公开(公告)号：EP3808199A1

公开(公告)日：2021-04-21

申请号：EP20201170.6

申请日：2020-10-09

Applicant: STMicroelectronics S.r.l.

Inventor： DUQI, Enri ,  CERINI, Fabrizio ,  BALDO, Lorenzo

IPC: A24F47/00 ,  G01L1/16 ,  G01L9/00 ,  G01L23/10 ,  H01L41/113 ,  G01L9/08 ,  A61B5/00 ,  B81B7/00 ,  A24F40/51 ,  A61M11/04 ,  A61M15/06

Abstract: A MEMS switch (100), actuatable by a fluid, wherein a piezoelectric pressure sensor (130) detects the movement of a fluid generating a negative pressure. The piezoelectric pressure sensor (130) is formed by a chip (139) of semiconductor material having a through cavity (140) and a sensitive membrane (142), which extends over the through cavity (140) and has a first and a second surface (142A, 142B). The piezoelectric pressure sensor (130) is mounted on a face of a board (118) having a through hole (144) so that the through cavity (140) overlies and is in fluid connection with the through hole (144). The board (118) has a fixing structure (133, 134), which enables securing in an opening (136) of a partition wall (107) separating a first and a second space (126, 117) from each other. The board (118) is arranged so that the first surface (142A) of the sensitive membrane (142) faces the first space (126), and the second surface (142B) of the sensitive membrane (142) faces the second space (117).