公开(公告)号：JPS60262431A

公开(公告)日：1985-12-25

申请号：JP11819884

申请日：1984-06-11

Applicant: TOSHIBA KK

Inventor： NEMOTO TOSHIYA ,  YAMAGUCHI MASAYOSHI ,  KASHIMA NORIYASU ,  WATANABE TAKAO

IPC: H01L21/52 ,  H01L21/58 ,  H01L21/60

Abstract: PURPOSE:To prevent the deterioration of a belt by heat, by applying a heat-insulating member on a portion approaching the belt at a position to which a heating device is elevated. CONSTITUTION:When a carrier 3 conveyed by belts 1 and 2 gets to the position of wire bonding and stops thereat, the main body 13 of a block is elevated together with a heater block 16 and fixed under pressure on a plate 9, and heating is conducted. Although the lateral sides of the main body 13 of the block approach the belts 1 and 2 at a position to which the main body is elevated, the temperature of side plates 15 is intercepted by heat-insulating members 14 and thus much lower than that of conventional ones. Therefore the belts are not so much heated as to be deteriorated, and consequently a system of high productivity can be obtained.

公开(公告)号：JPS603717A

公开(公告)日：1985-01-10

申请号：JP11137883

申请日：1983-06-21

Applicant: TOSHIBA KK

Inventor： KANEDA KATSUHIKO ,  YAMAGUCHI MASAYOSHI ,  KASHIMA NORIYASU ,  SUEMATSU MUTSUMI

IPC: G05D3/00 ,  G05D3/12

Abstract: PURPOSE:To control smoothly and accurately a linear motor mechanism through a detecting part without interference due to the oscillation generated from a linear mechanism, by providing a supporting mechanism, which supports the front end side of a detecting part attaching body movably, for the detecting part attaching body. CONSTITUTION:When a table 1 is driven by a driving device to generate a magnetic flux in a moving coil 4, the coil 4 is moved forward or backward by repulsion or attraction due to the magnetic flux between the coil 4 and a magnetic circuit part 3 to drive the table 1 at a high speed. In case of high-speed driving, an oscillation is generated in the coil 4 and is transmitted to an attaching plate 5, and the front end part of the attaching plate 5 tries to oscillate; but the attaching plate 5 is not oscillated because the attaching plate 5 is supported in the side of the table 1 and from both sides by roller bearings 9 and 9, and consequently, the oscillation in a detecting part 6 important for detection is prevented.