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公开(公告)号：JP2004358314A
公开(公告)日：2004-12-24
申请号：JP2003157859
申请日：2003-06-03
Applicant: Seiko Epson Corp , セイコーエプソン株式会社
Inventor： USUI TAKAHIRO
Abstract: PROBLEM TO BE SOLVED: To provide a liquid drop delivery method accurately delivering a liquid drop even when temperature distribution is generated on a delivery head, and a liquid drop delivery device.
SOLUTION: The liquid drop of a function liquid is delivered from a nozzle row 121 by adjusting temperature of the delivery head formed with the nozzle row 121 at a predetermined pitch. The liquid drop delivery method has a selection step for selecting a partial nozzle N2 from the nozzle row 121 based on the distribution of the pitch of the nozzle row 121 at the delivery head after the temperature is adjusted; and a delivery step for delivering the liquid drop from the selected nozzle N2.
COPYRIGHT: (C)2005,JPO&NCIPI-
公开(公告)号：JP2004351260A
公开(公告)日：2004-12-16
申请号：JP2003149228
申请日：2003-05-27
Applicant: Seiko Epson Corp , セイコーエプソン株式会社
Inventor： USUI TAKAHIRO
Abstract: PROBLEM TO BE SOLVED: To provide a droplet discharging device and a droplet discharging method by which the heating of a discharge head can be performed with low energy in an ink jet apparatus where a liquid body of high viscosity such as lubricating oil and a resin is discharged.
SOLUTION: The droplet discharging device is provided with: a discharge head 34 having a cavity storing a liquid body, a nozzle communicated with the cavity and a discharging means for discharging the liquid body stored in the cavity; and a liquid body tank 35 storing the liquid body for feeding the liquid body to the discharge head 34. The device has: a heating means provided on the discharge head; a chamber 38 provided at a movable position in the discharge head 34; and a temperature control means CONT controlling the temperature at the inside of the chamber 38 to the prescribed one.
COPYRIGHT: (C)2005,JPO&NCIPIAbstract translation: 要解决的问题：提供一种液滴喷射装置和液滴喷射方法，通过该液滴喷射装置和液滴喷射方法，在具有高粘度的液体如润滑油和 树脂被排出。 解决方案：液滴喷射装置设有：具有存储液体的空腔的排出头34，与空腔连通的喷嘴和用于排出存储在空腔中的液体的排出装置; 以及储存用于将液体供给到排出头34的液体的液体箱35.该装置具有：设置在排出头上的加热装置; 设置在排出头34的可动位置的室38; 以及温度控制装置CONT，其将室38内部的温度控制为规定值。 版权所有（C）2005，JPO＆NCIPI
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公开(公告)号：JP2004298787A
公开(公告)日：2004-10-28
申请号：JP2003095972
申请日：2003-03-31
Applicant: Seiko Epson Corp , セイコーエプソン株式会社
Inventor： USUI TAKAHIRO
CPC classification number: B41J25/003 , B41J2/16508 , B41J2002/16502 , G02F2001/13415
Abstract: PROBLEM TO BE SOLVED: To provide a plotting system for stably applying a liquid crystal or the like by a liquid drop discharge method.
SOLUTION: The plotting system is for applying a plotting liquid prepared by dissolving or dispersing a plotting material in a solvent on a substrate and is provided with a liquid drop discharge means 13 having a liquid drop discharge head 12 for discharging the plotting liquid on the substrate, a substrate stage 16 for placing the substrate, a moving means 14 for relatively moving the position of the discharge head 12 or the substrate stage 16 and a control means 15 for controlling at least one of the discharge head and the substrate state. Further a wall 51 of a solvent flow-out preventing means is provided on at least one or both of the discharge head 12 and the substrate stage 16.
COPYRIGHT: (C)2005,JPO&NCIPI-
14.发明专利Film forming device, liquid droplet discharging head, device manufacturing equipment and device 审中-公开成膜装置，液体排出头，装置制造设备和装置
公开(公告)号：JP2003340337A
公开(公告)日：2003-12-02
申请号：JP2002158021
申请日：2002-05-30
Applicant: Seiko Epson Corp , セイコーエプソン株式会社
Inventor： USUI TAKAHIRO
Abstract: PROBLEM TO BE SOLVED: To inhibit the change of a discharge weight by controlling the temperature of ink to the high precision and under a constant state. SOLUTION: The film forming device is provided with a liquid droplet discharging head 20 for spewing a liquid. This head 20 is provided with a flow passage 53 for a temperature adjustment medium. COPYRIGHT: (C)2004,JPO
Abstract translation: 要解决的问题：通过将油墨的温度控制在高精度和恒定状态来抑制排出重量的变化。 解决方案：成膜装置设有用于喷射液体的液滴排放头20。 该头部20设置有用于温度调节介质的流路53。 版权所有（C）2004，JPO
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公开(公告)号：JP2003270429A
公开(公告)日：2003-09-25
申请号：JP2002074300
申请日：2002-03-18
Applicant: Seiko Epson Corp , セイコーエプソン株式会社
Inventor： USUI TAKAHIRO
Abstract: PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a device capable of stably discharging a liquid drop and obtaining a predetermined plotting characteristic.
SOLUTION: The apparatus for manufacturing the device has a nozzle plate 50 formed by penetrating a nozzle 91 to discharge a liquid body. The device is manufactured by discharging liquid body on a substrate from one surface 50a of the nozzle plate 50. A liquid repellent film 52 is formed on one surface 50a of the nozzle plate 50, the inner surface of the nozzle 91, and the surrounding part 58 of the nozzle 91 on the other surface 50b of the nozzle plate 50.
COPYRIGHT: (C)2003,JPOAbstract translation: 要解决的问题：提供一种用于制造能够稳定地排出液滴并获得预定绘图特性的装置的装置。 解决方案：用于制造该装置的装置具有喷嘴板50，该喷嘴板通过喷嘴91喷射液体而形成。 该装置是通过从喷嘴板50的一个表面50a将基板上的液体排出而制造的。在喷嘴板50的一个表面50a，喷嘴91的内表面和周围部分形成有疏液膜52 喷嘴板50的另一个表面50b上的喷嘴91的58。58版权所有（C）2003，JPO
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Patent Agency Ranking
公开(公告)号：JP2001105398A
公开(公告)日：2001-04-17
申请号：JP2000019948
申请日：2000-01-28
Applicant: SEIKO EPSON CORP
Inventor： USUI TAKAHIRO , UMETSU KAZUNARI , AMAKO ATSUSHI
IPC: B81C1/00 , B23K26/382 , C03C15/00 , G03F7/40
Abstract: PROBLEM TO BE SOLVED: To form fine holes in a substrate. SOLUTION: This processing method forms holes by recording an etching pattern (an area removed by etching) in a substrate, forming a prior machine hole inside the etching pattern, and executing the isotropic etching according to the etching pattern. In the case that the substrate is a photosensitive glass substrate 101, a latent image 105 is formed by disposing a photo mask 102 in a prescribed position on the photosensitive glass substrate 101 and irradiating ultraviolet rays 106. Next, the latent image 105 is crystallized by heating the photosensitive glass substrate 101. A prior machine hole 107 smaller than the latent image 105 is formed at the center of a portion formed with the latent image 105 by laser light. Next, the photosensitive glass substrate 101 is etched by hydrofluoric acid. The crystallized portion is selectively etched to form a hole 108.
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公开(公告)号：JP2000203028A
公开(公告)日：2000-07-25
申请号：JP292799
申请日：1999-01-08
Applicant: SEIKO EPSON CORP
Inventor： USUI TAKAHIRO
IPC: B41J2/135
Abstract: PROBLEM TO BE SOLVED: To produce the fine nozzle of an ink jet head. SOLUTION: An etching-resistant pattern 102 is formed on an n-type silicon substrate 101 having a direction of crystal plane of (110) at a predetermined position. Etching pits 103 are formed by the anisotripic etching of silicon and an electrode film 104 is formed on the rear surface of the silicon substrate 101. The silicon substrate is immersed in an electrolyte soln. and inverse bias is applied to the silicone substrate to etch the same. Etching advances to form etching grooves 105 and the electrode film is removed to form an etching- resistant film 106 to the inner surfaces of the etching grooves 105 of the silicon substrate 101. The rear surface of the silicon substrate 101 is ground to form through-holes and the rear surface of the silicon substrate is etched to form nozzles 107 having a projected shape.
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公开(公告)号：JPH10235872A
公开(公告)日：1998-09-08
申请号：JP4438497
申请日：1997-02-27
Applicant: SEIKO EPSON CORP
Inventor： HANDA TSUNEO , USUI TAKAHIRO , ISOBE YOSHIYUKI , FURUHATA ATSUSHI
IPC: B41J2/135
Abstract: PROBLEM TO BE SOLVED: To provide an ink jet printer head having water repellency and sliding- resistance. SOLUTION: An ink jet printer head ejects ink drops from a nozzle 11. A water repellent layer having a laminated structure of metallic layers 15, 13 each including a certain metal and a sulfur compound layer 14 including a certain sulfur compound is formed on a nozzle member 12 on which a roughness treatment face 16 having a predetermined surface roughness is formed on the surface at the ink ejection side. The water repellency and sliding-resistance of the nozzle face is improved by a shape of the roughness treatment face having roughness.
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公开(公告)号：JPH10235858A
公开(公告)日：1998-09-08
申请号：JP3958197
申请日：1997-02-24
Applicant: SEIKO EPSON CORP
Inventor： USUI TAKAHIRO
Abstract: PROBLEM TO BE SOLVED: To obtain ink repellent performance in an easy process, by forming a resist film on a gold film on a nozzle member, exposing and developing the resist film, etching the gold film, removing the resist film, etching the nozzle member using the gold film as a mask, and dipping the nozzle member in a solution in which sulfur compound is dissolved. SOLUTION: A gold film 502 is formed on an Si substrate 501 as a base of a nozzle member by vapor deposition or sputtering, etc., and a resist film 503 is formed on the gold film with the use of either one of a negative and a positive resists. The resist film 503 is exposed and developed, thereby forming a nozzle pattern 504. The gold film 502 is etched with the use of wet etching or the like, and the resist film 503 is removed. The Si substrate 501 is selectively etched by an etchant not damaging the gold film 502, whereby a nozzle 505 is formed. Thereafter, the Si substrate 501 is dipped in a solution in which sulfur compound is dissolved, and consequently the sulfur compound is adsorbed to the gold film 502, resulting in a sulfur compound 506.
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公开(公告)号：JPH09314833A
公开(公告)日：1997-12-09
申请号：JP13557996
申请日：1996-05-29
Applicant: SEIKO EPSON CORP
Inventor： SHIMODA TATSUYA , MIYASHITA SATORU , USUI TAKAHIRO
Abstract: PROBLEM TO BE SOLVED: To realize the driving of a high nozzle density ink-jet printer head without malfunction at low cost. SOLUTION: This ink jet printer head comprises a pressure chamber 6 having a diaphragm 4, onto which a piezoelectric element 1 deforming by electric signals is arrangingly bonded, and arrainging horizontally to a printing surface. The diaphragm is made of metal. Electrodes are provided on the surface, which is opposite to the diaphragm 3, of the piezoelectric element 1 under the condition that wiring electrodes 12 are made to go round to the edge face of driving boards 9, on each of which a thin film transistor element is formed and each driving board 9 is located normal to the piezoelectric element 1 so as to bring the wiring electrode 12 at the edge face of the driving board 9 into contact with the piezoelectric element electrode 2 of the piezoelectric element 1. Further, electric signals are supplied to the piezoelectric element 1 through each TFT 10.
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