METHOD FOR NANO-DRIPPING 1D, 2D OR 3D STRUCTURES ON A SUBSTRATE
    11.
    发明公开
    METHOD FOR NANO-DRIPPING 1D, 2D OR 3D STRUCTURES ON A SUBSTRATE 审中-公开
    PROCEDURE纳米一滴1D,2D或3D结构上的衬底

    公开(公告)号:EP2723674A1

    公开(公告)日:2014-04-30

    申请号:EP12730391.5

    申请日:2012-06-25

    Applicant: ETH Zürich

    CPC classification number: B81C99/00 B81C99/0095 B81C2201/0184

    Abstract: A method for the production of nano- or microscaled ID, 2D and/or 3D depositions from an solution (6), by means of a liquid reservoir (2) for holding the ink with an outer diameter (3,D) of at least 50 nm, is proposed, wherein there is provided an electrode (7,8 or 9) in contact with said ink (6) in said capillary (2), and wherein there is a counter electrode in and/or on and/or below and/or above a substrate (15) onto which the depositions are to be produced, including the steps of: i) keeping the electrode (7, 8, 9) and the counter electrode (15, 18) on an essentially equal potential; ii) establishing a potential difference between the electrode (7, 8, 9) and the counter electrode (15, 18) leading to the growth of an ink meniscus (1) at the nozzle (3) and to the ejection of droplets (13) at this meniscus with a homogeneous size smaller than the meniscus size (11) at a homogenous ejection frequency; keeping the voltage applied while the continuously dried droplets leave behind the dispersed material which leads a structure to emerge with essentially the same diameter as a single droplet, wherein the distance between the substrate (1) and the nozzle (3) is smaller than or equal to 20 times the meniscus diameter at least at the moment of nano-droplet ejection (12); wherein the conductivity of the ink (6) is high enough to stabilize the liquid meniscus during droplet ejection;

    MICROELECTROMECHANICAL DEVICE AND METHOD FOR MANUFACTURING IT

    公开(公告)号:US20180230002A1

    公开(公告)日:2018-08-16

    申请号:US15954128

    申请日:2018-04-16

    Abstract: A device and method utilizes interconnecting layers separated by an insulating layer. A layered structure comprises a first and a second layer of electrically conductive material, and a third layer of electrically insulating material between them. A via trench is fabricated that extends from the second layer through the third layer into the first layer, a surface on the first layer of electrically conductive material forming a bottom surface of the via trench. An ink-jetting set-up for a mixture of liquid carrier and nanoparticles of conductive material is formed, and a specific process period is determined. Capillary flow of nanoparticles to peripheral edges of an ink-jetted blob of said mixture is induced. The mixture is ink-jetted into a blob on the via trench; the layered structure is heated to evaporate the liquid carrier. The interconnection element is higher at a certain point than between opposing side walls.

    System and method of manufacturing an electromechanical device by printing raised conductive contours
    13.
    发明授权
    System and method of manufacturing an electromechanical device by printing raised conductive contours 有权
    通过印刷凸起的导电轮廓来制造机电装置的系统和方法

    公开(公告)号:US09090456B2

    公开(公告)日:2015-07-28

    申请号:US12619521

    申请日:2009-11-16

    Inventor: Nassim Khonsari

    Abstract: A system and method for manufacturing a display device having an electrically connected front plate and back plate are disclosed. In one embodiment, the method comprises printing conductive raised contours onto a non-conductive back plate, aligning the back plate with a non-conductive front plate such that the raised contours align with conductive routings on the front plate to electrically connect the raised contours and the routings, and sealing the back plate and the front plate.

    Abstract translation: 公开了一种用于制造具有电连接的前板和背板的显示装置的系统和方法。 在一个实施例中,该方法包括将导电凸起轮廓印刷到非导电背板上,将该背板与不导电的前板对准,使得凸起轮廓与前板上的导电路线对准以电连接凸起轮廓和 路由,并密封后板和前板。

    METHOD FOR NANO-DRIPPING 1D, 2D OR 3D STRUCTURES ON A SUBSTRATE
    14.
    发明申请
    METHOD FOR NANO-DRIPPING 1D, 2D OR 3D STRUCTURES ON A SUBSTRATE 审中-公开
    用于在基板上划分1D,2D或3D结构的方法

    公开(公告)号:US20140205761A1

    公开(公告)日:2014-07-24

    申请号:US14129480

    申请日:2012-06-25

    CPC classification number: B81C99/00 B81C99/0095 B81C2201/0184

    Abstract: A method for the production of nano- or microscaled ID, 2D and/or 3D depositions from an solution (6), by means of a liquid reservoir (2) for holding the ink with an outer diameter (3,D) of at least 50 nm, is proposed, wherein there is provided an electrode (7,8 or 9) in contact with said ink (6) in said capillary (2), and wherein there is a counter electrode in and/or on and/or below and/or above a substrate (15) onto which the depositions are to be produced, including the steps of: i) keeping the electrode (7, 8, 9) and the counter electrode (15, 18) on an essentially equal potential; ii) establishing a potential difference between the electrode (7, 8, 9) and the counter electrode (15, 18) leading to the growth of an ink meniscus (1) at the nozzle (3) and to the ejection of droplets (13) at this meniscus with a homogeneous size smaller than the meniscus size (11) at a homogenous ejection frequency; keeping the voltage applied while the continuously dried droplets leave behind the dispersed material which leads a structure to emerge with essentially the same diameter as a single droplet, wherein the distance between the substrate (1) and the nozzle (3) is smaller than or equal to 20 times the meniscus diameter at least at the moment of nano-droplet ejection (12); wherein the conductivity of the ink (6) is high enough to stabilize the liquid meniscus during droplet ejection;

    Abstract translation: 一种用于通过液体储存器(2)从溶液(6)生产纳米或微观ID,2D和/或3D沉积物的方法,用于将油墨保持至少至少具有外径(3,D) 50nm,其中提供了与所述毛细管(2)中的所述油墨(6)接触的电极(7,8或9),并且其中在和/或之上和/或下方存在对电极 和/或在其上要生成沉积物的衬底(15)上方,包括以下步骤:i)保持电极(7,8,9)和对电极(15,18)的电位基本相等; ii)建立电极(7,8,9)和相对电极(15,18)之间的电位差,导致在喷嘴(3)处生成墨水弯液面(1)和喷射液滴(13) )在均匀喷射频率下具有小于弯月面尺寸(11)的均匀尺寸的弯月面; 保持施加的电压,而连续干燥的液滴留下分散的材料,导致结构以与单个液滴基本相同的直径出现,其中基板(1)和喷嘴(3)之间的距离小于或等于 至少在纳米液滴喷射时(12)的弯液面直径的20倍; 其中所述油墨(6)的电导率足够高以在液滴喷射期间稳定所述液体弯液面;

    MICROELECTROMECHANICAL DEVICE AND METHOD FOR MANUFACTURING IT
    17.
    发明公开
    MICROELECTROMECHANICAL DEVICE AND METHOD FOR MANUFACTURING IT 审中-公开
    微电子机械装置和制造IT的方法

    公开(公告)号:EP3181514A1

    公开(公告)日:2017-06-21

    申请号:EP16203433.4

    申请日:2016-12-12

    Abstract: An optimized method of interconnecting layers separated by an insulating layer, and a device by the method. A solid layered structure comprises a first and a second layer of electrically conductive material, and a third layer of electrically insulating material between them. The method includes fabricating a via trench that extends from a surface of the second layer through the third layer into the first layer, a surface on the first layer of electrically conductive material forming a bottom surface of the via trench. An ink-jetting set-up for a mixture of liquid carrier and nanoparticles of conductive material is formed, and for this setup, a specific process period is determined. During said process period, capillary flow of nanoparticles to peripheral edges of an ink-jetted blob of said mixture is induced. Droplets of the mixture are ink-jetted within said period into a blob on the bottom surface of the via trench, and the layered solid structure is heat treated to evaporate the liquid carrier of the mixture. The resulting conductive interconnection element does not cover the via trench but is substantially higher at a side wall of the via trench, or within an undercut formed into the third layer, than at a point between the side wall and a side wall opposite to it

    Abstract translation: 优化的由绝缘层分隔的层的互连方法以及通过该方法的装置。 固体分层结构包括第一和第二层导电材料以及它们之间的第三层电绝缘材料。 该方法包括制造从第二层的表面穿过第三层延伸到第一层中的通路沟槽,第一导电材料层上的表面形成通路沟槽的底表面。 形成用于液体载体和导电材料的纳米颗粒的混合物的喷墨装置,并且对于该设置,确定特定的工艺周期。 在所述过程期间,诱导纳米颗粒到所述混合物的喷墨斑点的外围边缘的毛细管流动。 混合物的小滴在所述时间段内被喷墨成通路沟槽的底表面上的斑点,并且热处理层状固体结构以蒸发混合物的液体载体。 所得到的导电互连元件不覆盖通路沟槽,但是在通路沟槽的侧壁处或者在形成到第三层中的底切部分内比在侧壁和与其相对的侧壁之间的点处高得多

    Microelectromechanical device and method for manufacturing it

    公开(公告)号:US09969607B2

    公开(公告)日:2018-05-15

    申请号:US15372660

    申请日:2016-12-08

    Abstract: A device and method utilizes interconnecting layers separated by an insulating layer. A layered structure comprises a first and a second layer of electrically conductive material, and a third layer of electrically insulating material between them. A via trench is fabricated that extends from the second layer through the third layer into the first layer, a surface on the first layer of electrically conductive material forming a bottom surface of the via trench. An ink-jetting set-up for a mixture of liquid carrier and nanoparticles of conductive material is formed, and a specific process period is determined. Capillary flow of nanoparticles to peripheral edges of an ink-jetted blob of said mixture is induced. The mixture is ink-jetted into a blob on the via trench; the layered structure is heated to evaporate the liquid carrier. The interconnection element is higher at a certain point than between opposing side walls.

    MICROELECTROMECHANICAL DEVICE AND METHOD FOR MANUFACTURING IT

    公开(公告)号:US20170166440A1

    公开(公告)日:2017-06-15

    申请号:US15372660

    申请日:2016-12-08

    Abstract: A device and method utilizes interconnecting layers separated by an insulating layer. A layered structure comprises a first and a second layer of electrically conductive material, and a third layer of electrically insulating material between them. A via trench is fabricated that extends from the second layer through the third layer into the first layer, a surface on the first layer of electrically conductive material forming a bottom surface of the via trench. An ink-jetting set-up for a mixture of liquid carrier and nanoparticles of conductive material is formed, and a specific process period is determined. Capillary flow of nanoparticles to peripheral edges of an ink-jetted blob of said mixture is induced. The mixture is ink-jetted into a blob on the via trench; the layered structure is heated to evaporate the liquid carrier. The interconnection element is higher at a certain point than between opposing side walls.

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