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公开(公告)号：JPS6347359A
公开(公告)日：1988-02-29
申请号：JP19063986
申请日：1986-08-15
Applicant: SONY CORP
Inventor： MATSUDA HIDEKI , IWASAKI HIROSHI , KANEKO MASAHIKO , ASO KOICHI
Abstract: PURPOSE:To obtain a titled thin spinel film having excellent crystallinity at a relatively low temp. by using an alloy target essentially consisting of Co and Fe and executing sputtering in an oxidation atmosphere. CONSTITUTION:The reactive sputtering is executed in the oxidation atmosphere by using the alloy target essentially consisting of Co and Fe, by which the thin cobalt-ferritic spinel film expressed by CoxFe3-xO (where 0.5
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公开(公告)号：JPS62104106A
公开(公告)日：1987-05-14
申请号：JP24456585
申请日：1985-10-31
Applicant: SONY CORP
Inventor： ISHIKAWA OSAMU , HAYASHI KAZUHIKO , HAYAKAWA MASATOSHI , OCHIAI YOSHITAKA , MATSUDA HIDEKI , IWASAKI HIROSHI , ASO KOICHI
Abstract: PURPOSE:To compose a soft magnetic thin film having high saturation magnetic flux density Bs, small coersive force Hc, high permeability mu, and especially superior abrasion property by specifying the composition of the soft magnetic thin film formed of an Fe(-Co)-Al-Ge alloy added with Cr. CONSTITUTION:This soft magnetic thin film is of the composition represented by a formula, FeaCo6AlcGedCre (wherein a, b, c, d and e show atomic % of the respective composition ratio) and their composition ranges are the values expressed by inequalities, 68
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公开(公告)号：JPS6289311A
公开(公告)日：1987-04-23
申请号：JP23046785
申请日：1985-10-16
Applicant: SONY CORP
Inventor： HAYASHI KAZUHIKO , HAYAKAWA MASATOSHI , ISHIKAWA OSAMU , OCHIAI YOSHITAKA , MATSUDA HIDEKI , IWASAKI HIROSHI , ASO KOICHI
Abstract: PURPOSE:To obtain the titled soft magnetic thin film having a high permeability, an excellent corrosion-resisting property, an excellent abrasion-resisting property of high degree of hardness and thermal stability without lowering the density of saturated magnetic flux and also without increasing magnetic coercive force by a method wherein nitrogen N is added to the magnetic thin film having Fe, Al and Ge as the main components, and the composition of component of the magnetic thin film is specified. CONSTITUTION:The composition of the titled soft magnetic thin film is indicated by the formula of FeaAlbGecNx (provided that the compositional ratio of a, b, c and x is indicated by atom%), each compositional range is 55
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公开(公告)号：JPS6129105A
公开(公告)日：1986-02-10
申请号：JP15042984
申请日：1984-07-19
Applicant: Sony Corp
Inventor： HAYAKAWA MASATOSHI , ASO KOICHI , OCHIAI YOSHITAKA , MATSUDA HIDEKI , HAYASHI KAZUHIKO , ISHIKAWA OSAMU , IWASAKI HIROSHI
CPC classification number: B82Y25/00 , G11B5/31 , H01F10/142 , H01F10/32 , Y10S428/928 , Y10T428/115 , Y10T428/12465 , Y10T428/12597 , Y10T428/12931 , Y10T428/12937 , Y10T428/12944 , Y10T428/12951 , Y10T428/12958
Abstract: PURPOSE:To enhance saturated magnetic flux density and magnetic permeability by directly laminating the Fe-Si alloy thin film of high saturated magnetic flux density on a Fe-Al-Si or Fe-Ni alloy thin film having high magnetic permeability. CONSTITUTION:A Fe-Al-Si alloy is accumulated in the thickness of 4mum by a high frequency sputtering method on a substrate made of crystallized glass optically polished on the surface. A Si-Fe alloy is accumulated in the thickness of 1mum by a sputtering method on the alloy. The laminated magnetic alloy thin film is annealed at 500 deg. in vacuum for 1hr. Thus, a magnetic alloy thin film which has not only high saturated magnetic flux density but high magnetic permeability can be obtained. Accordingly, when the thin film is used as a core material of a magnetic head, recording and reproducing characteristics can be largely improved.
Abstract translation: 目的：通过在高磁导率的Fe-Al-Si或Fe-Ni合金薄膜上直接层叠高饱和磁通密度的Fe-Si合金薄膜，提高饱和磁通密度和磁导率。 构成：通过高频溅射法在由表面光学抛光的结晶玻璃制成的基板上堆积4μm厚的Fe-Al-Si合金。 通过合金上的溅射法将Si-Fe合金以1um的厚度累积。 层叠磁性合金薄膜在500度退火。 在真空中1小时。 因此，可以获得不仅具有高的饱和磁通密度但是磁导率高的磁性合金薄膜。 因此，当使用薄膜作为磁头的芯材时，可以大大提高记录和再现特性。
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公开(公告)号：JPH0140410B2
公开(公告)日：1989-08-29
申请号：JP8443080
申请日：1980-06-20
Applicant: SONY CORP
Inventor： MATSUDA HIDEKI , YAMADA TOSHIRO
IPC: G11B11/10 , G11B11/105
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Patent Agency Ranking
公开(公告)号：JPS63146417A
公开(公告)日：1988-06-18
申请号：JP18231686
申请日：1986-08-02
Applicant: SONY CORP
Inventor： ISHIKAWA OSAMU , HAYASHI KAZUHIKO , HAYAKAWA MASATOSHI , OCHIAI YOSHITAKA , MATSUDA HIDEKI , IWASAKI HIROSHI , ASO KOICHI
Abstract: PURPOSE:To obtain a soft magnetic thin film having excellent wear resistance by adding at least one type of elements to be added of Ti, Cr, Mn, Zr and Nb to alloy made of Fe, Ga and Si, and setting the composition ratio to a predetermined value. CONSTITUTION:A soft magnetic thin film is represented by a composition formula of FeaCobGacSidMe (where a, b, c, d and e are atomic % of components, M is at least one of Ti, Cr, Mn, Zr, Nb, Mo, Ta, W, Ru, Os, Ir, Re, Ni, Pd, Pt and Hf.) The composition range satisfies the relationships of 68
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公开(公告)号：JPS6347908A
公开(公告)日：1988-02-29
申请号：JP19192386
申请日：1986-08-16
Applicant: SONY CORP
Inventor： MATSUDA HIDEKI , IWASAKI HIROSHI , KANEKO MASAHIKO , ASO KOICHI
Abstract: PURPOSE:To provide a nickel ferrite-system spinel thin film which has a good crystallizability and is capable of fast growing on a low-temperature substrate. CONSTITUTION:The nickel ferrite-system spinel thin film of the present invention is a spinel thin film the composition of which is expressed by a general formula NixFe3-xO4 (where 0.9
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公开(公告)号：JPS633406A
公开(公告)日：1988-01-08
申请号：JP14622686
申请日：1986-06-24
Applicant: SONY CORP
Inventor： ISHIKAWA OSAMU , HAYASHI KAZUHIKO , HAYAKAWA MASATOSHI , OCHIAI YOSHITAKA , MATSUDA HIDEKI , IWASAKI HIROSHI , ASO KOICHI
Abstract: PURPOSE:To improve the abrasion-resisting property of the title magnetically soft thin film by a method wherein Ti or the like is added to the alloy consisting of Fe, Al and Ge as a component element of the magnetically soft thin film. CONSTITUTION:First, the additive elements such as electrolytic iron, electrolytic cobalt, aluminum, germanium, Ti, Zr, Nb, Ta and the like are weighed in such a manner that the prescribed compositional ratio is obtained for them. After they have been dissolved in an argon atmosphere using a high frequency induction heating furnace, the alloy target for sputtering is formed by performing a machine work. Then, using said target, a thin film is formed on a glass substrate using a planar magnetron type RF sputtering device. The substrate formed as above-mentioned is vacuum-annealed at 50O deg.C for one hour, and the magnetically soft thin film indicated by the formula FeaCobAlcGedMe is obtained. The range of composition of the thin film is 68
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公开(公告)号：JPS62204505A
公开(公告)日：1987-09-09
申请号：JP4777486
申请日：1986-03-05
Applicant: SONY CORP
Inventor： IWASAKI HIROSHI , MATSUDA HIDEKI , KANEKO MASAHIKO , ASO KOICHI
Abstract: PURPOSE:To provide an oxide magnetic thin film which can be simply controlled in its crystal orientation with excellent crystal orientation property by forming a wustite phase thin film and a spinel phase ferrite thin film formed on the wustite phase film. CONSTITUTION:After a wustite phase thin film of predetermined orientation is grown under a suitable sputtering condition, the condition is altered to grown a spinel phase ferrite thin film. The coating method of the thin films employs, in addition to a sputtering method, various vacuum thin film forming technique. Of them, a reactive sputtering is preferable. That is, according to the reactive sputtering, when the mixture ratio of gases is varied, various magnetic thin films having different compositions and crystal orientations are formed, and the wustite phase thin film, spinel phase ferrite thin film or amorphous phase thin film is formed by changing an applying power, Ar gas pressure, gas flow rate, oxygen ratio, substrate temperature and bias voltage.
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公开(公告)号：JPS6289310A
公开(公告)日：1987-04-23
申请号：JP23046685
申请日：1985-10-16
Applicant: SONY CORP
Inventor： HAYAKAWA MASATOSHI , HAYASHI KAZUHIKO , ISHIKAWA OSAMU , OCHIAI YOSHITAKA , MATSUDA HIDEKI , IWASAKI HIROSHI , ASO KOICHI
Abstract: PURPOSE:To obtain the titled soft magnetic thin film having a high permeability, an excellent corrosion-resisting property, an excellent abrasion-resisting property of high degree of hardness, and thermal stability without lowering the density of saturated magnetic flux and also without increasing coercive force by a method wherein nitrogen N is added to the magnetic thin film having Fe, Co, Si and Al as the main components, and the composition of the component of the magnetic thin film is specified. CONSTITUTION:A magnetic thin film is composed of Fe, Co, Si and Al as the main component, the magnetic thin film is composed of Co of 0.5-15atom%, Si of 9-17atom%, Al of 7-15atom%, N of 0.01-10atom% and the remainder of Fe, and excellent serviceability is given to the magnetic thin film. If the content of nitrogen N is 0.01atom% or less, it is considered insufficient, and if said content exceeds 10atom%, the permeability of the magnetic thin film is decreased on the contrary, and magnetic coercive force Hc is made larger. It is desirable that the magnetically soft thin film is manufactured by performing a vapor deposition method, an ion-implanting method and the like. Also, pertaining to the introducing method of nitrogen N into the magnetic thin film, there are the method in which vapor deposition and the like is performed in the atmosphere containing nitrogen gas and the nitrogen N introducing method using the compound consisting of nitrogen N and at least a kind of element selected from the above-mentioned material and the alloy of the remaining component as the source of evaporation.
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