公开(公告)号：EP1715580B1

公开(公告)日：2018-11-28

申请号：EP05425185.5

申请日：2005-03-31

Applicant: STMicroelectronics Srl

Inventor： Prandi, Luciano ,  Lasalandra, Ernesto ,  Ungaretti, Tommaso

IPC: H03H9/02

CPC classification number: H03H9/02409 ,  G01C19/5726 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0814 ,  H03H2009/02496

Abstract: A device for controlling the frequency of resonance of an oscillating micro-electromechanical system includes: a microstructure (2), having a first body (10) and a second body (11), which is capacitively coupled to the first body (10) and elastically oscillatable with respect thereto at a calibratable frequency of resonance (É R ) a relative displacement (”Y) between the second body (11) and the first body (10) being detectable from outside; and an amplifier (21) associated to the microstructure (2) for detecting the relative displacement (”Y). DC decoupling elements (23) are arranged between the amplifier (21) and the microstructure (2).

公开(公告)号：EP2360448B1

公开(公告)日：2015-08-26

申请号：EP11154596.8

申请日：2011-02-15

Applicant: STMicroelectronics Srl

Inventor： Prandi, Luciano ,  Caminada, Carlo ,  Rizzo Piazza Roncoroni, Alessandra Maria

IPC: G01C19/56 ,  G01C19/5762 ,  G01C19/5726

CPC classification number: G01C19/56 ,  G01C19/5726 ,  G01C19/5762

公开(公告)号：EP2336717A1

公开(公告)日：2011-06-22

申请号：EP10195871.8

申请日：2010-12-20

Applicant: STMicroelectronics Srl

Inventor： Rizzo Piazza Roncoroni, Alessandra Maria ,  Caminada, Carlo ,  Prandi, Luciano

IPC: G01C19/56 ,  H03L3/00 ,  H03L7/099

CPC classification number: H03B5/30 ,  G01C19/56 ,  H03L3/00

Abstract: A microelectromechanical device includes a body (2a), a movable mass (2b), elastically connected to the body (6; 106) and movable in accordance with a degree of freedom, and a driving device (6), coupled to the movable mass (2b) and configured to maintain the movable mass (2b) in oscillation at a steady working frequency ( ω D ) in a normal operating mode. The microelectromechanical device moreover includes a start-up device (7, 8, 10), which is activatable in a start-up operating mode and is configured to compare a current oscillation frequency ( ω A ) of a first signal (CK A ) correlated to oscillation of the movable mass (2b) with a reference frequency ( ω R ), and for deciding, on the basis of the comparison between the current oscillation frequency ( ω A ) and the reference frequency ( ω R ), whether to supply to the movable mass (2b) a forcing signal packet (V F ) so as to transfer energy to the movable mass (2b).

Abstract translation: 一种微机电装置，包括本体（2a）中，可动质量块（2b）弹性地连接到所述主体（6; 106）和可移动的雅舞蹈的自由度，以及驱动装置（6）联接到所述可移动质量 （2b）和配置成用于维持振荡运动质量块（2b）的在正常操作模式中的稳定工作频率（E D）。 所述微机电装置更上方包括启动装置（7,8，10），所有这些是在起动操作模式激活，并且被配置来比较相关联的当前振荡频率的第一信号的（E A）（CK A） 到可动质量块（2b）与参考频率（E R）的振荡，并且用于决定，在当前振荡频率（E A）和参考频率（E R）是否提供给之间的比较的基础上 运动质量块（2b）的一个加力信号包（V F），从而能转移到可动质量块（2b）。

公开(公告)号：EP1959562B1

公开(公告)日：2010-12-08

申请号：EP07425081.2

申请日：2007-02-15

Applicant: STMicroelectronics Srl

Inventor： Prandi, Luciano ,  Caminada, Carlo ,  Invernizzi, Paolo

IPC: H03D1/22

CPC classification number: H03D1/22 ,  Y10T74/1218

公开(公告)号：EP2023082B1

公开(公告)日：2010-09-08

申请号：EP07425417.8

申请日：2007-07-05

Applicant: STMicroelectronics Srl

Inventor： Prandi, Luciano ,  Caminada, Carlo

IPC: G01C19/56

CPC classification number: G01C19/5762 ,  G01C19/5726