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    MICROELECTROMECHANICAL GYROSCOPE WITH COMPENSATION OF QUADRATURE ERROR DRIFT
    11.
    发明申请
    MICROELECTROMECHANICAL GYROSCOPE WITH COMPENSATION OF QUADRATURE ERROR DRIFT 有权
    具有补偿误差的微电子陀螺仪

    公开(公告)号：US20150114112A1

    公开(公告)日：2015-04-30

    申请号：US14067051

    申请日：2013-10-30

    Applicant: STMicroelectronics S.r.l

    Inventor： Carlo Valzasina ,  Luca Giuseppe Falorni

    IPC: G01C19/5712

    CPC classification number: G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

    Abstract: A microelectromechanical gyroscope, includes: a supporting body; a first movable mass and a second movable mass, which are oscillatable according to a first driving axis and tiltable about respective a first and second sensing axes and are symmetrically arranged with respect to a center of symmetry; first sensing electrodes and a second sensing electrodes associated with the first and second movable masses and arranged on the supporting body symmetrically with respect to the first and second sensing axis, the first and second movable masses being capacitively coupled to the respective first sensing electrode and to the respective second sensing electrode, a bridge element elastically coupled to respective inner ends of the first movable mass and of the second movable mass and coupled to the supporting body so as to be tiltable about an axis transverse to the first driving axis.

    Abstract translation: 一种微机电陀螺仪，包括：支撑体; 第一可移动质量块和第二可移动质量块，它们可根据第一驱动轴线振荡并围绕相应的第一和第二感测轴线可倾斜，并且相对于对称中心对称布置; 第一感测电极和与第一和第二可移动质量相关联并且相对于第一和第二感测轴对称地布置在支撑体上的第二感测电极，第一和第二可移动质量体电容耦合到相应的第一感测电极，并且 相应的第二感测电极，桥接元件，其弹性地联接到第一可移动质量块的相应内端和第二可移动质量块，并且联接到支撑体，以便能够围绕横向于第一驱动轴线的轴线倾斜。

    MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof
    13.
    发明授权
    MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof 有权

    公开(公告)号：US11340069B2

    公开(公告)日：2022-05-24

    申请号：US16898339

    申请日：2020-06-10

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Luca Guerinoni ,  Luca Giuseppe Falorni ,  Matteo Fabio Brunetto

    IPC: G01C19/5712 ,  G01C19/5755 ,  G01C19/574 ,  B81B3/00

    Abstract: The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements. The first and second values of the sensing signal are subtracted from each other and compared with a stored difference value to supply information of variation of the scale factor.

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