公开(公告)号：WO2010062150A3

公开(公告)日：2010-09-10

申请号：PCT/KR2009007084

申请日：2009-11-30

Applicant: KOREA RES INST OF STANDARDS ,  CHO HYUN MO ,  CHO YONG JAI ,  CHEGAL WON

Inventor： CHO HYUN MO ,  CHO YONG JAI ,  CHEGAL WON

IPC: G01N21/55 ,  G01N21/00 ,  G01N21/25

CPC classification number: G01N21/553 ,  G01N2021/212

Abstract: Provided is a multi-channel surface plasmon resonance sensor using beam profile ellipsometry; and, more particularly, to a high sensitive measuring technology, which is coupled with a vertical illumination type focused-beam ellipsometer using a multi-incident angle measurement method, and a surface plasmon resonance (SPR) sensing part deposited with a metal thin film. The multi-channel surface plasmon resonance sensor includes a vertical illumination type focused-beam ellipsometer, in which light is polarized; a surface plasmon resonance (SPR) sensing part which is provided at the objective lens part of the focused-beam ellipsometer so as to generate SPR according to an angle change of the polarized light; and a flow unit which supplies a buffer solution containing a bio material binding to or dissociation from the metal thin film generating surface plasmon, wherein the SPR and the ellipsometric phase change by change in an angle and a wavelength are simultaneously detected.

Abstract translation: 提供了使用光束轮廓椭偏仪的多通道表面等离子体共振传感器; 更具体地说，涉及一种高灵敏度测量技术，其与使用多入射角测量方法的垂直照明型聚焦光束椭偏仪和沉积有金属薄膜的表面等离子体共振（SPR）感测部件相结合。 多通道表面等离子体共振传感器包括其中光被极化的垂直照明型聚焦光束椭偏仪; 表面等离子体共振（SPR）感测部，其设置在聚焦光束椭偏仪的物镜部分，以便根据偏振光的角度变化产生SPR; 以及流动单元，其提供包含与金属薄膜产生表面等离子体激元结合或解离的生物材料的缓冲溶液，其中同时检测SPR和椭偏相位随角度和波长的变化而改变。