公开(公告)号：US06466317B1

公开(公告)日：2002-10-15

申请号：US09501346

申请日：2000-02-09

Applicant: Stephen R. Temple ,  Michael J. Stoltz

Inventor： Stephen R. Temple ,  Michael J. Stoltz

IPC: G01J342

CPC classification number: C02F1/5236 ,  C02F1/56 ,  C02F2103/28

Abstract: In one aspect the current invention provides a method for automatic real time monitoring of true color in a liquid. A sample is automatically withdrawn from the liquid in real time and is then automatically filtered in real time. The true color in the filtered sample is automatically detected in real time and the true color is automatically quantified in the filtered sample in real time. In another aspect, the present invention provides an apparatus that automatically monitors true color in a liquid in real time. The apparatus has a pump for automatically withdrawing a sample from the liquid in real time and a filter for automatically filtering the sample in real time. The apparatus also has an absorption spectrophotometer for automatically detecting true color in the filtered sample in real time and a controller for automatically quantifying the true color of the filtered sample in real time.

Abstract translation: 在一个方面，本发明提供了一种用于液体中真实颜色的自动实时监测的方法。 样品自动从液体中实时取出，然后实时自动过滤。 滤波后的样品中的真实颜色将被实时自动检测，真实色彩会在滤波后的样品中实时自动量化。 另一方面，本发明提供一种实时自动监测液体中的真实颜色的装置。 该装置具有用于实时自动从液体中取出样品的泵和用于实时自动过滤样品的过滤器。 该装置还具有用于实时自动检测滤波样品中的真实颜色的吸收分光光度计和用于实时自动量化过滤样品的真实颜色的控制器。

公开(公告)号：US06433339B1

公开(公告)日：2002-08-13

申请号：US09676593

申请日：2000-09-29

Applicant: Yasuhiro Maeda ,  Haruo Yoshida ,  Michiaki Endo

Inventor： Yasuhiro Maeda ,  Haruo Yoshida ,  Michiaki Endo

IPC: G01J342

CPC classification number: G01N21/9505 ,  G01N21/35 ,  G01N21/3563 ,  G01N21/552 ,  G01N21/9501

Abstract: The surface state monitoring apparatus comprises: a wafer cassette holding a plurality of semiconductor wafers; an incidence optical system for applying infrared radiation to at least one of said plurality of semiconductor wafers; a detection optical system for detecting the infrared radiation which has undergone multiple reflection in the semiconductor wafer and exited from the semiconductor wafer; surface state monitoring means for monitoring surface states of the semiconductor wafer, based on the infrared radiation detected by the detection optical system; and displacing means for displacing the wafer cassette relative to the incidence optical system and the detection optical system. Surface states of said plurality of semiconductor wafers are sequentially monitored while the wafer cassette is displaced relative to the incidence optical system and the detection optical system by the displacing means, whereby surface states of said plurality of semiconductor wafers held in the wafer cassette are continuously monitored.

Abstract translation: 表面状态监视装置包括：保持多个半导体晶片的晶片盒; 用于将红外辐射施加到所述多个半导体晶片中的至少一个的入射光学系统; 用于检测已经在半导体晶片中经过多次反射并从半导体晶片退出的红外辐射的检测光学系统; 基于由检测光学系统检测的红外线辐射来监测半导体晶片的表面状态的表面状态监视装置; 以及用于使晶片盒相对于入射光学系统和检测光学系统移位的移位装置。 所述多个半导体晶片的表面状态在晶片盒相对入射光学系统和检测光学系统被置换装置移位的同时被顺序地监视，由此保持在晶片盒中的所述多个半导体晶片的表面状态被连续监视 。

公开(公告)号：US06249001B1

公开(公告)日：2001-06-19

申请号：US09300986

申请日：1999-04-08

Applicant: Donald Jon Sauer ,  Ramon Ubaldo Martinelli ,  Robert Amantea ,  Peter Alan Levine

Inventor： Donald Jon Sauer ,  Ramon Ubaldo Martinelli ,  Robert Amantea ,  Peter Alan Levine

IPC: G01J342

CPC classification number: C07D405/06 ,  G01J5/34 ,  G01J5/40 ,  H04N5/33

Abstract: An infrared imager includes an array of capacitance sensors that operate at room temperature. Each infrared capacitance sensor includes a deflectable first plate which expands due to absorbed thermal radiation relative to a non-deflectable second plate. In one embodiment each infrared capacitance sensor is composed of a bi-material strip which changes the position of one plate of a sensing capacitor in response to temperature changes due to absorbed incident thermal radiation. The bi-material strip is composed of two materials with a large difference in thermal expansion coefficients.

Abstract translation: 红外成像仪包括在室温下工作的电容式传感器阵列。 每个红外电容传感器包括可偏转的第一板，其由于相对于不可偏转的第二板的吸收的热辐射而膨胀。 在一个实施例中，每个红外线电容传感器由双材料条组成，双材料条响应于由吸收的入射热辐射引起的温度变化而改变感测电容器的一个板的位置。 双材料条由热膨胀系数差大的两种材料组成。

公开(公告)号：US06236457B1

公开(公告)日：2001-05-22

申请号：US09180380

申请日：1998-11-06

Applicant: Brian Lawrence Allen ,  Michael Ron Hammer

Inventor： Brian Lawrence Allen ,  Michael Ron Hammer

IPC: G01J342

CPC classification number: G01N21/72 ,  G01J3/10 ,  G01J3/42 ,  G01N21/31 ,  G01N2021/3148

Abstract: Spectroscopic apparatus for sequentially detecting the presence of a plurality of elements in a sample. The apparatus includes a plurality of lamps (1a-1e) each of which is for detecting the presence of a respective at least one predetermined element in a plurality of elements. A beam selector (13) which may be a mirror, is operative to direct a beam of light (7) from any one of lamps (1a-1e) to an analysis zone (8). The apparatus includes a monochromator (15), the drive (24) of which is under the control of a controller (25) with a memory device (26) linked thereto. Predetermined settings for the monochromator corresponding to the peak settings for each wavelength of interest can be stored in memory (26) for subsequently driving the monochromator to those settings without the need to undertake a peaking routine for each elemental analysis, thereby saving analyses time. The lamp and beam selector arrangement of the apparatus substantially reduces the time required to change from one lamp to another thereby facilitating sequential spectroscopic multi-element analyses of samples. Apparatus which uses a flame for atomising a sample includes valves (19 and 20) for controlling the flow of oxidant (17) and fuel (18) gases to a spray chamber (23) and then analysis zone (8), the oxidant (17) being supplied via a nebuliser (22). The valves (19 and 20) are preferably high speed oscillating valves having an adjustable on to off time ration under the control of a microprocessor (21). The oscillating valves (19 and 20) allow rapid changes to be made to the oxidant and fuel gas flows, thereby also saving analysis time.

Abstract translation: 用于顺序地检测样品中多个元素的存在的光谱仪。 该装置包括多个灯（1a-1e），每个灯用于检测多个元件中相应的至少一个预定元件的存在。 可以是反射镜的光束选择器（13）可操作以将光束（7）从任何一个灯（1a-1e）引导到分析区（8）。 该装置包括一个单色器（15），其驱动器（24）处于与其相连的存储装置（26）的控制器（25）的控制下。 对应于每个感兴趣波长的峰值设置的单色仪的预定设置可以存储在存储器（26）中，用于随后将单色仪驱动到那些设置，而不需要对每个元素分析进行​​峰值例程，从而节省分析时间。 设备的灯和光束选择器装置大大减少了从一个灯变为另一个灯所需的时间，从而便于样品的顺序光谱多元分析。 使用火焰雾化样品的装置包括用于控制氧化剂（17）和燃料（18）到喷雾室（23）的流动的阀门（19和20），然后分析区域（8），氧化剂（17） ）通过雾化器（22）供应。 阀（19和20）优选地是在微处理器（21）的控制下具有可调节的关断时间比例的高速摆动阀。 振动阀（19和20）允许对氧化剂和燃料气体进行快速变化，从而也节省了分析时间。

公开(公告)号：US06836325B2

公开(公告)日：2004-12-28

申请号：US09932210

申请日：2001-08-17

Applicant: Anthony K. Maczura ,  Erich R. Gross ,  Anthony S. Lee ,  David M. Mayes

Inventor： Anthony K. Maczura ,  Erich R. Gross ,  Anthony S. Lee ,  David M. Mayes

IPC: G01J342

CPC classification number: G01N21/276 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0218 ,  G01J3/0232 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/0272 ,  G01J3/28 ,  G01J3/42 ,  G01J3/46 ,  G01J3/502 ,  G01J3/524 ,  G01J2003/2866 ,  G01N21/3563 ,  G01N21/3577 ,  G01N21/359 ,  G01N21/85

Abstract: The present invention relates to spectral analysis systems and methods for determining physical and chemical properties of a sample by measuring the optical characteristics of light emitted from the sample. In one embodiment, a probe head for use with a spectrometer includes an optical blocking element for forcing the optical path between the light source and an optical pick-up optically connected to the spectrometer into the sample. The probe head also includes a reference shutter for selectively blocking light emitted from the sample from reaching the optical pick-up to facilitate calibration of the spectrometer.

Abstract translation: 本发明涉及通过测量从样品发射的光的光学特性来确定样品的物理和化学性质的光谱分析系统和方法。 在一个实施例中，与光谱仪一起使用的探针头包括用于迫使光源和光学连接到光谱仪的光学拾取器之间的光路进入样品的光学阻挡元件。 探头还包括用于选择性地阻挡从样品发射的光到达光学拾波器以便于校准光谱仪的参考快门。

公开(公告)号：US06836324B2

公开(公告)日：2004-12-28

申请号：US10011263

申请日：2001-11-13

Applicant: David Scheiner ,  Vladimir Machavariani

Inventor： David Scheiner ,  Vladimir Machavariani

IPC: G01J342

CPC classification number: G01J3/42 ,  G01B11/02 ,  G01B11/0625 ,  H01L22/12

Abstract: An apparatus and a method are disclosed for measuring at least one desired parameter of a patterned structure having a plurality of features defined by a certain process of its manufacturing, wherein the structure represents a grid having at least one cycle formed of at least two metal-containing regions spaced by substantially transparent regions with respect to incident light defining a waveguide. The method utilizes an optical model on at least some of the features of the structure defined by a certain process of its manufacturing, and is capable of determining theoretical data representative of photometric intensities of light components of different wavelengths specularly reflected from the structure and of calculating said at least one desired parameter of the structure.

Abstract translation: 公开了一种用于测量具有由其制造的特定过程限定的多个特征的图案化结构的至少一个期望参数的装置和方法，其中该结构表示具有由至少两个金属 - 相对于限定波导的入射光，基本上透明的区域间隔开。 该方法利用由其制造的特定过程定义的结构的至少一些特征的光学模型，并且能够确定表示从结构镜面反射的不同波长的光分量的光度强度的理论数据，并且计算 所述结构的至少一个期望参数。

公开(公告)号：US06831740B2

公开(公告)日：2004-12-14

申请号：US09862881

申请日：2001-08-09

Applicant: Craig M. Herzinger ,  Steven E. Green ,  Ronald A. Synowicki

Inventor： Craig M. Herzinger ,  Steven E. Green ,  Ronald A. Synowicki

IPC: G01J342

CPC classification number: G01J3/28 ,  G01J3/42 ,  G01N21/274

Abstract: Disclosed are spectrophotometer systems and methodology for obtaining data of improved precision therefrom, including replacement of data determined to be suspect based on comparison of multiple baselines.

Abstract translation: 公开了分光光度计系统和方法，用于从其获得改进精度的数据，包括基于多个基线的比较来替换被确定为可疑的数据。

公开(公告)号：US06753956B2

公开(公告)日：2004-06-22

申请号：US09847669

申请日：2001-05-02

Applicant: James Leonard Clark ,  Wayne Coleman Tincher ,  Wiley Don Holcombe ,  Richard A. Carey ,  Elizabeth Wise White

Inventor： James Leonard Clark ,  Wayne Coleman Tincher ,  Wiley Don Holcombe ,  Richard A. Carey ,  Elizabeth Wise White

IPC: G01J342

CPC classification number: D06B23/20 ,  D06P1/0008 ,  D06P1/0032

Abstract: The present invention is a fully automated modified batch dyeing process that provides a process that reduces water consumption, reduces environmental pollution, and reduces the energy and chemical consumption of the conventional batch dyeing process through efficient reuse of spent dyebath. The invention provides a holding tank which stores the spent dyebath, and an analysis system which allows for the analysis of the dyebath in the holding tank so that the dyebath may be reconstituted and used in the batch dyeing process.

Abstract translation: 本发明是一种完全自动化的改性批量染色方法，其提供了通过有效再利用废染水来降低耗水量，减少环境污染并降低常规批量染色方法的能量和化学消耗的方法。 本发明提供了一种储存废弃染浴的储存罐，以及一种分析系统，该分析系统允许分析储罐中的染浴，使得染浴可以重新配制并用于分批染色过程。

公开(公告)号：US06747736B2

公开(公告)日：2004-06-08

申请号：US10020982

申请日：2001-12-19

Applicant: Hironori Takahashi

Inventor： Hironori Takahashi

IPC: G01J342

CPC classification number: G01N21/3581 ,  G01N21/49 ,  G01N22/00

Abstract: A terahertz wave detector is for detecting a terahertz wave which is emitted from a terahertz wave generator and which is transmitted through a sample. The timing, at which a probe light is irradiated on an optical switching device in the terahertz wave detector, is vibratingly varied by driving a movable reflector in a variable optical delay device at a predetermined vibration frequency. The resultant detection signal generated thereby and changing periodically and vibratingly is subjected to frequency analysis by a spectrum analyzer in a spectroscopic processor. The detection signal has the same temporal waveform as that of the terahertz wave and subjected to scale conversion. Therefore, the frequency analysis of the detection signal enables frequency measurement of a terahertz wave in real time. As a result, real-time spectroscopy is possible, and the device configuration is simplified.

Abstract translation: 太赫波检测器用于检测从太赫兹波发生器发射并通过样品传输的太赫兹波。 在太赫兹波检测器中的光开关器件上照射探测光的定时通过以可变光学延迟器件以预定的振动频率驱动可移动反射器来振动地变化。 由此产生的检测信号并周期性地振动地进行频谱分析，在分光处理器中进行频率分析。 检测信号具有与太赫兹波相同的时间波形并进行比例转换。 因此，检测信号的频率分析能够实时地进行太赫兹波的频率测量。 因此，实时光谱是可能的，并且简化了器件配置。

公开(公告)号：US06661512B2

公开(公告)日：2003-12-09

申请号：US10076316

申请日：2002-02-13

Applicant: C. J. Anthony Fernando ,  James E. Swon

Inventor： C. J. Anthony Fernando ,  James E. Swon

IPC: G01J342

CPC classification number: G01N21/253

Abstract: A sample measurement and analysis system comprises a fiber-optic channel selecting apparatus, a plurality of optical source lines, a plurality of optical return lines, a plurality of sample test sites, and an optical receiving device. The selecting apparatus comprises an optical input selection device, an optical output selection device, and a controller element. The optical input selection device defines a first optical path running between a first input end and a first output end. The first output end is rotatable to a plurality of first index positions defined along a first circular path. The optical output selection device defines a second optical path running between a second input end and a second output end. The second input end is rotatable to a plurality of second index positions defined along a second circular path. The controller element communicates with the optical input selection device and the optical output selection device for selectively aligning the first optical path with the first index positions and the second optical path with the second index positions.