公开(公告)号：US20040170252A1

公开(公告)日：2004-09-02

申请号：US10795814

申请日：2004-03-08

Applicant: University of Central Florida

Inventor： Martin Richardson

IPC: H05H001/00 ,  G21G004/00 ,  H01J035/00

CPC classification number: H05G2/003 ,  H05G2/005 ,  H05G2/008

Abstract: Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form a point source EUV, XUV and x-ray source. Various types of liquid droplet targets include metallic solutions, and nano-sized particles in solutions having a melting temperature lower than the melting temperature of some or all of the constituent metals, used a laser point source target droplets. The solutions have no damaging debris and can produce plasma emissions in the X-rays, XUV, and EUV(extreme ultra violet) spectral ranges of approximately 0.1 nm to approximately 100 nm, approximately 11.7 nm and 13 nm, approximately 0.5 nm to approximately 1.5 nm, and approximately 2.3 nm to approximately 4.5 nm. The second type of target consists of various types of liquids which contain as a miscible fluid various nano-size particles of different types of metals and non-metal materials.

Abstract translation: 由大功率激光器照射的特殊液滴靶，被等离子体形成点源EUV，XUV和X射线源。 各种类型的液滴靶包括金属溶液和具有低于部分或全部构成金属的熔融温度的溶解溶液中的纳米尺寸颗粒，使用激光点源目标液滴。 这些解决方案没有破坏性碎片，并且可以在约0.1nm至约100nm，约11.7nm和13nm，约0.5nm至约1.5nm的X射线，XUV和EUV（极紫外）光谱范围内产生等离子体发射 nm，约2.3nm至约4.5nm。 第二种类型的目标由各种类型的液体组成，其中含有不同类型金属和非金属材料的各种纳米尺寸颗粒作为混溶流体。

公开(公告)号：US20040071266A1

公开(公告)日：2004-04-15

申请号：US10269760

申请日：2002-10-11

Inventor： Rocco A. Orsini ,  Michael B. Petach ,  Mark E. Michaelian ,  Henry Shields ,  Roy D. McGregor ,  Steven W. Fornaca

IPC: H01J035/00

CPC classification number: H05G2/001 ,  H05G2/00

Abstract: An EUV radiation source that creates a stable solid filament target. The source includes a nozzle assembly having a condenser chamber for cryogenically cooling a gaseous target material into a liquid state. The liquid target material is filtered by a filter and sent to a holding chamber under pressure. The holding chamber allows entrained gas bubbles in the target material to be condensed into liquid prior to the filament target being emitted from the nozzle assembly. The target material is forced through a nozzle outlet tube to be emitted from the nozzle assembly as a liquid target stream. A thermal shield is provided around the outlet tube to maintain the liquid target material in the cryogenic state. The liquid target stream freezes and is vaporized by a laser beam from a laser source to generate the EUV radiation.

公开(公告)号：US20040028184A1

公开(公告)日：2004-02-12

申请号：US10213624

申请日：2002-08-06

Inventor： Wayne Hansen

IPC: H01J035/00

CPC classification number: H01R33/7678 ,  H01J2235/0233 ,  H01R13/187 ,  H01R13/53 ,  Y10S439/936

Abstract: A high voltage connector assembly is disclosed for use with high power apparatus including x-ray devices. The present connector is a pancake-style connector, and interconnects a high voltage cable with the cathode of the x-ray tube. The present connector includes a housing, a socket assembly, and insulating material surrounding the socket assembly to insulate it from the housing. The socket assembly comprises a potting-filled conductive sleeve having a continuously shaped, smooth terminal end. The terminal end of the sleeve forms a triple junction with the insulating material and air present near the sleeve. The continuously smooth terminal sleeve end prevents electrical arcing to occur at the triple junction by reducing field strength at the terminal end and urging the electric field of the socket assembly away from the triple junction. The reduction in electrical arcing propensity allows the x-ray device to operate at relatively higher operating voltages.

公开(公告)号：US20040022360A1

公开(公告)日：2004-02-05

申请号：US10064624

申请日：2002-07-31

Inventor： John Scott Price ,  Karl Francis Sherwin ,  Kasegn Dubale Tekletsadik

IPC: H01J035/00

CPC classification number: H01J35/065

Abstract: A system and method for providing pulsed power application for an x-ray tube that comprises an x-ray tube having an anode and cathode; and a power supply adapted to provide an anode-to-cathode gap accelerating potential and photons, wherein the gap voltage and photons are pulsed and received by the x-ray tube via a single cable from the power supply resulting in a pulsed x-ray radiation.

Abstract translation: 一种用于为包括具有阳极和阴极的x射线管的X射线管提供脉冲功率应用的系统和方法; 以及适于提供阳极至阴极间隙加速电位和光子的电源，其中所述间隙电压和光子被所述X射线管经由来自所述电源的单个电缆脉冲和接收，从而产生脉冲X射线 辐射。

公开(公告)号：US20030174811A1

公开(公告)日：2003-09-18

申请号：US10097498

申请日：2002-03-14

Applicant: Koninklijke Philips Electronics, NV

Inventor： Qing K. Lu ,  Paul M. Xu ,  Norman E. Wandke

IPC: H01J035/00

CPC classification number: H01J35/106 ,  F28D15/046 ,  H01J2235/1279 ,  H01J2235/1287

Abstract: An x-ray tube (10) includes an evacuated envelope (14), a cathode assembly (20) located in the evacuated envelope and a disk shaped anode assembly (18) located in the evacuated envelope in operative relationship with the cathode assembly for generating x-rays (40). The anode assembly includes an axis of rotation (26) and a target substrate (28) facing the cathode assembly. A heat pipe (33) is located within the anode assembly (18). The heat pipe is comprised of an evacuated shell (60) and is vacuum sealed at a first end (70) of the shell and at a second end (72). A material (80, 82) within the shell is a working fluid for the heat pipe at x-ray tube operating conditions. A porous wick (62) is located within the shell and the wick has a length extending from the first end (70) of the shell to the second end (72) of the shell. A shield (64) is attached to the wick to reduce working fluid loss out of the wick during x-ray tube operation.

Abstract translation: X射线管（10）包括抽真空的外壳（14），位于真空外壳中的阴极组件（20）和位于真空外壳中的盘形阳极组件（18），其与阴极组件起作用，用于产生 x射线（40）。 阳极组件包括面向阴极组件的旋转轴线（26）和目标衬底（28）。 热管（33）位于阳极组件（18）内。 热管由抽真空的外壳（60）组成，并在外壳的第一端（70）处和第二端（72）处被真空密封。 外壳内的材料（80,82）是用于X射线管操作条件下的热管的工作流体。 多孔芯（62）位于壳体内，并且芯具有从壳体的第一端（70）延伸到壳体的第二端（72）的长度。 在x射线管操作期间，将屏蔽件（64）附接到灯芯以减少芯吸中的工作流体损失。

公开(公告)号：US20020186814A1

公开(公告)日：2002-12-12

申请号：US09876469

申请日：2001-06-07

Applicant: Plex LLC

Inventor： Malcolm W. McGeoch

IPC: H01J035/00

CPC classification number: H05G2/003 ,  G03F7/70033

Abstract: A source of photons includes a discharge chamber, first and second groups of ion beam sources in the discharge chamber and a neutralizing mechanism. Each of the ion beam sources electrostatically accelerates a beam of ions of a working gas toward a plasma discharge region. The first group of ion beam sources acts as a cathode and the second group of ion beam sources acts as an anode for delivering a heating current to the plasma discharge region. The neutralizing mechanism at least partially neutralizes the ion beams before they enter the plasma discharge region. The neutralized beams and the heating current form a hot plasma that radiates photons. The photons may be in the soft x-ray or extreme ultraviolet wavelength range and, in one embodiment, have wavelengths in a range of about 10-15 nanometers.

Abstract translation: 光子源包括放电室，放电室中的第一和第二组离子束源以及中和机构。 每个离子束源将等离子体放电区域的工作气体的离子束静电加速。 第一组离子束源用作阴极，第二组离子束源用作将电流传递到等离子体放电区域的阳极。 中和机构在进入等离子体放电区域之前至少部分地中和离子束。 中和的光束和加热电流形成辐射光子的热等离子体。 光子可以在软X射线或极紫外波长范围内，并且在一个实施例中，波长在约10-15纳米的范围内。

公开(公告)号：US20020094064A1

公开(公告)日：2002-07-18

申请号：US10051183

申请日：2002-01-22

Inventor： Otto Z. Zhou ,  Jianping Lu ,  Qi Qiu

IPC: H01J035/00 ,  H01J035/22 ,  H01J035/32

CPC classification number: H01J35/14 ,  A61B6/032 ,  A61B6/4028 ,  B82Y10/00 ,  H01J35/065 ,  H01J35/22 ,  H01J2201/30469 ,  H01J2235/064 ,  H01J2235/068 ,  H05G1/34

Abstract: A structure to generate x-rays has a plurality of stationary and individually electrically addressable field emissive electron sources with a substrate composed of a field emissive material, such as carbon nanotubes. Electrically switching the field emissive electron sources at a predetermined frequency field emits electrons in a programmable sequence toward an incidence point on a target. The generated x-rays correspond in frequency and in position to that of the field emissive electron source. The large-area target and array or matrix of emitters can image objects from different positions and/or angles without moving the object or the structure and can produce a three dimensional image. The x-ray system is suitable for a variety of applications including industrial inspection/quality control, analytical instrumentation, security systems such as airport security inspection systems, and medical imaging, such as computed tomography.

Abstract translation: 产生X射线的结构具有多个静电和单独可电寻址的场发射电子源，其具有由诸如碳纳米管的场发射材料组成的衬底。 以预定频率电场电场切换场致发射电子源以可编程序列朝向目标上的入射点发射电子。 产生的x射线的频率和位置与场发射电子源的频率和位置相对应。 发射器的大面积目标和阵列或矩阵可以对来自不同位置和/或角度的物体进行成像，而不移动物体或结构，并可产生三维图像。 x射线系统适用于各种应用，包括工业检测/质量控制，分析仪器，机场安全检查系统等安全系统和计算机断层扫描等医学成像。

公开(公告)号：US20020048344A1

公开(公告)日：2002-04-25

申请号：US09973310

申请日：2001-10-09

Inventor： Peter Klaus Bachmann ,  Manfred Beckmann ,  Peter Flisikowski ,  Geoffrey Harding

IPC: H01J035/00 ,  H01J035/22 ,  H01J035/32

CPC classification number: H01J35/16 ,  H01J33/04 ,  H01J35/08 ,  H01J2235/082 ,  H01J2235/168

Abstract: The invention relates to a window transparent to electron rays comprising a foil (1; 101) which is transparent to electron rays and an element (2; 102) for supporting a peripheral region (1a, 1b) of the foil transparent to electron rays in the operational state, which element is made from a material having a greater linear thermal expansion coefficient than the foil material, with an intermediate layer (4; 104a, b) which is arranged between the foil (1; 101) and a retaining element (2; 102) acting as a support element and which consists of a material having a linear thermal expansion coefficient which is equal or similar to the linear thermal expansion coefficient of the foil material and smaller than the linear thermal expansion coefficient of the material of the retaining element, seen over the processing temperature range. The invention further relates to a method of manufacturing a window which is transparent to electrons and an X-ray device with a window transparent to electrons.

Abstract translation: 本发明涉及一种对电子射线透明的窗口，其包括对电子射线透明的箔片（1; 101）和用于支撑箔片的外围区域（1a，1b）的元件（2; 102） 所述操作状态是由具有比所述箔材料更大的线性热膨胀系数的材料制成的，具有布置在所述箔（1; 101）和保持元件（1; 101）之间的中间层（4; 104a，b） 2; 102），其作为支撑元件，并且由具有与箔材料的线性热膨胀系数相等或类似的线性热膨胀系数的材料构成，并且小于保持材料的线性热膨胀系数 元件，在加工温度范围内。 本发明还涉及制造对电子透明的窗口的方法以及具有对电子透明的窗口的X射线装置。

公开(公告)号：US20020015472A1

公开(公告)日：2002-02-07

申请号：US09859925

申请日：2001-05-17

Inventor： Eric Chabin ,  Xavier Le Pennec

IPC: H01J035/00

CPC classification number: H05G1/04

Abstract: X-ray emission device comprising a casing opened by a window and an X-ray tube placed in the casing, the tube comprising an anode assembly equipped with an anode, a cathode assembly equipped with a cathode and an envelope containing the anode and the cathode, the anode assembly including a means of longitudinal positioning of the tube in the casing and a means of angular positioning of the tube in the casing on a longitudinal axis.

Abstract translation: X射线发射装置包括由窗口打开的壳体和放置在壳体中的X射线管，该管包括装配有阳极的阳极组件，装有阴极的阴极组件和包含阳极和阴极的外壳 阳极组件包括将管纵向定位在壳体中的装置以及在纵向轴线上将管置于壳体中的角度定位装置。

公开(公告)号：US20040213375A1

公开(公告)日：2004-10-28

申请号：US10423770

申请日：2003-04-25

Inventor： Paul Bjorkholm ,  James E. Clayton

IPC: G01B015/06 ,  G01N023/02 ,  H05H001/00 ,  G21G004/00 ,  H01J035/00

CPC classification number: H01J35/24 ,  G21K1/093 ,  H01J35/14

Abstract: A radiation source is disclosed comprising a source of charged particles that travel along a path. Target material lies along the path to generate radiation upon impact by the beam. A magnet is provided to deflect the beam prior to impacting the target. The magnet may generate a time-varying magnetic field or a constant magnetic field. A constant magnetic field may be varied spatially across the beam. The magnet may be an electromagnet or a permanent magnet. In one example, deflection of the beam results in impact of the beam on the target along a plurality of axes. In another example, portions of the beam are differentially deflected. The source may thereby irradiate an object to be scanned with more uniform radiation. The charged particles may be electrons or protons and the radiation may be X-ray or gamma ray radiation, or neutrons. Scanning systems incorporating such sources, methods of generating radiation and methods of examining objects are disclosed, as well.

Abstract translation: 公开了一种辐射源，其包括沿着路径行进的带电粒子源。 目标材料位于路径上，以在梁受到冲击时产生辐射。 提供磁体以在撞击目标之前偏转光束。 磁体可产生时变磁场或恒定磁场。 恒定的磁场可以在横跨射束的空间上变化。 磁体可以是电磁体或永磁体。 在一个示例中，光束的偏转导致沿着多个轴的光束对目标的影响。 在另一示例中，梁的部分被差异偏转。 因此，源可以以更均匀的辐射照射待扫描的物体。 带电粒子可以是电子或质子，并且辐射可以是X射线或γ射线辐射或中子。 还公开了包含这些源的扫描系统，产生辐射的方法和检查对象的方法。