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公开(公告)号：WO2012137013A1
公开(公告)日：2012-10-11
申请号：PCT/GB2012/050776
申请日：2012-04-05
Applicant: METRYX LIMITED , KIERMASZ, Adrian
Inventor： KIERMASZ, Adrian
CPC classification number: G01R31/2601 , C30B1/00 , C30B7/00 , C30B23/00 , G01N1/00 , G01N5/00 , G01N5/02 , G01N15/0893 , G01N2201/00 , G01N2203/00 , H01J49/26 , H01L22/12
Abstract: A method and apparatus for extracting the contents (39) of voids (13) and/or pores present in a semiconductor device to obtain information indicative of the nature of the voids and/or pores, e.g. to assist with metrology measurements. The method includes heating the semiconductor wafer to expel the contents of the voids and/or pores, collecting the expelled material (41) in a collector, and measuring a consequential change in mass of the semiconductor wafer (29) and/or the collector (37), to extract information indicative of the nature of the voids. This information may include information relating to the distribution of the voids and/or pores, and/or the sizes of the voids and/or pores, and/or the chemical contents of the voids and/or pores. The collector may include a condenser having a temperature-controlled surface (e.g. in thermal communication with a refrigeration unit) for condensing the expelled material.
Abstract translation: 一种用于提取存在于半导体器件中的空隙（13）和/或孔的内容物（39）的方法和装置，以获得指示空隙和/或孔的性质的信息，例如， 协助测量测量。 该方法包括加热半导体晶片以排出空隙和/或孔的内容物，将排出的材料（41）收集在收集器中，并测量半导体晶片（29）和/或集电体（29）的质量的相应变化 37），提取指示空洞性质的信息。 该信息可以包括关于空隙和/或孔的分布，和/或空隙和/或孔的尺寸和/或空隙和/或孔的化学成分的信息。 收集器可以包括具有用于冷凝排出的材料的温度控制表面（例如与制冷单元热连通）的冷凝器。
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公开(公告)号：EP2694944A1
公开(公告)日：2014-02-12
申请号：EP12721573.9
申请日：2012-04-05
Applicant: Metryx Limited
Inventor： KIERMASZ, Adrian
CPC classification number: G01R31/2601 , C30B1/00 , C30B7/00 , C30B23/00 , G01N1/00 , G01N5/00 , G01N5/02 , G01N15/0893 , G01N2201/00 , G01N2203/00 , H01J49/26 , H01L22/12
Abstract: A method and apparatus for extracting the contents (39) of voids (13) and/or pores present in a semiconductor device to obtain information indicative of the nature of the voids and/or pores, e.g. to assist with metrology measurements. The method includes heating the semiconductor wafer to expel the contents of the voids and/or pores, collecting the expelled material (41) in a collector, and measuring a consequential change in mass of the semiconductor wafer (29) and/or the collector (37), to extract information indicative of the nature of the voids. This information may include information relating to the distribution of the voids and/or pores, and/or the sizes of the voids and/or pores, and/or the chemical contents of the voids and/or pores. The collector may include a condenser having a temperature-controlled surface (e.g. in thermal communication with a refrigeration unit) for condensing the expelled material.
Abstract translation: 一种用于提取存在于半导体器件中的空隙（13）和/或孔隙的内容物（39）以获得指示空隙和/或孔隙性质的信息的方法和设备， 协助进行计量测量。 该方法包括加热半导体晶片以排出空隙和/或孔的内容物，将收集排出的材料（41）收集在收集器中，并且测量半导体晶片（29）和/或收集器 以提取指示空隙性质的信息。 该信息可以包括与空隙和/或孔的分布和/或空隙和/或孔的尺寸和/或空隙和/或孔的化学内容有关的信息。 收集器可以包括具有温控表面（例如，与制冷单元热连通）的冷凝器，用于冷凝排出的材料。
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13.发明公开
公开(公告)号：EP2092279A1
公开(公告)日：2009-08-26
申请号：EP07847590.2
申请日：2007-11-30
Applicant: Endress+Hauser GmbH+Co. KG
Inventor： DIETERLE, Roland , WERNET, Armin
CPC classification number: G01F23/24 , C12Q1/00 , C12Q2304/00 , G01F23/26 , G01N2201/00
Abstract: The invention relates to a device for determining and/or monitoring at least one process quantity of a medium (1), with at least one probe unit (3), and with at least one electronics unit (4) which applies an electrical excitation signal to the probe unit (3) and which receives an electrical measurement signal from the probe unit. The invention includes the fact that the probe unit (3) has at least one inner electrode (5) and at least one outer electrode (6) surrounding the inner electrode.
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公开(公告)号：EP3214452A1
公开(公告)日：2017-09-06
申请号：EP15855470.9
申请日：2015-10-23
Inventor： HASHIMOTO, Daichi , NAKAZAWA, Takashi , SEKINO, Haruhito
IPC: G01R31/02
CPC classification number: G01R31/1272 , B60L3/0069 , G01N1/00 , G01N2201/00 , G01R1/00 , G01R27/18 , G01R31/006 , G01R31/025 , G01R31/31706 , H04B3/56
Abstract: An abnormality detection device includes: a coupling-capacitor having a first-end and a second-end coupled with a high-voltage circuit; a signal output unit; a signal extraction unit; and a signal input unit. The signal output unit is coupled with the first-end of the coupling-capacitor via a detection-resistor, and outputs an alternating-current inspection-signal. The signal extraction unit extracts the inspection-signal, as an extraction-signal, output between the detection-resistor and the coupling-capacitor. The signal input unit detects abnormality of insulation resistance of the high-voltage circuit based on a level of the inputted extraction-signal. The signal extraction unit includes a signal removing filter and a subtraction circuit. The filter removes a signal equal in frequency to the inspection-signal and passes low-frequency noises lower in frequency than the inspection-signal. The subtraction circuit outputs a differential signal, as the extraction-signal, between a signal having passed through the filter and a signal not having passed through the filter.
Abstract translation: 异常检测装置包括：耦合电容器，具有与高压电路耦合的第一端和第二端; 信号输出单元; 信号提取单元; 和信号输入单元。 信号输出单元经由检测电阻与耦合电容器的第一端耦合，并输出交流检查信号。 信号提取单元提取在检测电阻器和耦合电容器之间输出的检测信号作为提取信号。 信号输入单元基于输入的提取信号的电平来检测高电压电路的绝缘电阻的异常。 信号提取单元包括信号去除滤波器和减法电路。 滤波器除去与检查信号频率相等的信号，并传递频率低于检查信号的低频噪声。 减法电路在已经通过滤波器的信号和未通过滤波器的信号之间输出作为提取信号的差分信号。
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公开(公告)号：EP2746756A3
公开(公告)日：2014-09-10
申请号：EP14160557.6
申请日：2013-01-16
Applicant: Seuffer GmbH & Co. KG
Inventor： Gruden, Roman
CPC classification number: G01N27/221 , A47L15/4297 , D06F39/004 , G01N1/00 , G01N27/30 , G01N33/18 , G01N2201/00 , G01R1/00
Abstract: Die Erfindung betrifft eine Sensorvorrichtung zur Erfassung von Eigenschaften fluider Medien in einem Behälter, mit zumindest einer aus einem isolierenden Material gebildeten Grundplatte (42) mit einer ersten dem Medium (3) ausgesetzten Oberfläche (42a), zumindest zwei Sensorelementen (41) mit zumindest einer ersten und einer zweiten Elektrode (41 a, 41 b), die gegeneinander isoliert auf der ersten Oberfläche der Grundplatte angeordnet sind und von dem Medium umströmt werden, wobei die zumindest zwei Sensorelemente in einer vorbestimmten räumlichen Lage zueinander angeordnet sind.
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Patent Agency Ranking
公开(公告)号：JP2013053939A
公开(公告)日：2013-03-21
申请号：JP2011192562
申请日：2011-09-05
Applicant: Denso Corp , 株式会社デンソー
Inventor： MIZOGUCHI HAYATO , KAMIYA YASUHIRO , SHIMIZU TAKUMI
CPC classification number: G01R31/362 , B60L1/00 , B60L3/0046 , B60L11/1855 , B60L2200/00 , B60L2210/00 , B60L2240/547 , G01N1/00 , G01N2201/00 , G01N2203/00 , G01R1/00 , G01R31/026 , G01R31/3658 , H02J1/00 , Y02T10/7005
Abstract: PROBLEM TO BE SOLVED: To suppress decline of a filter function and to shorten time needed to charge capacitors with voltage of battery cells, in a flying capacitor type voltage monitoring device for monitoring the voltage of the respective battery cells of a battery pack using multiple capacitors.SOLUTION: Among multiple resistors R1-R15 which are provided at detection lines L1-L15 connecting electrode terminals of respective battery cells V1-V14 of a battery pack 1 to an input side connection switching part 22 and which form a filter circuit 21 serving a filter function, a resistance value of a first resistor group connected to a connection end A3 between a first capacitor C1 and a second capacitor C2 via the input side connection switching part 22 is made smaller than a resistance value of a second resistor group connected to independent ends A1, A2 of the respective capacitors C1, C2.
Abstract translation: 要解决的问题：为了抑制滤波器功能的下降并且缩短在电池单元的电压下对电容器充电所需的时间，在用于监测电池组的各个电池单元的电压的飞行电容器型电压监视装置中 使用多个电容器。 解决方案：在将电池组1的各个电池单元V1-V14的电极端子连接到输入侧连接切换部分22并且形成滤波电路21的检测线L1-L15处设置的多个电阻器R1-R15中 通过输入侧连接切换部22，连接到第一电容器C1和第二电容器C2之间的连接端A3的第一电阻体的电阻值比连接的第二电阻体的电阻值小 到各个电容器C1，C2的独立端A1，A2。 版权所有（C）2013，JPO＆INPIT
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公开(公告)号：JP5547296B2
公开(公告)日：2014-07-09
申请号：JP2012537606
申请日：2011-08-08
Applicant: アルプス電気株式会社
IPC: G01N27/22
CPC classification number: G01N27/223 , G01N1/00 , G01N2201/00 , H01L21/00 , Y10T29/49
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公开(公告)号：US09752977B2
公开(公告)日：2017-09-05
申请号：US14414006
申请日：2013-07-02
Applicant: BAE SYSTEMS plc
CPC classification number: G01N17/04 , G01N1/00 , G01N2201/00 , G01R27/08 , H01L21/00
Abstract: A corrosion sensor for detecting the action of corrosive media on a metallic component when the sensor is mounted in the vicinity of the metallic component in use is disclosed. The sensor includes an electrically conducting corrodible element mounted on a non conducting substrate, the corrodible element being covered with a protective coating such as paint adapted to protect the corrodible element from corrosive media. The protective coating defines a temporary feature such as a paint defect which extends across the corrodible element and is designed to permit attack on the corrodible element by corrosive media after a predetermined period of time. The corrodible element comprises a pair of spaced tracks extending generally in a longitudinal direction and a series of corrodible tracks, each corrodible track extending generally in a lateral direction and forming an electrical connection between the spaced tracks. The temporary feature extends longitudinally, in the space between the pair of tracks, across a number of the corrodible tracks whereby to permit a corrosive attack on a number of the corrodible tracks after the predetermined period of time.
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公开(公告)号：US20170192078A1
公开(公告)日：2017-07-06
申请号：US14995521
申请日：2016-01-14
Applicant: Texas Instruments Incorporated
Inventor： Arup Polley , Russell Melvin Rosenquist , Terry Lee Sculley
CPC classification number: G01R35/005 , G01N1/00 , G01N2201/00 , G01R33/0035 , G01R33/07 , H04J1/00
Abstract: A closed-loop calibration scheme is configured to allow a device to remain in continuous operation. A signal generator device provides a pseudorandom sequence for a signal received by a magnetic field magnetic field sensor, such as a Hall-effect sensor. A signal decoder circuit receives the output signal and decouples the generated spread spectrum signal from the interference by measuring the gain in the overall signal. The decoder device distinguishes the known spread spectrum signal from any perturbation effects of particular bandwidths. A processing circuit then outputs a signal that has an operation parameter that has been adjusted to compensate for the perturbation effects. The processing circuit provides the receiver circuit with the compensation signal, hence forming a closed-loop calibration configuration.
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公开(公告)号：US20170010377A1
公开(公告)日：2017-01-12
申请号：US14901614
申请日：2014-04-02
Applicant: BAKER HUGHES INCORPORATED
Inventor： Sergey A. Terentev , Yuliy Dashevsky
CPC classification number: G01V3/30 , E21B49/00 , E21B49/08 , G01N2201/00 , H01L21/00 , H01L2221/00
Abstract: A method for determining at least one electrical property of an earth formation includes emitting an electromagnetic signal into the earth formation from an antenna and measuring an electromagnetic signal from the earth formation. The antenna is a broadband log antenna mounted on a substrate having at least a high dielectric permittivity, defined as a dielectric permittivity of about ε=100 to ε=1000 or a gigantic dielectric permittivity, defined as a dielectric permittivity of about ε=1000 or greater. The antenna has a radius between about 2.5 millimeters (mm) and 10 centimeters (cm). The method further includes determining at least one electrical property of one or more of a borehole, a borehole fluid, and the earth formation based on measuring the electromagnetic signal.
Abstract translation: 一种用于确定地层的至少一个电性质的方法包括从天线向地层发射电磁信号并测量来自地层的电磁信号。 该天线是安装在基板上的宽带日志天线，其具有至少高的介电常数，其定义为约ε= 100至ε= 1000的介电常数或大约介电常数，其定义为约ε= 1000的介电常数或 更大 天线的半径在约2.5毫米（mm）和10厘米（厘米）之间。 该方法还包括基于测量电磁信号来确定钻孔，井眼流体和地球形成中的一个或多个的至少一个电性质。
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