公开(公告)号：NO861041A

公开(公告)日：1986-03-18

申请号：NO861041

申请日：1986-03-18

Applicant: ROSEMOUNT INC

Inventor： BOHARA ROBERT C ,  RUF JAMES A

IPC: G01K7/18 ,  H01C1/01 ,  H01C7/02 ,  H01C17/00 ,  H01C17/06 ,  H01C17/12 ,  H01C

CPC classification number: G01K7/183 ,  H01C7/021 ,  H01C17/003 ,  H01C17/12

公开(公告)号：EP0191052A4

公开(公告)日：1986-11-26

申请号：EP85903923

申请日：1985-07-25

Applicant: ROSEMOUNT INC

Inventor： BOHARA ROBERT C ,  RUF JAMES A

IPC: G01K7/18 ,  H01C1/01 ,  H01C7/02 ,  H01C17/00 ,  H01C17/06 ,  H01C17/12 ,  H01C1/012 ,  C23C14/00 ,  H01C3/04 ,  H01C7/04

CPC classification number: G01K7/183 ,  H01C7/021 ,  H01C17/003 ,  H01C17/12

Abstract: A platinum resistance thermometer (10) is formed in a process which includes the defining of a path for the resistance thermometer in an inert material (28) deposited in a layer on the substrate (24). The substrate surface (26) is exposed in the path, and the inert material (28) forms a negative pattern for the path. The resistive material for the thermometer is then deposited on both the substrate surface (26) exposed in the path and on the surfaces (32, 34) of the inert material remaining on the substrate. After this, the inert material (28) is etched away, and the resistive material (40) deposited on top of the inert material (28) is then loose and can be removed leaving a strip (12) of resistive material in the desired path for forming the resistive thermometer (10). The strip (12) has low contamination and impurities to more easily reach the desired temperature coefficient of resistance of the strip (12) forming the thermometer (10).