Abstract:
A device for controlling the frequency of resonance of an oscillating micro-electromechanical system includes: a microstructure (2), having a first body (10) and a second body (11), which is capacitively coupled to the first body (10) and elastically oscillatable with respect thereto at a calibratable frequency of resonance (É R ) a relative displacement (”Y) between the second body (11) and the first body (10) being detectable from outside; and an amplifier (21) associated to the microstructure (2) for detecting the relative displacement (”Y). DC decoupling elements (23) are arranged between the amplifier (21) and the microstructure (2).