HELMHOLTZ COIL ASSISTED PECVD CARBON SOURCE
    11.
    发明申请
    HELMHOLTZ COIL ASSISTED PECVD CARBON SOURCE 审中-公开
    HELMHOLTZ线圈辅助PECVD碳源

    公开(公告)号:US20160035546A1

    公开(公告)日:2016-02-04

    申请号:US14448639

    申请日:2014-07-31

    Abstract: The embodiments disclose an apparatus including at least two carbon source deposition tools for emitting electrons, at least two reflective polarity rear button permanent magnets integrated into the carbon source deposition tools for reflecting emitted electrons, and at least two paired polarity Helmholtz coils integrated into the carbon source deposition tools for forming uniform parallel magnetic field lines for confining the emitted electrons to uniformly deposit carbon onto the surfaces of a two-sided media disk.

    Abstract translation: 实施例公开了一种装置,其包括用于发射电子的至少两个碳源沉积工具,集成到用于反射发射电子的碳源沉积工具中的至少两个反射极性后按钮永磁体,以及集成到碳中的至少两个成对极性的亥姆霍兹线圈 源沉积工具,用于形成均匀的平行磁场线,用于限制发射的电子均匀地将碳均匀地沉积在双面介质盘的表面上。

    Granularity in overlying magnetic and non-magnetic layers

    公开(公告)号:US10373637B2

    公开(公告)日:2019-08-06

    申请号:US15448514

    申请日:2017-03-02

    Abstract: Provided herein is an apparatus including a layer stack. A first granular metal layer overlies the layer stack, wherein the first granular metal layer includes first metal grains separated by voids. A first granular non-metal layer overlies the first granular metal layer, wherein the first granular non-metal layer includes first non-metal grains separated by a first segregant. A second granular non-metal layer overlies the first granular non-metal layer, wherein the second granular non-metal layer includes second non-metal grains separated by a second segregant. A second granular metal layer overlies the second granular non-metal layer, wherein the second granular metal layer includes second metal grains separated by a third segregant.

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