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    11.
    发明专利
    未知

    公开(公告)号：FR2763745B1

    公开(公告)日：1999-08-27

    申请号：FR9706333

    申请日：1997-05-23

    Applicant: SEXTANT AVIONIQUE

    Inventor： LEFORT OLIVIER ,  THOMAS ISABELLE

    IPC: B81B3/00 ,  B81C1/00 ,  G01P15/08 ,  G01P15/125 ,  H01L49/00

    Abstract: A process for the production of microsensors machined in silicon, and in particular accelerometers for applications of assisting with navigation in aircraft, and pressure sensors. In order to improve the production of certain active parts of the sensor, and in particular of a beam forming a resonator, which needs to have well-controlled width and thickness characteristics, the following procedure is adopted. A beam having a thickness equal to the desired final thickness, and a width greater than the desired final width, is produced by micromachining the silicon on a first plate, the beam being covered on its upper face by a mask defining the desired final width. The plate is assembled with another plate. The two faces of the beam are oxidized in order to cover them with a thin protective layer. The thin protective layer on the upper face is removed, by vertical directional etching, without removing the mask already present. The silicon in the area exposed by the preceding operation is attacked by a vertical directional etch on the upper face, until the entire part of the beam not protected by the mask is eliminated, and the beam having the desired width is thus formed.

    13.
    发明专利
    未知

    公开(公告)号：DE69105447T2

    公开(公告)日：1995-07-13

    申请号：DE69105447

    申请日：1991-09-16

    Applicant: SEXTANT AVIONIQUE

    Inventor： THOMAS ISABELLE ,  LEFORT PIERRE OLIVIER

    IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/18

    Abstract: The invention relates to a micro-accelerometer with resonators which is sensitive to accelerations in a first direction, comprising, between two support plates, an etched interposed plate in order to comprise: a rectangular frame (10) whose sides extend along the first direction (x) and a second direction (y) perpendicular to the first, these directions being orthogonal to a third direction (z); a seismic mass (11) internal to the frame; two suspension bars (S1, S2) extending between the frame and the mass along the second direction, on either side of the mass, these bars having the same thickness as the mass and the frame along the third direction and a small width along the first direction; two resonator-forming elements (R1, R2) extending between the frame and the mass and having a small thickness along the third direction.

    14.
    发明专利
    未知

    公开(公告)号：DE69104430T2

    公开(公告)日：1995-05-24

    申请号：DE69104430

    申请日：1991-07-16

    Applicant: SEXTANT AVIONIQUE

    Inventor： THOMAS ISABELLE ,  LEFORT PIERRE OLIVIER

    IPC: G01L19/00 ,  G01L9/00 ,  H01L29/84

    Abstract: The present invention relates to a micro-pressure-sensor comprising, between two plates of insulating material: a lower silicon plate (3) forming a base plate; a middle silicon plate (2) constituting a membrane (11) surrounded by a frame (12), a first part (15) of a stud being formed in an off-centre location of the membrane; and an upper silicon plate (1) comprising a frame (17) corresponding to that of the middle plate, a second part (16) of the stud and a silicon leaf (18) constituting a resonator linking the top of the stud to an upper region of the frame. A measurement gap (13) is formed between the membrane and the lower plate, this gap comprising an access (14, 28), and the two insulating plates (4, 5) interacting with the periphery of the three silicon plates assembled so as to define a closed housing. … …

    15.
    发明专利
    未知

    公开(公告)号：DE69105447D1

    公开(公告)日：1995-01-12

    申请号：DE69105447

    申请日：1991-09-16

    Applicant: SEXTANT AVIONIQUE

    Inventor： THOMAS ISABELLE ,  LEFORT PIERRE OLIVIER

    IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/18

    Abstract: The invention relates to a micro-accelerometer with resonators which is sensitive to accelerations in a first direction, comprising, between two support plates, an etched interposed plate in order to comprise: a rectangular frame (10) whose sides extend along the first direction (x) and a second direction (y) perpendicular to the first, these directions being orthogonal to a third direction (z); a seismic mass (11) internal to the frame; two suspension bars (S1, S2) extending between the frame and the mass along the second direction, on either side of the mass, these bars having the same thickness as the mass and the frame along the third direction and a small width along the first direction; two resonator-forming elements (R1, R2) extending between the frame and the mass and having a small thickness along the third direction.

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