Abstract:
An integrated circuit for an imaging system has an array of optical sensors (40), and an array of optical filters (10) each configured to pass a band of wavelengths onto one or more of the sensors, the array of optical filters being integrated with the array of sensors, and the integrated circuit also having read out circuitry (30) to read out pixel values from the array of sensors to represent an image, different ones of the optical filters being configured to have a different thickness, to pass different bands of wavelengths by means of interference, to allow detection of a spectrum of wavelengths. The read out circuitry can enable multiple pixels under one optical filter to be read out in parallel. The thicknesses may vary non monotonically across the array. The read out, or later image processing, may involve selection or interpolation between wavelengths, to carry out spectral sampling or shifting, to compensate for thickness errors.
Abstract:
A MEMS device 1 is disclosed comprising a cavity 5 containing a MEMS component 6, the cavity 5 being formed in a dielectric layer stack 3 having a thickness t d , whereby the cavity 5 and the dielectric layer stack 3 are sandwiched between a substrate 2 and a sealing dielectric layer 4 having a thickness t s , and whereby the MEMS component 6 is enclosed by at least one trench 8 extending over the thickness t d of the dielectric layer stack 3 and of the sealing dielectric t s .
Abstract:
The present invention is related to a device for storing charge comprising a body for storing charge therein and at least one connecting region connected to the body. The at least one connecting region is arranged for supplying charge to and from the body. The body and the at least one connecting region are made of a semiconductor material. At least one of the at least one connecting region has a cross-sectional area smaller than the cross-section of the charge storing body, said cross-sectional area being perpendicular to the charge supplying direction. Such a charge storing device is preferably a FinFET device.