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公开(公告)号:AU4168599A
公开(公告)日:2000-01-05
申请号:AU4168599
申请日:1999-06-18
Applicant: HAMAMATSU PHOTONICS KK
Inventor: SATO HIROTO , HOMME TAKUYA , TAKABAYASHI TOSHIO
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公开(公告)号:DE69934126T2
公开(公告)日:2007-09-20
申请号:DE69934126
申请日:1999-06-18
Applicant: HAMAMATSU PHOTONICS KK
Inventor: TAKABAYASHI TOSHIO , HOMME TAKUYA , SATO HIROTO
Abstract: In a radiation image sensor (2) comprising a scintillator panel (4) and an imaging device (6), the scintillator panel (4) comprises a radiation-transparent substrate (10), a deliquescent scintillator (12) formed on the substrate (10), and an elastic organic film (14) covering the scintillator (12), the scintillator panel (4) and imaging device (6) being bonded to each other with a matching oil (20) interposed therebetween, whereas side wall portions of the scintillator panel (4) and imaging device (6) are firmly attached to each other with a resin (24).
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公开(公告)号:DE69927522T2
公开(公告)日:2006-07-13
申请号:DE69927522
申请日:1999-06-18
Applicant: HAMAMATSU PHOTONICS KK
Inventor: SATO HIROTO , HOMME TAKUYA , TAKABAYASHI TOSHIO
Abstract: A scintillator having a columnar structure adapted to convert incident radiation into visible light is formed on one surface of a substrate made of Al in a scintillator panel. All surfaces of the substrate and scintillator are covered with a first polyparaxylylene film, whereas an SiO2 film is formed on the surface of polyparaxylylene film on the scintillator side. Further, a second polyparaxylylene film is formed on the surface of SiO2 film and the surface of polyparaxylylene film on the substrate side, so that all surfaces are covered with the second polyparaxylylene film.
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公开(公告)号:DE69927522D1
公开(公告)日:2006-02-09
申请号:DE69927522
申请日:1999-06-18
Applicant: HAMAMATSU PHOTONICS KK
Inventor: SATO HIROTO , HOMME TAKUYA , TAKABAYASHI TOSHIO
Abstract: A scintillator having a columnar structure adapted to convert incident radiation into visible light is formed on one surface of a substrate made of Al in a scintillator panel. All surfaces of the substrate and scintillator are covered with a first polyparaxylylene film, whereas an SiO2 film is formed on the surface of polyparaxylylene film on the scintillator side. Further, a second polyparaxylylene film is formed on the surface of SiO2 film and the surface of polyparaxylylene film on the substrate side, so that all surfaces are covered with the second polyparaxylylene film.
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公开(公告)号:DE69901871D1
公开(公告)日:2002-07-25
申请号:DE69901871
申请日:1999-04-09
Applicant: HAMAMATSU PHOTONICS KK
Inventor: HOMME TAKUYA , TAKABAYASHI TOSHIO , SATO HIROTO
IPC: G01T1/20 , B32B9/00 , C09K11/00 , C09K11/08 , G01T1/202 , G01T1/24 , G21K4/00 , H01L27/14 , H01L31/09 , H04N5/32 , H04N5/321
Abstract: The surfaces of a carbon or graphite substrate 10 of a scintillator panel 1 have undergone sandblasting, and an Al film 12 serving as a reflecting film is formed on one surface. A columnar scintillator 14 for converting incident radiation into visible light is formed on the surface of the A1 film 12.
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公开(公告)号:DE69803438D1
公开(公告)日:2002-02-28
申请号:DE69803438
申请日:1998-02-12
Applicant: HAMAMATSU PHOTONICS KK
Inventor: HOMME TAKUYA , TAKABAYASHI TOSHIO , SATO HIROTO
Abstract: Light-receiving devices 2 are two-dimensionally arranged on a substrate 1, bonding pads 4 electrically connected to the light-receiving devices 2 in the respective rows or columns via signal lines 3 are arranged on the outer periphery of the substrate 1, and a protective passivation film 5 is disposed on the light-receiving devices 2 and signal lines 3, thereby forming a light-receiving device array 6. A scintillator 7 made of columnar crystals of Csl is deposited on the light-receiving surface of the light-receiving device array 6, whereas a protective film 11 in which an Al inorganic film 9 is held between organic films 8, 10 made of Parylene is laminated thereon. The outer periphery of the protective film 11 is cut at a position where the bonding pads 4 are exposed, and is brought into close contact with the passivation film 5 with the aid of the coating resin 12.
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公开(公告)号:CA2260041C
公开(公告)日:2001-10-09
申请号:CA2260041
申请日:1998-02-12
Applicant: HAMAMATSU PHOTONICS KK
Inventor: TAKABAYASHI TOSHIO , SATO HIROTO , HOMME TAKUYA
Abstract: A radiation detection device comprising: a light receiving element array (6) formed by arranging two-dimensionally light receiving elements (2) on a substrate (1), arranging bonding pads (4) on the outer periphery of the substrate (1) and electrically connecting them to light receiving elements (2) of each row or column with signal lines (3), and disposing a protective passivation film (5) on the light receiving elements (2) and on the signal lines (3); a scintillator (7) of a CsI columnar crystal deposited on the light receiving surface of the light receiving element array (6); a thinly elongated resin frame (8) so disposed inside the bonding pads (4) as to encompass the outer periphery of the light receiving portion; and a protective film (12) formed by sandwiching an inorganic film (10) with Parillen organic films (9 and 11), and laminated inside the resin frame (8). The outer periphery of the protective film (12) is brought into close contact with the resin frame (8) by a covering resin (13).
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公开(公告)号:AU4168699A
公开(公告)日:2000-01-05
申请号:AU4168699
申请日:1999-06-18
Applicant: HAMAMATSU PHOTONICS KK
Inventor: HOMME TAKUYA , TAKABAYASHI TOSHIO , SATO HIROTO
IPC: B05D7/24 , C08L67/02 , C23C16/00 , C30B25/02 , C30B29/12 , C30B29/54 , C30B33/00 , G01T1/00 , G01T1/20 , G21K4/00
Abstract: Comprising a first step of supporting a substrate formed with a scintillator on at least three protrusions of a target-support element disposed on a vapor deposition table so as to keep a distance from said vapor deposition table; a second step of introducing said vapor deposition table having said substrate supported by said target-support element into a vapor deposition chamber of a CVD apparatus; and a third step of depositing an organic film by CVD method onto all surfaces of said substrate, provided with said scintillator, introduced into said vapor deposition chamber.
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公开(公告)号:AU4168199A
公开(公告)日:2000-01-05
申请号:AU4168199
申请日:1999-06-18
Applicant: HAMAMATSU PHOTONICS KK
Inventor: TAKABAYASHI TOSHIO , HOMME TAKUYA , SATO HIROTO
Abstract: A scintillator panel (2) comprises a radiation-transparent substrate (10), a flat resin film (12) formed on the substrate (10), a reflecting film (14) formed on the flat resin film (12), a deliquescent scintillator (16) formed on the reflecting film (14), and a transparent organic film (18) covering the scintillator (16).
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公开(公告)号:AU3168099A
公开(公告)日:2000-01-05
申请号:AU3168099
申请日:1999-04-09
Applicant: HAMAMATSU PHOTONICS KK
Inventor: HOMME TAKUYA , TAKABAYASHI TOSHIO , SATO HIROTO
IPC: G01T1/20 , B32B9/00 , C09K11/00 , C09K11/08 , G01T1/202 , G01T1/24 , G21K4/00 , H01L27/14 , H01L31/09 , H04N5/32 , H04N5/321
Abstract: The surfaces of a carbon or graphite substrate 10 of a scintillator panel 1 have undergone sandblasting, and an Al film 12 serving as a reflecting film is formed on one surface. A columnar scintillator 14 for converting incident radiation into visible light is formed on the surface of the A1 film 12.
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