DIELECTRIC MULTILAYER FILM MIRROR
    11.
    发明专利

    公开(公告)号:JPS63165806A

    公开(公告)日:1988-07-09

    申请号:JP31090886

    申请日:1986-12-27

    Abstract: PURPOSE:To obtain required reflection band width by setting up the reflection factor of a multilayer film as a multivariable function expressed by the film thickness values of respective dielectric layers and determining the film thickness values of respective dielectric layers so that the difference between the function and the reflection factor of an objective wavelength is minimized. CONSTITUTION:A multilayer film mirror 5 is formed by alternately superposing dielectric films 61, 63... with a high refractive index nH and dielectric films 62, 64... with a low refractive index nL. The film thickness 61, 62... are respectively different and is not fixed. When the reflection factor Rlambda of the mirror 5 is defined as the multivariable function of the film thickness x1-xn of the films 61-6n, an equation I can be obtained. An equation II is obtained by specifying a reflection factor rlambda in each wavelength as objective spectral characteristics. In the equation II, a minimum value is substituted for the function F so that the difference between the multivariable function and the reflection factor of the objective wavelength is minimized to calculate the film thickness values x1-xn. Consequently, film constitution having the objective reflection factor characteristics can be obtained.

    WAVELENGTH VARIABLE LASER DEVICE
    12.
    发明专利

    公开(公告)号:JPS63161435A

    公开(公告)日:1988-07-05

    申请号:JP31007486

    申请日:1986-12-24

    Abstract: PURPOSE:To obtain a device easy for handling and to prevent the reduction of power density as well and to obtain a stable output light by correcting the optical axis in an n-th order harmonic generating part with respect to the optical axis deviation due to the change of the angle of incidence in an optical parametric oscillating part. CONSTITUTION:An incidence angle control part 14 which controls the incident angle between a crystal in an optical parametric oscillating part 1 and an n-th order harmonic generating part 2 and a mobile device 20 for optical axis correction which moves the n-th order harmonic generating part 2 to correct the deviation of the optical axis are provided. The angle of incident of the laser beam incident on the crystal in the optical parametric oscillating part 1 is changed by the incidence angle control part to emit the laser beam within a prescribed wavelength range, and for example, the angle of incidence is normally changed within the range of + or -30 deg. in case of an urea single crystal. When the optical axis is deviated in accordance with the variation by this change of the angle of incidence, it is detected by a photosensor 22 such as a solid-state image pickup element and the detection signal is sent to the mobile device 20. Then, this signal is compared with preliminarily set data to sent a pulse corresponding to the extent of deviation of the optical axis to the mobile device 20, and a motor is driven and the n-th order harmonic generating part 2 is moved in the direction crossing the optical axis to correct the deviation of the optical axis.

    OPTICAL PARAMETRIC OSCILLATOR
    13.
    发明专利

    公开(公告)号:JPS63159831A

    公开(公告)日:1988-07-02

    申请号:JP31007186

    申请日:1986-12-24

    Abstract: PURPOSE:To make the wavelength variable within the whole area cover range of a visible area, and to continuously obtain a high conversion efficiency and a stable and high output, by using an incident excitation light to a non-linear optical crystal, as the light beam of wavelength within a prescribed range from an excimer laser. CONSTITUTION:The excitation light 2 of wavelength lambdap is outputted from an excimer laser 1, made incident on a non-linear optical crystal 7 through a collimator lens 4 and an incident mirror 5, an optical parametric oscillation is generated, the oscillation light beams 9 of wavelength lambdas and lambdai are emitted through a mirror 6, and by turning a turning shaft 8, the rotary angle of the crystal 7 is controlled, and when a phase matching angle is changed, the wavelength lambdas and lambdai are charged continuously within a prescribed range. In accordance with the kind of the laser beam 1, the wavelength of the excitation light 2 becomes 308nm, 249nm, and 351nm respectively.

    WAVELENGTH VARIABLE LASER DEVICE
    14.
    发明专利

    公开(公告)号:JPS63159829A

    公开(公告)日:1988-07-02

    申请号:JP31007286

    申请日:1986-12-24

    Abstract: PURPOSE:To obtain a laser light whose pulse width is a high level output and whose wavelength is variable, by a simple constitution, by allowing laser excitation light to be made incident on a ureas single crystal whose single crystal turning angle is controlled. CONSTITUTION:The laser excitation light 23 from a laser oscillator 21 is turned centering around a turning shaft 28 and made incident on a urea single crystal whose turning angle is controlled and whose non-linear optical constant is large, and a laser light 29 whose phase matching angle is controlled and whose wavelength is varied by following up the variation of an incident angle is emitted from a crystal 22. Since the urea single crystal whose non-linear constant is high is used by this simple constitution which requires no mirror, a large power is obtained, and when an excitation light whose pulse width is a picosecond and whose energy density is large is made incident, a laser emitted light whose pulse width is a picosecond, whose energy density is high and whose wavelength is variable can be obtained.

    VACUUM DEVICE
    15.
    发明专利

    公开(公告)号:JPS62180066A

    公开(公告)日:1987-08-07

    申请号:JP2267186

    申请日:1986-02-04

    Inventor: MORITA NOBUHIRO

    Abstract: PURPOSE:To qradually increase the pressure in a vessel by the inert gas introduced therein near the to the atmospheric pressure and to prevent the contamination of a sample and the damage of apparatus such as valves by connecting a discharge system and a inert gas introducing pipe to the vessel and providing a check valve to the above-mentioned introducing pipe. CONSTITUTION:The inside of the vessel 1 is evacuated to an adequate vacuum by vacuum pumps 8, 10. A valve 7 is closed upon ending of vapor deposition. A valve 5 is closed to the inert gas 3 introducing pipe 20 having the check valve 2 to be opened when the internal pressure exceeds the atmospheric pressure and valve 4 is opened to introduce the inert gas 3 into the vessel. The check valve 2 is closed on dropping of the internal pressure of the introducing pipe 20 to fill the gas in the vessel 1 when the gas 3 is introduced into the vessel 1 by opening the valve 5 while the gas 3 is held released to the outside through the check valve 2. The gas 3 escapes through the check valve 2 when the internal pressure in the vessel 1 and the introducing pipe 20 exceeds the atmospheric pressure. The action of the unnecessary pressure on the apparatus such as the vessel 1 is thus obviated. The gas 3 flows again into the vessel 1 when the vessel 1 is opened in this stage. The taking out and setting of the sample 103, etc., are executed in the clean atmosphere.

    DISPLACEMENT DETECTING APPARATUS
    17.
    发明专利

    公开(公告)号:JPH04160313A

    公开(公告)日:1992-06-03

    申请号:JP28561190

    申请日:1990-10-23

    Abstract: PURPOSE:To detect the angular displacement with high accuracy by an apparatus simple in structure, compact in size and light in weight, by rotating a supporting member together with a movable member. CONSTITUTION:When an object mounted on the apparatus is rotated, the rotation of a container 4 is controlled only by a servo motor 2. The container 4 is not rotated to an outer case 1 and therefore, the positional relationship between the container 4 and outer case 1 is not changed. A float 8 below a magnetic needle 8c has a tendency to keep the original directional position by inertia, and the water around the float 8 does not receive resistances from an inertial body. As a result, the water rotates relatively to the outer case 1 and the container 4, and the float 8 shifts from an original reference position. The detecting quantity of light by shift detecting means 14a, 14b of an optical detector of the container 4 is increased/decreased at a boundary line where the float 8 is transparent and not transparent. When the output difference becomes not smaller than a predetermined value, a control circuit 18 drives the motor 2, thereby rotating the container 4 in a direction of the shift of the float 8. If the output difference becomes not larger than the predetermined value, the motor 2 is stopped to stop the rotation of the container 4. The float 8 is returned to the reference position. The rotating amount at this time is detected by a potentiometer 19, so that the angular displacement is detected.

    OPTICAL PARAMETRIC OSCILLATOR
    18.
    发明专利

    公开(公告)号:JPH01178938A

    公开(公告)日:1989-07-17

    申请号:JP33371287

    申请日:1987-12-29

    Abstract: PURPOSE:To vary the angle of the optical axis of exciting light to the optical axis of nonlinear optical crystal and to vary the output wavelength of oscillation light at a high speed by deflecting the exciting light by an optical deflector which utilizes the optoelastic effect of an optical material. CONSTITUTION:When specific electric power is supplied to the oscillator 13 of the optical deflector 10 and its oscillation frequency is varied within a specific range, the exciting light 5a changes its traveling direction and is deflected into exciting light 5b. Consequently, the light is reflected and converged by one focusing mirror 16, the angle ph of phase matching between the optical axis 19 of the exciting light 5b entering the nonlinear optical crystal 3 through an incidence mirror 14 and the optical axis 8 of the nonlinear optical crystal 3 varies, and the oscillation light 18 projected through a projection mirror 15 varies in wavelength corresponding to said variation. This utilizes the optoelastic effect of the optical material such as acoustooptic effect and electrooptic effect. Consequently, the deflecting speed of the exciting light 5a is increased to facilitate fast variation in the output wavelength of the oscillation light 18 and also eliminate the need for a crystal rotational mechanism.

    OPTICAL WAVELENGTH TUNABLE LASER APPARATUS

    公开(公告)号:JPS63185084A

    公开(公告)日:1988-07-30

    申请号:JP1754687

    申请日:1987-01-28

    Abstract: PURPOSE:To obtain an optical wavelength tunable laser without the large rotary angle of a crystal for an optical wavelength converter, by providing a second optical parametric oscillator having a specified function on the incident side of the optical wavelength converter. CONSTITUTION:When a crystal 6a for a first optical parametric oscillator (OPO) is excited with pumping lights, normal light and anomalous light are emitted when the angle (theta) of the crystal 6a is 90 degrees. Of the output light of the first OPO 1a, the pumping light is inputted into a 1/2 wavelength plate 27, and the direction of the polarized light is turned by 90 degrees. A crystal 6b for a second OPO 1b is provided at a position, which is orthogonally intersected with the crystal 6a for the first OPO. Therefore the pumping light becomes the normal light with respect to the crystal 6b for the second OPO. The phase is aligned with respect to the turning direction in a vertical plane. The signal light and the idler light, whose polarizing directions are orthogonally intersected with the output light of the first OPO 1a, are outputted. The output light from the first OPO 1a and the output light from the second OPO 1b are combined and inputted into an SHG 2. Then the normal light within a specified range with respect to a crystal 9 for the SHG is obtained. Said normal light becomes a wavelength tunable laser beam by the rotation of the crystal 9 for the SHG by 50-90 degrees.

    OPTICAL PARAMETRIC OSCILLATOR
    20.
    发明专利

    公开(公告)号:JPS63170619A

    公开(公告)日:1988-07-14

    申请号:JP255287

    申请日:1987-01-08

    Abstract: PURPOSE:To obtain a wavelength variable laser beam with high efficiency, and also, a stable oscillation, by enclosing a non-linear optical crystal so as to be turnable in a container, changing the incident angle of an excited light to a crystal axis by turning only this enclosed non-linear optical crystal, and changing the wavelength of an oscillation light. CONSTITUTION:A third harmonic laser beam (wavelength lambdap=355nm) of an Nd-YAG laser is inputted as the excited light 35, an oscillation light 36 consisting of a signal (wavelength lambdas) and an idler (wavelength lambdai) is generated by an optical parametric oscillation. When the incident angle of the excited light 35 to a crystal axis is changed by turning a non-linear optical crystal 24 around the center axis 37 in the direction as indicated with an arrow by driving a stepping motor 14, the wavelengths (lambdas, lambdai) of the oscillation light 36 are changed continuously within a prescribed range (for instance, 500-1,230nm). In such a way, a distance between mirrors 31, 32 (cavity length) can be made as short as possible, and a stable oscillation light can be obtained with high efficiency.

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