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公开(公告)号:AT138501T
公开(公告)日:1996-06-15
申请号:AT88103367
申请日:1988-03-04
Applicant: IBM
Inventor: CHAUDHARI PRAVEEN NMN , GAMBINO RICHARD JOSEPH , KOCH ROGER HILSEN , LACEY JAMES ANDREW , LAIBOWITZ ROBERT BENJAMIN , VIGGIANO JOSEPH MICHAEL
IPC: C30B1/02 , C01G1/00 , C01G3/00 , C30B29/22 , H01B12/06 , H01B13/00 , H01L39/12 , H01L39/24