公开(公告)号：JP2013145877A

公开(公告)日：2013-07-25

申请号：JP2012272158

申请日：2012-12-13

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： KUSHIDA YUKI ,  HOSHINO MOTOKI ,  SHINOMURA HISASHI ,  NODA MASAHIRO ,  KONNO TOMOHISA

IPC: H01L21/304 ,  B24B37/00 ,  C09K3/14

Abstract: PROBLEM TO BE SOLVED: To provide an aqueous dispersion for chemical mechanical polishing capable of achieving both a high-polishing speed and suppression of corrosion generation to an aluminum film and its alloy film at a semiconductor device manufacturing step, and of showing a good storage stability, and provide a chemical mechanical polishing method using the same.SOLUTION: An aqueous dispersion for chemical mechanical polishing contains: (A) 0.1 mass% or more and 10 mass% or less of abrasive grains; and (B) 0.01 mass% or more and 2 mass% or less of a phosphate ester compound having a 1-5C organic group. The pH is 1 or more and 4 or less.

Abstract translation: 要解决的问题：提供一种用于化学机械抛光的水分散体，其能够在半导体器件制造步骤中实现铝膜及其合金膜的高抛光速度和抑制腐蚀产生，并且显示出良好的储存稳定性 并提供使用该化学机械抛光的化学机械抛光方法。溶液：用于化学机械抛光的水性分散体含有：（A）0.1质量％以上且10质量％以下的磨粒; 和（B）0.01质量％以上且2质量％以下的具有1-5C有机基团的磷酸酯化合物。 pH为1以上且4以下。

公开(公告)号：JP2009202918A

公开(公告)日：2009-09-10

申请号：JP2008048684

申请日：2008-02-28

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： MIYAJIMA HIDEKI ,  NODA MASAHIRO ,  IWAMOTO SATOSHI

IPC: B65D85/672

Abstract: PROBLEM TO BE SOLVED: To provide a packing structure having excellent holdability of an end face of a roll formed by winding a film for forming an electronic device member, capable of suppressing an offset of an end face due to impacts during transportation, and having excellent handling and packing ability of the roll.
SOLUTION: The packing structure 1 includes a pedestal 2 and a lid body 3 provided to be attached to and detached from the pedestal 2. The packing structure 1 accommodates a roll which is formed by winding a film for forming an electronic device member around a core. The packing structure 1 includes on the inside thereof a pair of receiving parts 21 provided at the pedestal 2 so as to oppose to each other and supporting the end parts of the core of the roll, a clamper 22 detachably provided at the receiving parts 21 and clamping the end part of the core between the receiving parts 21, and fixture band configured to be attached to and detached from the core from the peripheral surface side of the core and securing the end face of the film for forming the electronic device member by pressing the end face.
COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 解决的问题：为了提供一种能够抑制由于运输过程中的冲击造成的端面偏移而形成电子器件部件的薄膜形成的辊的端面具有优异的保持性的包装结构， 并具有良好的卷装处理和包装能力。 解决方案：包装结构1包括底座2和设置成安装到基座2上并从基座2拆卸的盖体3.包装结构1容纳通过卷绕用于形成电子装置构件的薄膜而形成的卷 围绕核心。 包装结构1在其内侧包括设置在基座2上的一对接收部21，以便彼此相对并支撑辊的芯部的端部，可拆卸地设置在接收部21处的夹持器22和 将芯部的端部夹持在接收部21之间，以及固定带，该固定带被配置为从芯的外周表面侧附接到芯并从芯脱离，并且通过按压来固定用于形成电子装置构件的膜的端面 端面。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2013041992A

公开(公告)日：2013-02-28

申请号：JP2011177933

申请日：2011-08-16

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： SATO KEIICHI ,  KUBOTA KIYONOBU ,  NODA MASAHIRO ,  KONNO TOMOHISA

IPC: H01L21/304 ,  B24B37/00 ,  C09K3/14

Abstract: PROBLEM TO BE SOLVED: To provide an aqueous dispersion for chemical mechanical polishing capable of sufficiently increasing a polishing speed ratio of a silicon nitride film relative to a silicon oxide film or a polysilicon film without needing high polishing pressure and good in storage stability, and a chemical mechanical polishing method using the aqueous dispersion for chemical mechanical polishing.SOLUTION: An aqueous dispersion for chemical mechanical polishing according to the present invention contains (A) a silica particle having at least one functional group selected from the group consisting of a sulfo group and a salt thereof, and (B) a nonionic surfactant having a triple bond, and has a pH of 2 or more and 7 or less.

Abstract translation: 要解决的问题：提供一种用于化学机械抛光的水分散体，其能够充分提高氮化硅膜相对于氧化硅膜或多晶硅膜的抛光速度比，而不需要高抛光压力和良好的储存稳定性 以及使用化学机械研磨用水性分散体的化学机械研磨方法。 解决方案：根据本发明的用于化学机械抛光的水分散体包含（A）具有至少一个选自磺基和其盐的官能团的二氧化硅颗粒，和（B）非离子表面活性剂 具有三键的表面活性剂，并且具有2以上且7以下的pH。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：JP2017114966A

公开(公告)日：2017-06-29

申请号：JP2015249707

申请日：2015-12-22

Applicant: Jsr株式会社 ,  Jsr Corp ,  Jsr株式会社

Inventor： YAMADA HIRONARI ,  OKAMOTO TAKAHIRO ,  HOSHINO MOTOKI ,  SHINOMURA HISASHI ,  SHIBUYA KYOHEI ,  NODA MASAHIRO

IPC: C09K3/14 ,  B24B37/00 ,  C09G1/02 ,  H01L21/304

Abstract: 【課題】本発明では、ポリシリコンあるいはアモルファスシリコンの研磨用途において、高い除去速度で研磨可能な化学機械研磨用水系分散体、およびそれを用いた化学機械研磨方法を提供する。【解決手段】化学機械研磨用組成物であって、スルフィニル基を側鎖に有する繰り返し単位を有する重合体(A)を含有し、スルフィニル基を側鎖に有する繰り返し単位が、下記式(1)で表される。【化1】・・・・・(1)(式(1)中、R3は直接結合または炭素数1〜24の2価の有機基を示し、R4は置換基を有していてもよい炭素数1〜20のアルカンジイル基または置換基を有していてもよい炭素数6〜20のアリーレン基を示す。)【選択図】なし

公开(公告)号：JP2013043893A

公开(公告)日：2013-03-04

申请号：JP2011180218

申请日：2011-08-22

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： HOSHINO MOTOKI ,  KUSHIDA YUKI ,  NODA MASAHIRO ,  KONNO TOMOHISA

IPC: C09K3/14 ,  B24B37/00 ,  H01L21/304

Abstract: PROBLEM TO BE SOLVED: To provide a dispersion for chemical and mechanical polishing which satisfies all characteristics of the stability by which silica particles are not precipitated, the high polishing rate for an aluminum film and the low polishing rate of a silicon oxide film, and to provide a chemical and mechanical polishing method using the same.SOLUTION: The dispersion contains (A) the silica particle having at least one kind of a functional group selected from a group comprising sulfo group and its salt and (B) a water-soluble polymer including a repeating unit originating in at least one kind selected from a group comprising N-vinyl pyrrolidone and its derivative and has pH of ≥2 and ≤8.

Abstract translation: 要解决的问题：为了提供满足二氧化硅颗粒不沉淀的稳定性的所有特性的用于化学和机械抛光的分散体，铝膜的高抛光速率和氧化硅膜的低抛光速率 ，并提供使用其的化学和机械抛光方法。 解决方案：分散体含有（A）具有至少一种选自磺基和其盐的官能团的二氧化硅颗粒和（B）包含至少起始于重组单元的重复单元的水溶性聚合物 一种选自由N-乙烯基吡咯烷酮及其衍生物组成的组，其pH为≥2且≤8。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：JP2010145545A

公开(公告)日：2010-07-01

申请号：JP2008320246

申请日：2008-12-16

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： UEDA MASAHIRO ,  OKABE SHOGO ,  ONIMARU NAMI ,  KUDO KAZUO ,  NODA MASAHIRO ,  MAKIHIRA ISAMU ,  MAJIMA HIROSHI ,  MOCHIZUKI DAIGO

IPC: G03F7/004 ,  G03F7/027 ,  G03F7/40 ,  H01J9/02 ,  H01J11/02 ,  H01J11/12 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/34 ,  H01L31/04

CPC classification number: Y02E10/50

Abstract: PROBLEM TO BE SOLVED: To provide a photosensitive paste composition and a pattern forming method, which are suitably used to form a high-sensitivity and high-accuracy pattern in manufacturing of a display panel such as a flat panel display or a circuit board having a fine pattern of electrode or the like used for a high-density mounting material for electronic part and a solar battery material.
SOLUTION: The photosensitive paste composition includes: (A) aluminum powder at least part of the surface of which is coated with at least one selected from silicon oxide, zirconium oxide and titanium oxide; (B) glass powder; (C) an alkali soluble resin; (D) a multifunctional (meth)acrylate; and (E) a photopolymerization initiator.
COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：提供适合用于在诸如平板显示器或电路的显示面板的制造中形成高灵​​敏度和高精度图案的感光性浆料组合物和图案形成方法 具有用于电子部件的高密度安装材料和太阳能电池材料的电极等的精细图案的板。 光敏膏组合物包括：（A）其表面的至少一部分涂覆有选自氧化硅，氧化锆和氧化钛中的至少一种的铝粉末; （B）玻璃粉; （C）碱溶性树脂; （D）多官能（甲基）丙烯酸酯; 和（E）光聚合引发剂。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2008239778A

公开(公告)日：2008-10-09

申请号：JP2007081785

申请日：2007-03-27

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： KINOSHITA YOSHINORI ,  YOSHIDA TAKESHI ,  NODA MASAHIRO ,  IWAMOTO SATOSHI ,  ITANO TAKAFUMI

IPC: C08F2/44 ,  C08F2/50 ,  C08F290/08 ,  H01J11/44

Abstract: PROBLEM TO BE SOLVED: To provide an inorganic powder-containing resin composition capable of forming a black matrix with good sensitivity, a transfer film having an inorganic powder-containing resin layer comprising the inorganic powder-containing resin composition, and a method for manufacturing a flat panel display capable of forming a black matrix which is flat and smooth, has no warpage, and has good patterning performance.
SOLUTION: The transfer film having the inorganic powder-containing resin layer comprising the inorganic powder-containing resin composition of the present invention obtained by using a specific photoinitiator can provide the flat panel display capable of forming a black matrix which is flat and smooth, has no warpage, and has excellent patterning performance.
COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 待解决的问题：为了提供一种能够形成具有良好灵敏度的黑色矩阵的含无机粉末的树脂组合物，具有含有无机粉末的树脂组合物的无机粉末的树脂层的转移膜和方法 为了制造能够形成平坦光滑的黑矩阵的平板显示器，没有翘曲，并且具有良好的图案化性能。 解决方案：具有含无机粉末的树脂层的转移膜包含通过使用特定的光引发剂获得的本发明的含无机粉末的树脂组合物可以提供能够形成平坦的黑矩阵的平板显示器， 光滑，无翘曲，并具有优异的图案性能。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2008077069A

公开(公告)日：2008-04-03

申请号：JP2007212872

申请日：2007-08-17

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： YOSHIDA TAKESHI ,  NODA MASAHIRO ,  IWAMOTO SATOSHI ,  ITANO TAKAFUMI

IPC: G03F7/027 ,  C08F2/44 ,  C08F290/12 ,  G02B5/20 ,  G03F7/004 ,  G03F7/038 ,  G03F7/075 ,  H01J9/227 ,  H01J11/02 ,  H01J11/22 ,  H01J11/24 ,  H01J11/34 ,  H01J11/44

Abstract: PROBLEM TO BE SOLVED: To provide an inorganic powder-containing resin composition which achieves high solvent resistance of a pattern after development and can form a black matrix suitable for batch formation of a plurality of members; a transfer film having an inorganic powder-containing resin layer comprising the inorganic powder-containing resin composition; and a method for manufacturing a flat panel display in which a plurality of members including a black matrix are batch-formed. SOLUTION: The inorganic powder-containing resin composition comprises (A) (A-1) a black pigment and (A-2) glass powder as inorganic powder, (B) a binder resin, (C) a photopolymerizable monomer and (D) a photopolymerization initiator, wherein the binder resin (B) is a resin having a urethane bond and an unsaturated double bond in a side chain. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 解决问题的方法：提供一种无机粉末的树脂组合物，其在显影后达到图案的高耐溶剂性，并且可以形成适于批量形成多个构件的黑色基质; 具有含有无机粉末的树脂组合物的无机粉末的树脂层的转移膜; 以及其中包括黑矩阵的多个构件分批形成的平板显示器的制造方法。 解决方案：含无机粉末的树脂组合物包含（A）（A-1）黑色颜料和（A-2）玻璃粉末作为无机粉末，（B）粘合剂树脂，（C）可光聚合单体和 （D）光聚合引发剂，其中粘合剂树脂（B）是侧链具有氨基甲酸酯键和不饱和双键的树脂。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2008034153A

公开(公告)日：2008-02-14

申请号：JP2006204012

申请日：2006-07-26

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： YOSHIDA TAKESHI ,  NODA MASAHIRO ,  IWAMOTO SATOSHI ,  ITANO TAKAFUMI

IPC: H01J11/02 ,  B05D1/28 ,  B05D7/00 ,  C08F2/44 ,  C08F265/06 ,  C08F292/00 ,  H01J9/20 ,  H01J11/12 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/34 ,  H01J11/36 ,  H01J11/38 ,  H01J11/40 ,  H01J11/42 ,  H01J11/44

Abstract: PROBLEM TO BE SOLVED: To provide an inorganic powder contained resin composition capable of forming suitably a black matrix with low transmissivity, a transfer film having an inorganic powder contained resin layer consisting of the inorganic powder contained resin composition, and to provide a manufacturing method of a flat panel display to form a black matrix with low reflectance and transmissivity and superior in light shielding.
SOLUTION: The inorganic powder-contained resin composition contains (A) (A-1) pigment and (A-2) glass powder as an inorganic powder, (B) a binder resin, (C) a photo-polymerizable monomer, and (D) a photo-polymerization initiator, and the ratio of the (A-2) glass powder occupied in the (A) inorganic powder is 70-95 mass%.
COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：为了提供能够适当地形成具有低透射率的黑色矩阵的含有无机粉末的树脂组合物，具有无机粉末的转移膜包含由含有无机粉末的树脂组合物构成的树脂层，并且提供 平板显示器的制造方法，以形成具有低反射率和透射率的黑矩阵并且具有优异的遮光性。 解决方案：含无机粉末的树脂组合物含有（A）（A-1）颜料和（A-2）无机粉末的玻璃粉末，（B）粘合剂树脂，（C）光聚合单体 和（D）光聚合引发剂，（A）无机粉末中占据的（A-2）玻璃粉末的比例为70〜95质量％。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2007265654A

公开(公告)日：2007-10-11

申请号：JP2006085612

申请日：2006-03-27

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： ITANO TAKAFUMI ,  NODA MASAHIRO

IPC: H01J9/02 ,  H01J11/02 ,  H01J11/22 ,  H01J11/34 ,  H01J11/44

Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method of an FPD capable of efficiently forming a plurality of elements (for example a black matrix and electrode pattern or the like) for structuring the flat panel display (FPD), and provide a transfer film suitably used in the manufacturing method. SOLUTION: The manufacturing method of the FPD includes a process of forming a laminated film, which contains a resin layer containing photosensitive inorganic powder abutting on a transparent substrate, on the transparent substrate, a process of pattern-exposing the transparent substrate with the laminated film formed thereon from a side of a transparent substrate surface and a side of a laminated film forming surface respectively, a process of forming a laminated film pattern by developing and etching the respective layers structuring the laminated film, and a process of burning the laminated film pattern. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：为了提供能够有效地形成用于构造平板显示器（FPD）的多个元件（例如黑矩阵和电极图案等）的FPD的制造方法，并且提供 转印膜适用于制造方法。 解决方案：FPD的制造方法包括在透明基板上形成包含含有与透明基板抵接的感光性无机粉末的树脂层的层叠膜的工序，将透明基板图案曝光的工序 分别从透明基板表面侧和层叠薄膜形成表面侧形成的层叠薄膜，通过显影和蚀刻构成叠层薄膜的各层来形成叠层薄膜图案的工艺，以及烧结 层压膜图案。 版权所有（C）2008，JPO＆INPIT