Abstract:
A process fluid pressure measurement probe (100) includes a pressure sensor (112) formed of a single-crystal material and mounted to a first metallic process fluid barrier (130) and disposed for direct contact with a process fluid. The pressure sensor (112) has an electrical characteristic that varies with process fluid pressure. A feedthrough (122) is formed of a single-crystal material and has a plurality of conductors extending from a first end to a second end. The feedthrough (122) is mounted to a second metallic process fluid barrier (116) and is spaced from, but electrically coupled to, the pressure sensor (112). The pressure sensor (112) and the feedthrough (122) are mounted such that the secondary metallic process fluid barrier (116) is isolated from process fluid by the first metallic process fluid barrier (116).
Abstract:
A thermal effect sensing device comprises a semiconductor substrate supporting an insulating layer which has a thin film of platinum deposited on it. Holes are etched through the semiconductor substrate and the insulating layer. The platinum film is shaped to provide a serpentine resistive element suspended over one of the holes . The serpentine element is suspended from the rim of the hole, but is otherwise unsupported. The resistive element has a low thermal mass and there is a low thermal resistance between the element and fluid in the sensor. The sensor senses thermal properties of the fluid in the sensor, such as mass flow or thermal conductivity. A second conductive film is insulatingly deposited on the first film to provide a resistive sensor electrically isolated from a resistive heating element .
Abstract:
A micromachined miniature valve used for gas chromatography has very low valve and interconnection dimensions to reduce the fluid volume inherent in other gas switching valves to thereby provide accurate measurements involving small gas flows. In order to reduce actuating diaphragm size, without encountering excessive stress concentrations in the diaphragm, the diaphragm can be polyimide film actuated in connection with a silicon valve body having valve seats with ports that are opened or closed by deflection of the diaphragm. Silicon wafers can be micromachined using batch fabrication techniques to provide the necessary valve seats and passageways for operating. The valve assembly is produced as a layered sandwich made up of individual wafers, including an actuator layer, a stop layer, a valve seat layer, and a layer which has flow channels receiving gas from the valve seat layer and making the necessary interconnections to provided outlets. The diaphragm film is positioned between the valve seat layer and the stop layer, and is deflected or displaced to control passage of gases through the valve openings. The diaphragm layer is sealed to the silicon valve body by a process which involves fusing, such as glass frit or solder sealing.
Abstract:
A pressure transmitter assembly (100) for measuring a process pressure of an industrial process includes a pressure sensor (500) configured to sense the process pressure. A process coupling couples (106) the pressure sensor (500) to the industrial process. In one example configuration, a phase change material (312) carried in the process coupling (106) is configured to reduce heat transfer from the industrial process to the process variable sensor by changing phase in response to heat from the industrial process. In another example configuration, a thermocouple electric cooling element (122) is coupled to the process coupling (106) and configured to conduct heat away from the coupling (106) in response to an applied electric current.
Abstract:
A system (100) for measuring flow of process fluid through process piping (102), includes a flow restriction (108) in the process piping generating a differential pressure between an upstream side of the restriction (108) and a downstream side of the restriction (108). The differential pressure is related to flow of the process fluid. First and second upstream pressure transmitters (104C, 104D) are coupled to the process piping (102) on the upstream side of the flow restriction (108) and measure respective first and second upstream pressures. First and second downstream pressure transmitters (104A, 104B) are coupled to the process piping (102) on the downstream side of the flow restriction (108) and measure respective first and second downstream pressure of the process fluid. Flow rate of the process fluid is calculated based upon at least one upstream pressure and one downstream pressure.
Abstract:
A pressure transmitter (10) for measuring a pressure of a process fluid in an industrial process, includes a pressure sensor (16) having an output related to an applied pressure. Measurement circuitry (18,20) coupled to the pressure sensor (16) is configured to provide a transmitter output related to sensed pressure. A pressure coupling face (60) having an opening (48,52) therein is arranged to transfer the applied pressure to the pressure sensor (16). A pressure coupling flange (13) having a flange face (62) abutting the pressure coupling face (60) is configured to convey the process fluid to the opening (48,50) of the pressure coupling face (60). Features are provided to control distribution of a loading force across the pressure coupling face and the flange face.
Abstract:
A corrosion rate measurement system (130) includes a first membrane (160) of a first material configured to be exposed to a corrosive material and deflect in response to corrosion. A second membrane (162) is configured to be exposed to a corrosive material and deflect in response to corrosion. A pressure sensor (134) is operably coupled to at least one of the first and second membranes (160, 162) and configured to measure deflection of at least one of the first and second membranes (160, 162) as a function of a pressure and an amount of corrosion at least one of the first and second membranes (160, 162).
Abstract:
A polymeric remote seal system is provided for coupling a single-use container (110) to a pressure measurement instrument (104). The polymeric remote seal system includes a process-side coupling (116), an instrument-side coupling (118) and a fluidic coupling (106) therebetween. The process-side coupling (116) is configured to couple to the single-use container (110) and is formed of a radiation sterilizable polymer. The process-side coupling (116) has a process-side deflectable diaphragm (256; 234) that is configured to deflect in response to pressure within the single-use container (110). The instrument-side coupling (118) is configured to couple to the pressure measurement instrument (104) and is formed of a radiation sterilizable polymer. The instrument-side coupling (118) is configured to fluidically convey fluid pressure to an isolation diaphragm of the pressure measurement instrument. Tubing (106) fluidically couples the process-side coupling (116) to the instrument-side coupling (118).
Abstract:
A process variable transmitter (36) for measuring a pressure of a process fluid includes a process coupling having a first port (90) configured to couple to a first process pressure and a second port (90) configured to couple to a second process pressure. A differential pressure sensor (56) is coupled to the first and second ports and provides an output related to a differential pressure between the first pressure and the second pressure. First and second pressure sensors (97, 98) couple to the respective first and second ports and provide outputs related to the first and second pressures. Transmitter circuitry (72) is configured to provide a transmitter output based upon the output from the differential pressure sensor and/or the first and/or second pressure sensors.