Abstract:
An infrared light sensor chip comprises a substrate (2), an infrared light sensor (9), which has a base electrode (10) that is in direct contact with one side (8) of the substrate (2) and which is used to attach the infrared light sensor (9) to the substrate (2), and a resistance thermometer (13), which has a resistance path (14) in direct contact with the side (8) of the substrate (2) adjacent to the infrared light sensor (9) and configured to measure the temperature of the substrate (2) via the resistance thermometer (13). The resistance path (14) is made of the same material of which the base electrode (10) is made.
Abstract:
A switch actuating device for actuating a switch by eight types of non-tactile gestures performed with an object emitting heat includes a gesture sensor with four pixels configured to detect heat emitted by the object. The pixels include thin films made of pyroelectric sensitive material which generate a signal that has signal deflections corresponding to a temporal intensity curve of the heat detected by the thin film of the corresponding pixel. The types of the gestures are determined with a signal processing unit which controls an actuator to actuate the switch when a performance of one of the types of the gestures is determined. The gesture types are determined during an approach phase when the object approaches the gesture sensor, a waiting phase during when the object remains close to the gesture sensor, and a subsequent translational phase when the object moves in one of eight directions.
Abstract:
A switch operating device (100) configured to operate a switch (103) with four possible types (111 to 114) of non-tactile translational gestures performed with a heat emitting part (115). A gesture sensor (1) is adapted to detect heat emitted by the part while performing one of the translational gesture types. Four pixels (21 to 24) are arranged next to each other and output a signal (51 to 54) per pixel, wherein the signal has a signal deflection (58) corresponding to the temporal intensity curve of the heat detected by the thin film of the corresponding pixel. A signal processing unit (101) determines the performance of the translational gesture types from the temporal succession of the signal deflections (58). An actuator (104) is controlled by the signal processing unit and operates the switch when one of the translational gesture types is determined.
Abstract:
Switch operating device (100) with: a gesture sensor operating a switch (103) with a non-tactile push-gesture performed with a heat emitting part. The gesture has an approach phase (111) during which the part approaches the sensor, a waiting phase (113) during which the part remains proximate to the sensor, and a withdrawal phase (112) during which the part is moved away from the sensor. The sensor detects heat emitted by the part with at least one pixel and outputs per pixel a signal (51 to 54) with signal deflections (56, 57) corresponding to a temporal intensity curve of heat detected by the pixel while the gesture (115) is performed. A signal processing unit (101) which determines performance of the gesture from a temporal succession of signal deflections. An actuator (104) is controlled by the signal processing unit and operates the switch when the gesture is performed.
Abstract:
A Method for producing a microsystem (1) with pixels includes: producing a thermal silicon oxide layer on the surface of a silicon wafer as a base layer (5) by oxidation of the silicon wafer; producing a silicon oxide thin layer on the base layer as a carrier layer (6)by thermal deposition; producing a platinum layer on the carrier layer by thermal deposition, whereby an intermediate product is produced; cooling the intermediate product to room temperature; pixel-like structuring of the platinum layer by removing surplus areas of the platinum layer, whereby bottom electrodes (8, 12) of the pixels (7, 8) are formed in pixel shape on the carrier layer in remaining areas; removing material on the side of the silicon wafer facing away from the base layer, so a frame (3) remains and a membrane (4) formed by the base layer and the carrier layer is spanned by the frame.
Abstract:
A switch actuating device for actuating a switch by eight types of non-tactile gestures performed with an object emitting heat includes a gesture sensor with four pixels configured to detect heat emitted by the object. The pixels include thin films made of pyroelectric sensitive material which generate a signal that has signal deflections corresponding to a temporal intensity curve of the heat detected by the thin film of the corresponding pixel. The types of the gestures are determined with a signal processing unit which controls an actuator to actuate the switch when a performance of one of the types of the gestures is determined. The gesture types are determined during an approach phase when the object approaches the gesture sensor, a waiting phase during when the object remains close to the gesture sensor, and a subsequent translational phase when the object moves in one of eight directions.
Abstract:
A method for producing a micro system, said method comprising: providing a substrate (2) made of aluminum oxide; producing a thin film (6) on the substrate (2) by depositing lead zirconate titanate onto the substrate (2) with a thermal deposition method such that the lead zirconate titanate in the thin film (6) is self-polarized and is present predominantly in the rhombohedral phase; and cooling down the substrate (2) together with the thin film (6).
Abstract:
Switch operating device (100) with: a gesture sensor operating a switch (103) with a non-tactile push-gesture performed with a heat emitting part. The gesture has an approach phase (111) during which the part approaches the sensor, a waiting phase (113) during which the part remains proximate to the sensor, and a withdrawal phase (112) during which the part is moved away from the sensor. The sensor detects heat emitted by the part with at least one pixel and outputs per pixel a signal (51 to 54) with signal deflections (56, 57) corresponding to a temporal intensity curve of heat detected by the pixel while the gesture (115) is performed. A signal processing unit (101) which determines performance of the gesture from a temporal succession of signal deflections. An actuator (104) is controlled by the signal processing unit and operates the switch when the gesture is performed.