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公开(公告)号：DE10103958C1
公开(公告)日：2002-05-29
申请号：DE10103958
申请日：2001-01-30
Applicant: INFINEON TECHNOLOGIES AG
Inventor： CRELL CHRISTIAN
IPC: G01N21/956 , G03F1/00 , G01N21/88 , G01M11/02 , G03F7/20
Abstract: The defect detection method has the mask (1) loaded into a first inspection device (4) compared with a reference mask (1') loaded into a second inspection device (4'), by transfer of the corresponding mask images, via a communication bus system (6) between the control processors (5,5') of the inspection devices.
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