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公开(公告)号：US20180180487A1
公开(公告)日：2018-06-28
申请号：US15905658
申请日：2018-02-26
Applicant: Cymer, LLC
Inventor： Thomas Frederick Allen Bibby , Joshua Jon Thornes , Rostislav Rokitski , Thomas Patrick Duffey
CPC classification number: G01J9/00 , G01J1/4257 , G01J2009/006 , G02B5/005 , G02B26/0825 , G02B27/0988 , G03F7/70058 , G03F7/70583
Abstract: Techniques for controlling an optical system include accessing a measured value of a property of a particular pulse of a pulsed light beam emitted from the optical system, the property being related to an amount of coherence of the light beam; comparing the measured value of the property of the light beam to a target value of the property; determining whether to generate a control signal based on the comparison; and if a control signal is generated based on the comparison, adjusting the amount of coherence in the light beam by modifying an aspect of the optical system based on the control signal to reduce an amount of coherence of a pulse that is subsequent to the particular pulse.
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公开(公告)号：US09945730B2
公开(公告)日：2018-04-17
申请号：US15256196
申请日：2016-09-02
Applicant: Cymer, LLC
Inventor： Thomas Frederick Allen Bibby , Joshua Jon Thornes , Rostislav Rokitski , Thomas Patrick Duffey
CPC classification number: G01J9/00 , G01J1/4257 , G01J2009/006 , G02B5/005 , G02B26/0825 , G02B27/0988 , G03F7/70058 , G03F7/70583
Abstract: Techniques for controlling an optical system include accessing a measured value of a property of a particular pulse of a pulsed light beam emitted from the optical system, the property being related to an amount of coherence of the light beam; comparing the measured value of the property of the light beam to a target value of the property; determining whether to generate a control signal based on the comparison; and if a control signal is generated based on the comparison, adjusting the amount of coherence in the light beam by modifying an aspect of the optical system based on the control signal to reduce an amount of coherence of a pulse that is subsequent to the particular pulse.
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公开(公告)号：US09207119B2
公开(公告)日：2015-12-08
申请号：US13830466
申请日：2013-03-14
Applicant: Cymer, LLC
Inventor： Rostislav Rokitski , Nakgeuon Seong , Kevin O'Brien
CPC classification number: G01J3/28 , G01J3/027 , G01J3/1809 , G01J11/00 , G01J2001/4238 , G01J2009/006 , G03F7/70091 , G03F7/70575 , G03F7/7085
Abstract: A spectral feature of a pulsed light beam produced by an optical source is estimated by modifying the wavelength of the pulsed light beam based on a predefined repeating pattern having a pattern period including a plurality of steps, the modification including shifting the wavelength of the pulsed light beam by a wavelength offset from a baseline wavelength for each step in the pattern period; measuring the wavelength of the light beam for each step in the pattern period as the wavelength is modified across the pattern; and estimating a spectral feature of the pulsed light beam over an evaluation window that includes all of the steps within the pattern period based at least in part on the measured wavelength of the light beam for each step in the pattern period.
Abstract translation: 由光源产生的脉冲光束的光谱特征通过基于具有包括多个步骤的图案周期的预定重复图案修改脉冲光束的波长来估计，该修改包括移动脉冲光的波长 在图案周期中对于每个步骤的基线波长的波长偏移; 在图案周期中测量每个步骤的光束的波长，当波长跨越图案被修改时; 以及至少部分地基于所述模式周期中的每个步骤的所述光束的波长来估计包括所述模式周期内的所有步骤的评估窗口上的所述脉冲光束的光谱特征。
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14.发明授权Device and method for detecting the phase and amplitude of electromagnetic waves 有权用于检测电磁波的相位和幅度的装置和方法公开(公告)号：US06777659B1
公开(公告)日：2004-08-17
申请号：US09700439
申请日：2000-11-13
Applicant: Rudolf Schwarte
Inventor： Rudolf Schwarte
IPC: H01L2700
CPC classification number: H01L31/02024 , G01J9/00 , G01J2009/006 , G01S7/4914 , G01S17/89 , H01L31/022408
Abstract: The presented invention concerns an apparatus for detecting the phase and amplitude of electromagnetic waves, comprising at least two modulations photogates which are sensitive to the electromagnetic waves, and accumulating gates which are associated with the modulation photogates and which are not photosensitive, and electrical connections for the modulation photogates and the accumulation gates so that the latter can be connected to a reading-out device and the former can be connected to a modulating device which increases and reduces the potential of the modulation photogates relative to each other and relative to the preferably constant potential of the accumulation gates corresponding to a desired modulation function. It is proposed in accordance with the invention that a plurality of modulation photogates and accumulation gates are provided in the form of long narrow parallel strips which group-wise form a PMD-pixel.
Abstract translation: 本发明涉及一种用于检测电磁波的相位和幅度的装置，其包括对电磁波敏感的至少两个调制光栅，以及与调制光栅相关并且不是感光的累积门，以及用于 调制光栅和积累门，使得后者可以连接到读出装置，并且前者可以连接到调制装置，该调制装置增加并降低调制光栅相对于彼此的电位，并且相对于优选恒定 累积门的电位对应于期望的调制功能。 根据本发明提出，多个调制照相门和累加门以长方形平行条的形式提供，它们分组形成PMD像素。
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公开(公告)号：US20170304742A1
公开(公告)日：2017-10-26
申请号：US15515692
申请日：2015-10-01
Applicant: TAIKATEATTERI 13 RY
Inventor： Tatu TYNI , Jani PULKKINEN , Petri MIKKONEN
CPC classification number: A63J5/02 , G01J2009/006 , G01S3/78 , G03B17/54 , G06F3/03 , H04N5/222 , H05B37/02 , H05B37/0227
Abstract: An arrangement for providing visual effects including light emitting members attached to a target, an imaging unit for locating the light emitting members, a computing unit for receiving real-time location information data from the imaging unit and controlling a laser projector based on the received location information data, a laser projector projecting a laser beam responsive to control information provided by the computing unit, and a partially reflecting mirror reflecting the projected laser beam with respect to the light emitting members towards and/or in the vicinity of the light emitting members and passing the light from the light emitting members to the imaging unit. Related method is presented.
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Patent Agency Ranking
16.发明申请公开(公告)号：US20170097282A1
公开(公告)日：2017-04-06
申请号：US15381661
申请日：2016-12-16
Applicant: Draka Comteq B.V.
Inventor： Franciscus Johannes Achten , Denis Molin , Pierre Sillard , Marianne Bigot-Astruc
CPC classification number: G01M11/338 , G01J9/00 , G01J2009/004 , G01J2009/006 , G02B6/0288 , G02B6/0365 , G02B6/14
Abstract: The invention concerns a method for characterizing mode group properties of multimodal light traveling through an optical component, comprising: providing a Mode Group Separating optical fiber in an optical path between a light source and said optical component; launching reference pulses of light with a wavelength λt from said light source through said Mode Group Separating optical fiber into said optical component at discrete intervals between a core center and a core radius of said fiber. The Mode Group Separating optical fiber is a multimode fiber with an α-profile graded index core with an α-value chosen such that said fiber satisfies the following criterion at the wavelength λt: Δτ · L Δ T REF > 4 where: Δτ is a time delay difference between consecutive mode groups; L is a length of said fiber; ΔTREF is a Full Width at Quarter Maximum of said reference pulses.
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公开(公告)号：US20140104614A1
公开(公告)日：2014-04-17
申请号：US13830466
申请日：2013-03-14
Applicant: CYMER, INC.
Inventor： Rostislav Rokitski , Nakgeuon Seong , Kevin O'Brien
CPC classification number: G01J3/28 , G01J3/027 , G01J3/1809 , G01J11/00 , G01J2001/4238 , G01J2009/006 , G03F7/70091 , G03F7/70575 , G03F7/7085
Abstract: A spectral feature of a pulsed light beam produced by an optical source is estimated by modifying the wavelength of the pulsed light beam based on a predefined repeating pattern having a pattern period including a plurality of steps, the modification including shifting the wavelength of the pulsed light beam by a wavelength offset from a baseline wavelength for each step in the pattern period; measuring the wavelength of the light beam for each step in the pattern period as the wavelength is modified across the pattern; and estimating a spectral feature of the pulsed light beam over an evaluation window that includes all of the steps within the pattern period based at least in part on the measured wavelength of the light beam for each step in the pattern period.
Abstract translation: 由光源产生的脉冲光束的光谱特征通过基于具有包括多个步骤的图案周期的预定重复图案修改脉冲光束的波长来估计，该修改包括移动脉冲光的波长 在图案周期中对于每个步骤的基线波长的波长偏移; 在图案周期中测量每个步骤的光束的波长，当波长跨越图案被修改时; 以及至少部分地基于所述模式周期中的每个步骤的所述光束的波长来估计包括所述模式周期内的所有步骤的评估窗口上的所述脉冲光束的光谱特征。
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公开(公告)号：US07361883B2
公开(公告)日：2008-04-22
申请号：US11098728
申请日：2005-04-04
Applicant: Zhanping Xu , Tobias Möller , Holger Kraft , Jochen Frey , Martin Albrecht
Inventor： Zhanping Xu , Tobias Möller , Holger Kraft , Jochen Frey , Martin Albrecht
IPC: H01L31/00
CPC classification number: G01J9/00 , G01J2009/006 , H01L31/02024 , H01L31/1136
Abstract: The present invention relates to a photonic mixer device with a photosensitive layer, at least two modulation gates (3, 4, 103, 104, 203, 204, 303, 304, 403, 404) and at least two readout electrodes (1, 2, 101, 102, 201, 202, 301, 302, 401, 402, 501, 502, 601, 602) connected to the photosensitive layer, the modulation gates (3, 4, 103, 104, 203, 204, 303, 304, 403, 404) being able to be connected to a modulation device which raises and lowers the potential of the modulation gates relative to one another and relative to the preferably constant potential of the readout electrodes corresponding to a desired modulation function. In order to further develop the known photonic mixer device such that it shows an increased charge conversion efficiency and reduced dark currents, it is proposed according to the invention that the readout electrodes (1, 2, 101, 102, 201, 202, 301, 302, 401, 402, 501, 502, 601, 602) in each case have at least two discrete electrode sections (1A-1E, 2A-2E) arranged at a distance alongside each other.
Abstract translation: 本发明涉及具有感光层，至少两个调制门（3,4,103,104,203,204,303,304,403,404）和至少两个读出电极（1,2）的光子混合器装置 ，101,102,201,202,301,302,401,402,501,502,601,602）连接到所述感光层，所述调制门 ，403,404）能够连接到调制装置，该调制装置相对于彼此相对于相应于所需调制功能的读出电极的优选恒定电位升高和降低调制栅极的电位。 为了进一步开发已知的光子混合器装置，使得其显示出增加的电荷转换效率和降低的暗电流，根据本发明提出，读出电极（1,2,101,102,201,202,301， 302,401,402,501,502,601,602）在每种情况下具有至少两个彼此分开设置的离散电极部分（1A-1E，2A-2A）。
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公开(公告)号：EP1584904B1
公开(公告)日：2008-05-21
申请号：EP05102192.1
申请日：2005-03-18
Applicant: PMDTechnologies GmbH
Inventor： XU, Zhanping , MÖLLER, Tobias , KRAFT, Holger , FREY, Jochen , ALBRECHT, Martin
IPC: G01J9/00
CPC classification number: G01J9/00 , G01J2009/006 , H01L31/02024 , H01L31/1136
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公开(公告)号：EP1584904A3
公开(公告)日：2007-05-30
申请号：EP05102192.1
申请日：2005-03-18
Applicant: PMDTechnologies GmbH
Inventor： XU, Zhanping , MÖLLER, Tobias , KRAFT, Holger , FREY, Jochen , ALBRECHT, Martin
IPC: G01J9/00
CPC classification number: G01J9/00 , G01J2009/006 , H01L31/02024 , H01L31/1136
Abstract: Die vorliegende Erfindung betrifft einen Photomischdetektor mit einer photoempfindlichen Schicht, mindestens zwei Modulationsgates (3, 4, 103, 104, 203, 204, 303, 304, 403, 404) und mindestens zwei mit der photoempfindlichen Schicht verbundenen Ausleseelektroden (1, 2, 101, 102, 201, 202, 301, 302, 401, 402, 501, 502, 601, 602), wobei die Modulationsgates (3, 4, 103, 104, 203, 204, 303, 304, 403, 404) mit einer Modulationseinrichtung verbindbar sind, welche das Potential der Modulationsgates relativ zueinander und relativ zu dem vorzugsweise konstanten Potential der Ausleseelektroden entsprechend einer gewünschten Modulationsfunktion anhebt und absenkt. Um den bekannten Photomischdetektor so weiter zu entwickeln, daß er eine erhöhte Ladungsträgerkonversionseffizienz und verringerte Dunkelströme zeigt, wird erfindungsgemäß vorgeschlagen, daß die Ausleseelektroden (1, 2, 101, 102, 201, 202, 301, 302, 401, 402, 501, 502, 601, 602) jeweils mindestens zwei im Abstand nebeneinander angeordnete diskrete Elektrodenabschnitte (1A-1E, 2A-2E) aufweisen.
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