reflects off the substrate (100) and onto the back of the photoresistive layer (300). Development of the photoresistive layer (300) follwing exposure to laser light may be monitored and selectively arrested to form a mask structure (220) with a selective pitch. The antireflective coating (200) may be etched optionally so that it is undercut beneath the overlying etch resistant layer (600) or photoresistive layer (300) to aid in the formation of emitters (500) using a veil field emitter process or an etched gate process.

    Abstract translation: 掩模结构可以形成在场发射器基底上,用于在衬底上和衬底中形成发射极阱。 掩模结构可以使用激光光刻工艺在衬底的表面上由多层结构形成。 从衬底向上,多层结构可以包括抗反射涂层,光致抗蚀剂层,抗反射涂层和光致抗蚀剂层之间的任选的耐蚀刻层,以及可选的耐蚀刻层和光刻胶层之间的任选的第二抗反射涂层。 掩模结构的图案可以通过将光致抗蚀剂层暴露于激光而转移到多层结构。 抗反射涂层可以减少从衬底反射到光致抗蚀剂层背面的杂散激光的量。 暴露于激光后的光致抗蚀剂层的显影可以被监测并选择性地阻滞以形成具有选择性间距的掩模结构。 抗反射涂层可以任选地蚀刻,使得其在覆盖的抗蚀刻层或光致抗蚀剂层下方被切下,以帮助使用面膜场发射器工艺或蚀刻浇口工艺形成发射器。

    SEALING STRUCTURE FOR ORGANIC LIGHT EMITTING DEVICES

    公开(公告)号:CA2295676A1

    公开(公告)日:1999-01-21

    申请号:CA2295676

    申请日:1998-07-09

    Applicant: FED CORP

    Abstract: A sealing structure (190) for an organic light emitting device display (100). The sealing structure (190) comprises a metal film (175) overlying a dielectric film (150). The sealing structure (190) has low moisture and oxygen permeability. At least one of the metal layers (175) may react with moisture or oxygen to seal off pin holes. A net low stress sealing structure (190) may be formed by combining tensile and compressive films. The sealing structure (190) may be etched to create openings (160) for connection to outside circuitry. The innovative sealing structure (190) minimizes moisture leakage and vertical shorts between diode cathode (900) and anode (400).

    FLAT DISPLAY SPACER STRUCTURE AND MANUFACTURING METHOD

    公开(公告)号:CA2196040A1

    公开(公告)日:1996-02-08

    申请号:CA2196040

    申请日:1995-07-25

    Applicant: FED CORP

    Abstract: A spacer structure (10) for use in a flat panel display (100), and a corresponding flat panel display article (100) are disclosed, together with an appertaining method of fabricating the spacer structure utilizing a photosensitive precursor material which is selectively irradiated, developed and etchingly processed to produce shaped standoff elements for a unitary spacer structure. The spacer structure may be dimensionally fabricated to precisely align with a selected pixel region, comprising a single pixel or an array of pixels, e.g., a color (red, blue, green) triad.

    HIGH BRIGHTNESS, HIGH EFFICIENCY ORGANIC LIGHT EMITTING DEVICE

    公开(公告)号:CA2296027A1

    公开(公告)日:1999-01-21

    申请号:CA2296027

    申请日:1998-07-06

    Applicant: FED CORP

    Abstract: A light emitting device (1) comprises a plurality of stacked organic light emitting devices (10, 20, 30) which are arranged in a stack. The light emitting device (1) further includes a controller (3) for controlling the operation of each of the plurality of organic light emitting devices (10, 20, 30) in the stack. The controller (3) simultaneously supplies the same current to each of the organic light emitting devices (10, 20, 30) in the stack as well as to each of the plurality of organic light emitting devices (1).

    BONDED ACTIVE MATRIX ORGANIC LIGHT EMITTING DEVICE DISPLAY AND METHOD OF PRODUCING THE SAME

    公开(公告)号:CA2296026A1

    公开(公告)日:1999-01-21

    申请号:CA2296026

    申请日:1998-07-06

    Applicant: FED CORP

    Abstract: A method of forming an active matrix organic light emitting device display. The method includes the steps of providing an organic light emitting plate assembly (10), providing an active matrix plate assembly (20), and sealing the organic light emitting plate assembly to the active matrix assembly. The active matrix plate assembly may include a substrate (210), drive circuitry (220) formed thereon, and at least one pixel pad (230). The at least one pixel pad may be formed from an electron injector material selected from the group consisting of Mg+Al, Al+Li, LiF/Al and CsC. The method may further include the step ion beam cleaning the at least one pixel pad (230) prior to the step of sealing the organic light emitting plate assembly to the active matrix plate assembly.

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