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11.发明专利
公开(公告)号：DE3279194D1
公开(公告)日：1988-12-08
申请号：DE3279194
申请日：1982-04-15
Applicant: IBM
Inventor： BANSAL JAI PAL , BERTIN CLAUDE LOUIS , TROUTMAN RONALD ROY
IPC: H01L27/00 , H01L21/268 , H01L21/8238 , H01L27/06 , H01L27/092 , H01L29/04 , H01L29/78 , H01L29/786 , H01L21/82
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