Abstract:
PROBLEM TO BE SOLVED: To provide a platinum resistor thermometer whose electric characteristics are not deteriorated at a high temperature, and its manufacturing method. SOLUTION: A thin film platinum resistor temperature detecting element 14 is coated with a high quality dielectric layer 24 which is covered with a partition layer 26. This partition layer 26 covers the upper part of the dielectric layer 24, and prevents contaminant from diffusion toward the detecting element 14. The partition layer 26 allows diffusion of oxygen, so that the platinum layer is surrounded by an abundant oxygen atmosphere. The high quality dielectric layer 24 is, e.g. a silicon dioxide layer, and the partition layer 26 is composed of titanium dioxide. By this constitution, the temperature detecting element 14 is not contaminated and the temperature coefficient of the resistor is not deteriorated at a high temperature.
Abstract:
A pressure transmitter (10) for measuring a pressure of a process fluid in an industrial process, includes a pressure sensor (16) having an output related to an applied pressure. Measurement circuitry (18,20) coupled to the pressure sensor (16) is configured to provide a transmitter output related to sensed pressure. A pressure coupling face (60) having an opening (48,52) therein is arranged to transfer the applied pressure to the pressure sensor (16). A pressure coupling flange (13) having a flange face (62) abutting the pressure coupling face (60) is configured to convey the process fluid to the opening (48,50) of the pressure coupling face (60). Features are provided to control distribution of a loading force across the pressure coupling face and the flange face.
Abstract:
A pressure transducer (10) for clean environments is disclosed. The pressure transducer (10) includes a process coupler (16), a sensor module (14), a shield (30) and electronics. The process coupler (16) is configured to couple to a source of process media at a process inlet (32). The sensor module (14) is coupled to the process coupler (16) and has a pressure sensor (15) therein. The pressure sensor (15) has an electrical characteristic that varies in response to pressure within the sensor module (14). The shield (30) is disposed adjacent to the process coupler (16) and configured to obstruct substantially all lines of sight between the process inlet (32) and the pressure sensor (15). Electronics within the transducer (10) are coupled to the pressure sensor (15) to measure the electrical characteristic and provide an indication thereof. A method of sensing a pressure in a clean environment is also provided.
Abstract:
A pressure sensor (100, 222) integrally formed in the shape of a beam (102) around a central channel. The beam (102) has an integral blind end (104) that is pressurized by the fluid. The beam has an opposite end (106) that is shaped to provide a stepped corner (107) with a gap (108) opening at the base of the stepped corner (107), where the gap (108) and isolated from the fluid. A sensing film (112) in the channel adjacent the blind end (104) has an electrical parameter that varies with pressure and electrical leads (110) that extend from the channel and out the gap. A seal (115) fills the gap (108) around the leads (110) and the seal (115) fills a portion of the stepped corner (107). The sensor (100) is preferably formed by direct bonding of single crystal alumina layers (114, 116). Applications include industrial pressure transmitters, aerospace and turbine engine pressure sensing.
Abstract:
A pressure transmitter assembly (100) for measuring a process pressure of an industrial process includes a pressure sensor (500) configured to sense the process pressure. A process coupling couples (106) the pressure sensor (500) to the industrial process. In one example configuration, a phase change material (312) carried in the process coupling (106) is configured to reduce heat transfer from the industrial process to the process variable sensor by changing phase in response to heat from the industrial process. In another example configuration, a thermocouple electric cooling element (122) is coupled to the process coupling (106) and configured to conduct heat away from the coupling (106) in response to an applied electric current.
Abstract:
A pressure sensor (10) configured to sense an applied pressure, comprising a diaphragm support structure (12), a diaphragm (16A, B) coupled to the diaphragm support structure and configured to deflect in response to applied pressure, a moveable member (20) coupled to the diaphragm and configured to move in response to deflection of the diaphragm, and an optical interference element (34) coupled to the moveable member and configured to interfere with incident light, wherein the interference is a function of position of the moveable member.
Abstract:
A polymeric remote seal system is provided for coupling a single-use container (110) to a pressure measurement instrument (104). The polymeric remote seal system includes a process-side coupling (116), an instrument-side coupling (118) and a fluidic coupling (106) therebetween. The process-side coupling (116) is configured to couple to the single-use container (110) and is formed of a radiation sterilizable polymer. The process-side coupling (116) has a process-side deflectable diaphragm (256; 234) that is configured to deflect in response to pressure within the single-use container (110). The instrument-side coupling (118) is configured to couple to the pressure measurement instrument (104) and is formed of a radiation sterilizable polymer. The instrument-side coupling (118) is configured to fluidically convey fluid pressure to an isolation diaphragm of the pressure measurement instrument. Tubing (106) fluidically couples the process-side coupling (116) to the instrument-side coupling (118).
Abstract:
A polymeric remote seal system is provided for coupling a single-use container (110) to a pressure measurement instrument (104). The polymeric remote seal system includes a process-side coupling (116), an instrument-side coupling (118) and a fluidic coupling (106) therebetween. The process-side coupling (116) is configured to couple to the single-use container (110) and is formed of a radiation sterilizable polymer. The process-side coupling (116) has a process-side deflectable diaphragm (256; 234) that is configured to deflect in response to pressure within the single-use container (110). The instrument-side coupling (118) is configured to couple to the pressure measurement instrument (104) and is formed of a radiation sterilizable polymer. The instrument-side coupling (118) is configured to fluidically convey fluid pressure to an isolation diaphragm of the pressure measurement instrument. Tubing (106) fluidically couples the process-side coupling (116) to the instrument-side coupling (118).
Abstract:
A process fluid pressure measurement probe (100) includes a pressure sensor (112) formed of a single-crystal material and mounted to a first metallic process fluid barrier (130) and disposed for direct contact with a process fluid. The pressure sensor (112) has an electrical characteristic that varies with process fluid pressure. A feedthrough (122) is formed of a single-crystal material and has a plurality of conductors extending from a first end to a second end. The feedthrough (122) is mounted to a second metallic process fluid barrier (116) and is spaced from, but electrically coupled to, the pressure sensor (112). The pressure sensor (112) and the feedthrough (122) are mounted such that the secondary metallic process fluid barrier (116) is isolated from process fluid by the first metallic process fluid barrier (116).
Abstract:
A system (100) for measuring flow of process fluid through process piping (102), includes a flow restriction (108) in the process piping generating a differential pressure between an upstream side of the restriction (108) and a downstream side of the restriction (108). The differential pressure is related to flow of the process fluid. First and second upstream pressure transmitters (104C, 104D) are coupled to the process piping (102) on the upstream side of the flow restriction (108) and measure respective first and second upstream pressures. First and second downstream pressure transmitters (104A, 104B) are coupled to the process piping (102) on the downstream side of the flow restriction (108) and measure respective first and second downstream pressure of the process fluid. Flow rate of the process fluid is calculated based upon at least one upstream pressure and one downstream pressure.