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公开(公告)号：US10291332B2
公开(公告)日：2019-05-14
申请号：US15934450
申请日：2018-03-23
Applicant: Innovative Micro Technology
Inventor： Christopher S. Gudeman
Abstract: A transceiver and interconnect for connecting a plurality of optical cables. In one embodiment, optical sources are joined to a plurality of fiber optic output cables. The structures may use a plurality of ball lenses to collimate the diverging light from the source and launch it down one of the plurality of fibers. Through holes in a silicon substrate may allow the radiation to pass, and these features may be made very precisely.
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Patent Agency Ranking
公开(公告)号：US10011478B2
公开(公告)日：2018-07-03
申请号：US15634230
申请日：2017-06-27
Applicant: Innovative Micro Technology
Inventor： Christopher S. Gudeman , Paul J. Rubel
CPC classification number: B81B7/0058 , B23K20/023 , B32B9/041 , B32B2457/00 , B81C1/00269 , B81C2203/0118 , B81C2203/037
Abstract: A method for bonding two substrates is described, comprising providing a first and a second silicon substrate, providing a raised feature on at least one of the first and the second silicon substrate, forming a layer of gold on the first and the second silicon substrates, and pressing the first substrate against the second substrate, to form a thermocompression bond around the raised feature. The high initial pressure caused by the raised feature on the opposing surface provides for a hermetic bond without fracture of the raised feature, while the complete embedding of the raised feature into the opposing surface allows for the two bonding planes to come into contact. This large contact area provides for high strength.
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公开(公告)号：US11502669B2
公开(公告)日：2022-11-15
申请号：US16888879
申请日：2020-06-01
Applicant: Innovative Micro Technology
Inventor： Christopher S. Gudeman
Abstract: A microfabricated spectrometer uses at least one filter to discriminate the frequency components of an incoming RF signal. The filter center frequencies are chosen to correspond to wavelengths of target species which may be present in the gas, and radiating at a characteristic frequency.
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公开(公告)号：US11258425B2
公开(公告)日：2022-02-22
申请号：US16888878
申请日：2020-06-01
Applicant: Innovative Micro Technology
Inventor： Christopher S. Gudeman
Abstract: A microfabricated RF filter uses a resonant cavity weakly coupled to a transmission line, to attenuate noise sources emitting interference into the RF radiation at the resonant frequency. Radiation at the resonant frequency is leaked into the resonant cavity and build up there, until it is dumped to ground by a switch.
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公开(公告)号：US10955336B2
公开(公告)日：2021-03-23
申请号：US16105448
申请日：2018-08-20
Applicant: Innovative Micro Technology
Inventor： Christopher S. Gudeman , Jaquelin K. Spong
Abstract: Systems and methods for forming a compact gas sensor include a multilayer etalon as a wavelength discriminating element. The position of the etalon may be adjusted to tune its transmission profile. And embodiment directed to carbon dioxide detection is described.
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公开(公告)号：US09950923B1
公开(公告)日：2018-04-24
申请号：US15485182
申请日：2017-04-11
Applicant: Innovative Micro Technology
Inventor： Christopher S. Gudeman , Jeffery F. Summers
IPC: H01L23/00 , B81C1/00 , B81B3/00 , H01L21/768 , H01L21/762 , H01L23/48
CPC classification number: H01L21/76879 , H01L21/76232 , H01L21/76877 , H01L23/481
Abstract: Described herein is a method and structure for fabricating vias in a semiconductor substrate. The semiconductor substrate is first doped to make it mildly conducting, via holes are formed therein, and a conductive material is deposited in the holes. Using the moderate conductivity of the substrate, the conductive material may be plated into the holes.
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