公开(公告)号：JP2009264975A

公开(公告)日：2009-11-12

申请号：JP2008116239

申请日：2008-04-25

Applicant: Horiba Ltd ,  株式会社堀場製作所

Inventor： IDO TAKUYA ,  UKON JUICHIRO

IPC: G01N21/01 ,  G01N21/35 ,  G01N21/3504 ,  G01N21/39 ,  H01L31/12 ,  H01S5/062

Abstract: PROBLEM TO BE SOLVED: To improve the measurement accuracy or stability in a laser device to be used as a light source of an analyzer by solving the brittleness to temperature change or vibration, in addition to the reduction in cost by further making the device compact. SOLUTION: The laser device comprises: a laser light source 2, which outputs light in the vicinity of a wavelength absorbable by an analysis object; a wavelength selection element 3 which receives a part of the light output from the laser light source 2 and selects and leads out light, having a wavelength substantially equal to the absorption wavelength of the analysis object from among the light outputted from the laser light source 2; an optical detection means 5 which detects the intensity of the light led out from the wavelength selection element 3; and a drive current control means 6, which increases or decreases the drive current of the laser light source near a specified current value for causing the laser light source 2 to output the light of the absorption wavelength, and sets the drive current, at a current value such that the intensity of light detected by the optical detection means 5 has a peak value. The laser light source 2, the wavelength selection element 3, and the optical detection means 5 are mounted on a single substrate 11, which can regulate the temperature to a constant level. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：为了通过解决对温度变化或振动的脆性来提高用作分析仪的光源的激光装置的测量精度或稳定性，除了通过进一步制造成本来降低成本 设备紧凑。 解决方案：激光装置包括：激光光源2，其输出由分析对象吸收的波长附近的光; 波长选择元件3，从激光光源2输出的光中接收从激光光源2输出的一部分光并选择并引出具有与分析对象的吸收波长大致相同的波长的光 ; 光检测装置5，其检测从波长选择元件3引出的光的强度; 以及驱动电流控制装置6，其使激光光源的驱动电流接近规定的电流值，使激光光源2输出吸收波长的光，并将驱动电流设定为电流 使得由光学检测装置5检测到的光的强度具有峰值。 激光光源2，波长选择元件3和光学检测装置5安装在单个基板11上，其可以将温度调节到恒定水平。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2004144560A

公开(公告)日：2004-05-20

申请号：JP2002308498

申请日：2002-10-23

Applicant: Horiba Ltd ,  株式会社堀場製作所

Inventor： YAMAGISHI YUTAKA ,  KAMISAKA HIROJI ,  OKAMOTO KAZUTAKA ,  IDO TAKUYA ,  NAKADA YOSHIAKI

IPC: G01F1/688

Abstract: PROBLEM TO BE SOLVED: To provide an easily-manufacturable flow sensor element and a flow sensor having a simple structure, which detects a gas flow change with high sensitivity. SOLUTION: This element is equipped with: a gas flow passage 14 formed on a semiconductor substrate 11 so that its sectional area is reduced to the utmost; and a heater 12 formed as a heat sensitive element along the gas flow passage 14. COPYRIGHT: (C)2004,JPO

公开(公告)号：EP2711688A4

公开(公告)日：2014-10-29

申请号：EP12789485

申请日：2012-05-17

Applicant: HORIBA LTD

Inventor： UKON JUICHIRO ,  IDO TAKUYA ,  OHNISHI TOSHIKAZU ,  TSUJIMOTO TOSHIYUKI

IPC: G01N21/3504 ,  G01N21/15 ,  G01N21/85

CPC classification number: G01N33/0009 ,  G01N21/15 ,  G01N21/3504 ,  G01N21/8507 ,  G01N2021/151 ,  G01N2021/1712

Abstract: A measurement unit (1) used in an analyzing apparatus for measuring concentrations of component gases in a sample gas comprises an light emitting unit (21) configured to emit a measurement light to the sample gas, a light receiving unit (24) configured to receive the measurement light on a light receiving plane, a purge air introducing unit (14) configured to introduce a purge air into a vicinity of at least one of the light emitting unit (21) and/or the light receiving unit (24), and a condensing lens (23) arranged in an optical path of the measurement light from the light emitting unit (21) to the light receiving unit (24), the condensing lens (23) being configured to condense the measurement light within the light receiving plane of the light receiving unit (24), a propagation path of the measurement light being varied by a thermal lens effect caused by a temperature difference between the sample gas and the purge air.

公开(公告)号：EP2261638A4

公开(公告)日：2011-04-27

申请号：EP09726299

申请日：2009-03-27

Applicant: HORIBA LTD

Inventor： UKON JUICHIRO ,  IDO TAKUYA ,  MIMURA SUSUMU

IPC: G01N21/27 ,  G01N21/39 ,  H01S5/022 ,  H01S5/0687

CPC classification number: G01N21/39 ,  G01J3/108 ,  G01N21/3504 ,  G01N21/7703 ,  G01N2201/0231 ,  H01S5/02248 ,  H01S5/024 ,  H01S5/02415 ,  H01S5/06213 ,  H01S5/0687

公开(公告)号：JP2013134236A

公开(公告)日：2013-07-08

申请号：JP2011286765

申请日：2011-12-27

Applicant: Horiba Ltd ,  株式会社堀場製作所

Inventor： IDO TAKUYA ,  MORI TETSUYA

IPC: G01N21/39

Abstract: PROBLEM TO BE SOLVED: To simplify setting of a wavelength modulation width in a gas measurement device.SOLUTION: A gas measurement device 1 for measuring measurement object gas 30 comprises: a light source 2; a first light receiving device 14; a first phase sensitive detection device 18; an R calculation unit 42; and a setting unit 44. The light source 2 oscillates a laser beam which has a central wavelength according to a main current and also is modulated according to a modulation current while changing the central wavelength. The first light receiving device 14 outputs a detection signal I1 according to intensity of the laser beam transmitted through a reference sample. The first phase sensitive detection device 18 acquires secondary harmonic components vibrating at a harmonic frequency ω2 obtained by doubling a modulation frequency ω1 from the detection signal I1. The R calculation unit 42 calculates a peak bottom ratio R. The setting unit 44 sets a wavelength modulation width of the laser beam so that the peak bottom ratio R satisfies a predetermined condition.

Abstract translation: 要解决的问题：简化气体测量装置中的波长调制宽度的设置。解决方案：用于测量对象气体30的气体测量装置1包括：光源2; 第一光接收装置14; 第一相敏检测装置18; R计算单元42; 以及设定单元44.光源2根据主电流振荡具有中心波长的激光束，并且在改变中心波长的同时根据调制电流进行调制。 第一光接收装置14根据通过参考样本透射的激光束的强度来输出检测信号I1。 第一相位敏感检测装置18获取通过从检测信号I1对调制频率ω1进行加倍而获得的谐波频率ω2振动的二次谐波分量。 R计算单元42计算峰值比率R.设置单元44设置激光束的波长调制宽度，使得峰值比率R满足预定条件。

公开(公告)号：JP2013057651A

公开(公告)日：2013-03-28

申请号：JP2011281515

申请日：2011-12-22

Applicant: Horiba Ltd ,  株式会社堀場製作所

Inventor： IDO TAKUYA ,  ONISHI TOSHIKAZU ,  MORI TETSUYA

IPC: G01N21/61

CPC classification number: G01N21/61 ,  G01N21/274 ,  G01N21/3504 ,  G01N2021/3513 ,  G01N2021/536 ,  G01N2021/8514 ,  G01N2021/8578

Abstract: PROBLEM TO BE SOLVED: To provide a measurement unit and a gas analyzer capable of analyzing sample gas more accurately than in the conventional practice.SOLUTION: The gas analyzer includes: one irradiation part arranged outside a gas duct wall; a first reflector for reflecting a measuring beam emitted from the irradiation part and passing through a gas duct; one light receiving part arranged outside the gas duct wall to receive the measuring beam reflected by the first reflector; a second reflector arranged outside the gas duct wall to reflect the measuring beam toward the light receiving part; a known substance housing part provided in space on an optical path between the irradiation part and the second reflector to house known substance; an operation part for analyzing sample gas by reflecting the measuring beam emitted from the irradiation part by the first reflector, and performing correction or calibration using the known substance of the gas analyzer by reflecting the measuring beam emitted from the irradiation part by the second reflector; and a switching part arranged outside the gas duct wall to remove the second reflector from on the optical path during analyzing constituent concentration and to arrange the second reflector on the optical path during performing correction or calibration.

Abstract translation: 要解决的问题：提供能够比常规实践更精确地分析样品气体的测量单元和气体分析仪。 气体分析仪包括：一个辐射部分，布置在气体管壁外部; 第一反射器，用于反射从照射部分发射并通过气体管道的测量光束; 一个光接收部分布置在气体管壁外部，以接收由第一反射器反射的测量光束; 布置在所述气体管壁外部的第二反射体，以将所述测量光束反射到所述光接收部分; 已知的物质容纳部分设置在照射部分和第二反射器之间的光路上的空间中以容纳已知物质; 用于通过反射由第一反射器从照射部发射的测量光来分析样本气体的操作部分，并且通过使用第二反射器反射从照射部发射的测量光，使用气体分析器的已知物质进行校正或校准; 以及切换部，其布置在所述气体管壁的外侧，以在分析组分浓度期间从所述光路上移除所述第二反射器，并且在执行校正或校准期间将所述第二反射器布置在所述光路上。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：JP2010230592A

公开(公告)日：2010-10-14

申请号：JP2009080520

申请日：2009-03-27

Applicant: Horiba Ltd ,  株式会社堀場製作所

Inventor： TAKADA HIDEJI ,  MATSUHAMA MAKOTO ,  IDO TAKUYA

IPC: G01N25/18

Abstract: PROBLEM TO BE SOLVED: To ensure a longer life by improving a corrosion resistance, and improve an electric connectivity between a pad portion and a lead pin of a sensor board. SOLUTION: A gas sensor includes the corrosion-resistant sensor board 3 disposed in a measurement space S1, provided with a circuit element 33 for detecting a sample gas, and having the gold or platinum pad portion 34 serving as a wiring connection of the circuit element 33; the nickel alloy lead pin 5 wherein one end 5a is disposed in the measurement space S1 and electrically connected to the pad portion 34, and the other end 5b is disposed outside the measurement space; and a gold or platinum connection 6 which electrically connects between the pad portion 34 and the one end 5a of the lead pin 5. A first layer 7 comprising chromium, tungsten or titanium is formed at the one end 5a of the lead pin 5, and a second layer 8 comprising gold or platinum is formed on the first layer 7. COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：通过提高耐腐蚀性来确保更长的寿命，并且改善传感器板的焊盘部分和引脚之间的电连接性。 解决方案：气体传感器包括设置在测量空间S1中的耐腐蚀传感器板3，设置有用于检测样品气体的电路元件33，并且具有用作布线连接的金或铂垫部分34 电路元件33; 镍合金引脚5，其中一端5a设置在测量空间S1中并电连接到焊盘部分34，另一端5b设置在测量空间的外部; 以及在焊盘部分34和引脚5的一端5a之间电连接的金或铂连接6。在引脚5的一端5a处形成包括铬，钨或钛的第一层7， 包含金或铂的第二层8形成在第一层7上。版权所有（C）2011，JPO＆INPIT

公开(公告)号：JP2006119003A

公开(公告)日：2006-05-11

申请号：JP2004307635

申请日：2004-10-22

Applicant: Horiba Ltd ,  株式会社堀場製作所

Inventor： IDO TAKUYA

IPC: G01F1/692 ,  G01N21/37 ,  G01N21/61

Abstract: PROBLEM TO BE SOLVED: To provide a flow rate detection element for an infrared gas analyzer for attaining an improvement of sensing sensitivity and responsiveness without causing complication, large size, and cost increase of a structure. SOLUTION: The flow rate detection element for an infrared gas analyzer includes a substrate 1 having a void part 1a as a gas flow passage, and a heater 4 for applying a constant voltage by being held in a meandering state through an insulation film 2 provided so as to block the void part 1a on the substrate 1. The flow rate detection element forms a plurality of gas flow passage holes 6 on an insulation film part except for a part holding the meandering heater 4, and arranges the meandering heater 4 except for a connection part 4b with an energization electrode 3 to the heater 4 in a region surrounded by a contour OL of the void part 1a on the substrate 1 so that the entire length part is not overlaid on the substrate 1. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种用于红外线气体分析仪的流量检测元件，以实现感测灵敏度和响应性的提高，而不会导致结构的复杂性，大尺寸和成本增加。 解决方案：用于红外线气体分析器的流量检测元件包括：基板1，其具有作为气体流路的空隙部分1a;以及加热器4，用于通过绝缘膜保持在曲折状态下施加恒定电压 设置为阻止基板1上的空隙部分1a。流量检测元件在保持蜿蜒加热器4的部分之外的绝缘膜部分上形成多个气体流通孔6，并且布置蜿蜒加热器4 除了在由基板1上的空隙部分1a的轮廓OL包围的区域中具有加热器4的通电电极3的连接部分4b，使得整个长度部分不覆盖在基板1上。 （C）2006，JPO＆NCIPI

公开(公告)号：JP2017083233A

公开(公告)日：2017-05-18

申请号：JP2015209909

申请日：2015-10-26

Applicant: 株式会社堀場製作所 ,  Horiba Ltd

Inventor： IDO TAKUYA

IPC: G01N21/39 ,  G01N21/3504 ,  G01N21/61

CPC classification number: G01N21/59 ,  G01J3/0218 ,  G01J3/10 ,  G01J3/28 ,  G01J3/4338 ,  G01N21/61 ,  G01N33/0073 ,  G01N2021/399 ,  G01N2201/0612 ,  G01N2201/0691 ,  G01N2201/12

Abstract: 【課題】測定光の吸光を用いて、精度よく対象ガスを分析する。【解決手段】ガス分析装置100は、複数の光源1−1、1−2、・・・1−nと、導入部5と、受光部7と、分析部94と、複数の光源1−1、1−2、・・・1−nのそれぞれは、測定光Lm1、Lm2、・・・Lmnを同時に出力する。導入部5は、複数の測定光Lm1、Lm2、・・・Lmnを測定空間Sに導入する。受光部7は、合計強度Imを測定する。分析部94は、複数の対象ガスのいずれかが存在する測定空間Sを通過したときに受光部7にて測定される合計強度Imである測定対象強度Idと、複数の対象ガスのいずれもが存在しない測定空間Sを通過したときに受光部7にて測定される合計強度Imである基準強度Idとの差に基づいて、対象ガスの分析を行う。【選択図】図1

公开(公告)号：JP2009156850A

公开(公告)日：2009-07-16

申请号：JP2007338936

申请日：2007-12-28

Applicant: Horiba Ltd ,  株式会社堀場製作所

Inventor： TAKAMATSU SHUJI ,  IDO TAKUYA ,  KOJIMA KENNOSUKE

IPC: G01N1/22

Abstract: PROBLEM TO BE SOLVED: To miniaturize an exhaust gas analyzer and to improve the S/N ratio while decreasing the influence of heat from an exhaust pipe and exhaust gas to a photoirradiation section, a photodetection section or the like when the exhaust gas from the exhaust pipe is directly measured.
SOLUTION: This exhaust gas analyzer comprises an inner cylinder 3 that is arranged separately outside in the radial direction of the exhaust pipe 12 and fixed to an end of the opening side of the exhaust pipe 12, an outer cylinder 4 that is arranged separately outside in the radial direction of the inner cylinder 3 and fixed to the inner cylinder 3, a blower 7 for producing fluid flow along the inner peripheral surface of the outer cylinder 4 and the outer peripheral surface of the inner cylinder 3, the photoirradiation section 5 that is attached to the outer cylinder 4 and radiates inspection light La to the exhaust gas exhausted from the exhaust pipe 12, and the photodetection section 6 that is attached to the outer cylinder 4 and detects scattered light and/or transmitted light Lb from the exhaust gas. The inner cylinder 3 has through-holes 32 in parts corresponding to the photoirradiation section 5 and photodetection section 6 attached to the outer cylinder 4, and fluid flow passes at least over the through-holes 32.
COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：为了使废气分析仪小型化，并且在减少排气管和排气到光照射部的热量的影响的同时，提高S / N比，当排气 从排气管直接测量。 解决方案：该排气分析仪包括：内筒3，其分别配置在排气管12的径向外侧并固定在排气管12的开口侧的端部;外筒4， 分别在内筒3的径向外部并固定到内筒3，用于沿着外筒4的内周面和内筒3的外周面产生流体流动的鼓风机7，照射部 5，其被附接到外筒4，并且将检查光La照射到从排气管12排出的废气，以及安装在外筒4上的光检测部6，从而检测散射光和/或透射光Lb 废气 内筒3具有与光照射部5对应的部分和安装在外筒4上的光检测部6的通孔32，流体流通至少在通孔32的上方。（C）2009 ，JPO＆INPIT