公开(公告)号：US20040228445A1

公开(公告)日：2004-11-18

申请号：US10753904

申请日：2004-01-08

Applicant: OXFORD DIFFRACTION LTD.

Inventor： Damian Kucharczyk

IPC: H05H001/00 ,  G21G004/00 ,  H01J035/00

CPC classification number: B82Y10/00 ,  G21K2201/061 ,  H01J35/00 ,  H05G1/04

Abstract: The present invention provides a high flux X-ray source 100 comprising a sealed X-ray tube contained within an X-ray shield (101), an optic housing 103 containing a multi-layer optic for collecting and focussing X-rays generated in the sealed X-ray tube, and an X-ray beam conditioner 104. The multi-layer optic 103 is located at a predetermined distance from the sealed X-ray tube 101, with the optic housing 103 being adjustable relative to the sealed X-ray tube 101 and the beam conditioner 104 adjustable relative to the optic housing 103. The use of a multi-layer optic provides for the efficient collection and focussing of X-rays generated in a compact sealed tube and wavelength selectively enables it to act as a monochromator, providing a beam of X-rays with a predetermined range of photon energy.

Abstract translation: 本发明提供一种高通量X射线源100，其包含包含在X射线屏蔽（101）内的密封X射线管，光学壳体103包含多层光学器件，用于收集和聚焦在 密封的X射线管和X射线束调节器104.多层光学器件103位于距离密封的X射线管101预定的距离处，光学外壳103相对于密封的X射线可调节 管101和光束调节器104相对于光学外壳103可调节。多层光学器件的使用提供了在紧凑的密封管中产生的X射线的有效收集和聚焦，并且波长选择性地使其能够用作单色器 提供具有预定范围的光子能量的X射线束。

公开(公告)号：US20040174955A1

公开(公告)日：2004-09-09

申请号：US10626748

申请日：2003-07-22

Inventor： Chang Hee Nam ,  Dong Gun Lee

IPC: H01J035/00 ,  H01J035/22 ,  H01J035/32

CPC classification number: H05G2/003 ,  G01N23/20075 ,  G02F2001/354 ,  H01S4/00

Abstract: Disclosed herein is a point-diffraction interferometer which can inspect a surface quality of an optical system for extreme ultraviolet lithography using a high-order harmonic X-ray source with excellent coherence, and an apparatus and method for generating a high-order harmonic X-ray. The present invention uses a high-order harmonic X-ray beam as a coherence light source, thus remarkably reducing the size of an apparatus for generating a light source to approximately {fraction (1/100)} of a device using a light source generated in a conventional synchrotron. Further, the present invention simplifies the construction of an interferometer by employing a thin foil in which a pinhole is formed through a drilling technique using high power femtosecond laser, thus increasing the industrial utility of the interferometer.

Abstract translation: 本文公开了一种点衍射干涉仪，其可以使用具有优异相干性的高次谐波X射线源来检查用于极紫外光刻的光学系统的表面质量，以及用于产生高次谐波X射线的装置和方法， 射线。 本发明使用高次谐波X射线束作为相干光源，从而将用于产生光源的装置的尺寸显着地减小到近似{分数（使用在...中产生的光源的装置的1/100） 此外，本发明通过使用通过使用高功率飞秒激光的钻孔技术形成针孔的薄箔来简化干涉仪的结构，从而增加了干涉仪的工业实用性。

公开(公告)号：US20040091080A1

公开(公告)日：2004-05-13

申请号：US10308981

申请日：2002-11-27

Inventor： Khem Garewal ,  Roy Edward Rand ,  Thomas Clarke Sanders

IPC: H01J035/00

CPC classification number: H01J35/06 ,  H01J35/30

Abstract: An oil-free electron source including a vacuum chamber within which a vacuum is maintained. A rigid insulated receptacle and an anode extend into the vacuum chamber and are mounted to opposite ends of the housing. A cathode-focus electrode assembly is mounted to an outer end of the receptacle and is suspended within the vacuum chamber by the receptacle. A high voltage connector is inserted into the receptacle and conveys voltage in an oil-free environment. The cathode and anode surfaces face each other and are aligned with respect to each other along an electron beam axis. The electron source may be provided within an electron beam scanner including a patient table, an x-ray source and detector obtaining x-ray scans of a patient, and a focus member directing an electron beam onto the x-ray source.

Abstract translation: 一种无油电子源，包括一个保持真空的真空室。 刚性绝缘插座和阳极延伸到真空室中并且安装到壳体的相对端。 阴极聚焦电极组件安装到容器的外端，并通过容器悬挂在真空室内。 高压连接器插入插座，并在无油环境中传送电压。 阴极和阳极表面彼此面对并且沿着电子束轴线相对于彼此对准。 电子源可以设置在包括患者台，x射线源和获得患者的x射线扫描的检测器的电子束扫描器内，以及将电子束引导到x射线源上的聚焦构件。

公开(公告)号：US20040071267A1

公开(公告)日：2004-04-15

申请号：US10442544

申请日：2003-05-21

Applicant: Science Research Laboratory, Inc.

Inventor： Jonah Jacob ,  Joseph A. Mangano ,  James Moran ,  Alexander Bykanov ,  Rodney Petr ,  Mordechai Rokni

IPC: H01J035/00

CPC classification number: H05G2/003 ,  H05G2/006 ,  H05H1/48

Abstract: A dense plasma focus radiation source for generating EUV radiation using Lithium vapor and including a coaxially disposed anode and cathode. The invention includes methods and apparatuses for enhancing the efficiency of EUV radiation production, for protecting, cooling and extending the life of the anode and cathode, for protecting and shielding collecting optics from debris and pressure disturbances in the discharge chamber, and for feeding Lithium into the discharge chamber.

Abstract translation: 一种致密的等离子体聚焦辐射源，用于使用锂蒸汽产生EUV辐射，并包括同轴设置的阳极和阴极。 本发明包括用于提高EUV辐射生产效率的方法和装置，用于保护，冷却和延长阳极和阴极的寿命，用于保护和屏蔽聚集光学元件不受放电室中的碎片和压力扰动的影响，并将锂进入 放电室。

公开(公告)号：US20030210765A1

公开(公告)日：2003-11-13

申请号：US10142288

申请日：2002-05-09

Applicant: Spire Corporation

Inventor： Anton C. Greenwald ,  Ward D. Halverson

IPC: H01J035/00

CPC classification number: H05G1/10 ,  H01J35/025 ,  H01J35/18 ,  H01J35/32 ,  H01J2235/0236

Abstract: The present invention provides a catheter having an x-ray generator unit at its tip which generates x-ray radiation having a wavelength in a range effective for treating biological tissue. In one embodiment, the x-ray generator unit includes a miniature x-ray generator and a miniature transformer that form, in combination, a monolithic device. The transformer includes a primary winding that receives an input voltage in a range of 100 V to 4 kV from a power source, via a flexible cable that runs from the proximal end of the catheter body to its distal end. The transformer further includes a secondary winding that up-converts the input voltage to generate an output voltage in a range of 10 kV to 40 kV to be applied to a cathode of the x-ray generator. The cathode emits electrons in response to the applied voltage, and an extraction electrode guides the emitted electrons to an anode, which is preferably formed of a high-Z refractory metal. The impact of the electrons with the anode effects generation of x-ray radiation, a portion of which is transmitted via an x-ray transmissive window to the outside environment. One significant advantage of the device of the invention is that by employing a lower voltage in the body of the catheter and confining a higher voltage to a short, rigid section at the distal end of the catheter, the device provides enhanced mechanical flexibility and lowers the likelihood of electrical breakdown.

Abstract translation: 本发明提供了一种在其尖端处具有x射线发生器单元的导管，其产生具有在有效治疗生物组织的范围内的波长的x射线辐射。 在一个实施例中，x射线发生器单元包括组合形成单片器件的微型x射线发生器和微型变压器。 该变压器包括初级绕组，其通过从导管主体的近端延伸到其远端的柔性电缆从电源接收在100V至4kV的范围内的输入电压。 变压器还包括次级绕组，其对输入电压进行上变频以产生在10kV至40kV的范围内的输出电压以施加到x射线发生器的阴极。 阴极响应于施加的电压发射电子，并且提取电极将发射的电子引导到优选由高Z难熔金属形成的阳极。 具有阳极的电子的影响影响X射线辐射的产生，其一部分经由x射线透射窗口传输到外部环境。 本发明的装置的一个显着优点是通过在导管的主体中采用较低的电压并将更高的电压限制在导管远端处的短的刚性部分，该装置提供增强的机械灵活性并降低 电气故障的可能性。

公开(公告)号：US20030053593A1

公开(公告)日：2003-03-20

申请号：US09955658

申请日：2001-09-18

Inventor： Howard Albert Bender III

IPC: H01J035/00

CPC classification number: H05G2/003 ,  H05H1/2406 ,  H05H2001/2418

Abstract: Debris generation from an EUV electric discharge plasma source device can be significantly reduced or essentially eliminated by encasing the electrodes with dielectric or electrically insulating material so that the electrodes are shielded from the plasma. The device includes: (a) a body, which is made of an electrically insulating material, that defines a capillary bore that has a proximal end and a distal end and that defines at least one radiation exit; (b) a first electrode that defines a first channel that has a first inlet end that is connected to a source of gas and a first outlet end that is in communication with the capillary bore, wherein the first electrode is positioned at the distal end of the capillary bore; (c) a second electrode that defines a second channel that has a second inlet end that is in communication with the capillary bore and an outlet end, wherein the second electrode is positioned at the proximal end of the capillary bore; and (d) a source of electric potential that is connected across the first and second electrodes, wherein radiation generated within the capillary bore is emitted through the at least one radiation exit and wherein the first electrode and second electrode are shielded from the emitted radiation.

Abstract translation: 通过用电介质或电绝缘材料包住电极可以显着减少或基本上消除来自EUV放电等离子体源装置的碎片，使得电极与等离子体屏蔽。 该装置包括：（a）由电绝缘材料制成的主体，其限定具有近端和远端并限定至少一个辐射出口的毛细孔; （b）限定第一通道的第一电极，所述第一通道具有连接到气体源的第一入口端和与所述毛细管孔连通的第一出口端，其中所述第一电极位于所述第一通道的远端 毛细孔; （c）第二电极，其限定具有与毛细孔连通的第二入口端和出口端的第二通道，其中所述第二电极位于所述毛细孔的近端; 以及（d）跨越所述第一和第二电极连接的电位源，其中在所述毛细孔内产生的辐射通过所述至少一个辐射出口发射，并且其中所述第一电极和所述第二电极被屏蔽所发射的辐射。

公开(公告)号：US20020181655A1

公开(公告)日：2002-12-05

申请号：US09987209

申请日：2001-11-14

Inventor： Neil C. Schoen

IPC: H05H001/00 ,  G21G004/00 ,  H01J035/00

CPC classification number: G21B1/19 ,  G21B1/15 ,  G21B3/006 ,  Y02E30/16

Abstract: A fusion device consisting of two colliding ion beams, each produced by a high power, femtosecond regime, chirped pulsed amplification (CPA) laser acceleration device. The CPA laser creates an ionized plasma and subsequently accelerates electrons to multi-MeV energies, thus creating electric fields due to separation of electrons and ions, of sufficient magnitude to accelerate the plasma ions to energies ranging from multi-keV to multi-MeV levels. The magnetic fields created by the laser pulses, as well as the electrons and/or ions, also helps confine the ions to the region of the size of the laser beam focal spot diameter, and thus enhance the collision probability of the counter-streaming ions and provide a sizable population of fusion events. Ion beam generation by high powered, short pulse CPA lasers has been previously demonstrated in thin foil targets. This novel use of the colliding beam geometry should lead to near break-even levels of fusion energy production in compact geometry suitable for small laboratory use for weapons design applications and commercial fusion energy characterization emulations. In addition, the low emittance of any radiation produced in the small fusion reaction region could provide a significant feature for use of this technology in high resolution neutron radiography, or other commercial or medical applications of neutrons, ions, electrons or photons(5) produced by components of this technology. It should be noted that the ion beam(s) created with only one foil target could produce neutrons for radiography by other than fusion reactions; for example for protons, (p,n) reactions on the target atoms will produce a neutron source of varying energies, although the cross sections for the reactions may be somewhat lower than for fusion.

Abstract translation: 由两个碰撞离子束组成的融合装置，每个离子束由高功率，飞秒状态，啁啾脉冲放大（CPA）激光加速装置产生。 CPA激光产生离子化等离子体，随后将电子加速至多MeV能量，从而由于分离电子和离子而产生足够大的电场，从而将等离子体离子加速到从多keV到多MeV电平的能量。 由激光脉冲以及电子和/或离子产生的磁场也有助于将离子限制在激光束焦点直径尺寸的区域，从而增强反流离子的碰撞概率 并提供相当大的融合事件群体。 以前在薄箔靶中已经证明了通过大功率，短脉冲CPA激光器的离子束产生。 碰撞光束几何的这种新颖的应用应该导致紧凑几何形状的融合能量生产接近平稳的水平，适用于武器设计应用和商业融合能量表征仿真的小实验室使用。 此外，在小聚变反应区域中产生的任何辐射的低发射率可以提供在高分辨率中子射线照相或中子，离子，电子或光子的其他商业或医疗应用中使用该技术的显着特征（5） 通过这项技术的组成部分。 应该注意的是，只有一个箔靶产生的离子束可以通过除了聚变反应之外的射线成像产生中子; 例如对于质子，靶原子上的（p，n）反应将产生不同能量的中子源，尽管反应的横截面可能略低于融合的横截面。

公开(公告)号：US20020154738A1

公开(公告)日：2002-10-24

申请号：US10060064

申请日：2002-01-31

Inventor： Kuniyoshi Mori

IPC: H05H001/00 ,  G21G004/00 ,  H01J035/00

CPC classification number: H01J35/065 ,  H01J35/14

Abstract: A voltage control section for controlling a pulsed acceleration voltage applied between a photoelectron releasing layer and an X-ray target in order to accelerate a photoelectron is further provided, so that the acceleration voltage is maintained at a pulse top voltage until the X-ray target is bombarded with the photoelectron after the photoelectron is released from the photoelectron releasing layer. The pulse width of acceleration voltage can be set narrower to such an extent that no discharge occurs, which enables the pulse top voltage to become higher, whereby the energy of pulse X-rays can be made higher by enhancing the speed of photoelectrons.

Abstract translation: 进一步提供用于控制施加在光电子释放层和X射线靶之间的脉冲加速电压以加速光电子的电压控制部分，使得加速电压保持在脉冲顶部电压直到X射线靶 在光电子从光电子释放层释放后被光电子轰击。 可以将加速电压的脉冲宽度设定得较窄，使得不发生放电，使得脉冲顶部电压变高，从而通过提高光电子的速度可以使脉冲X射线的能量更高。

公开(公告)号：US20020141536A1

公开(公告)日：2002-10-03

申请号：US10082658

申请日：2001-10-19

Inventor： Martin Richardson

IPC: H05H001/00 ,  G21G004/00 ,  H01J035/00

CPC classification number: H05G2/003 ,  H05G2/005 ,  H05G2/008

Abstract: Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form a point source EUV, XUV and x-ray source. Various types of liquid droplet targets include metallic solutions, and nano-sized particles in solutions having a melting temperature lower than the melting temperature of some or all of the constituent metals, used a laser point source target droplets. The solutions have no damaging debris and can produce plasma emissions in the X-rays, XUV, and EUV (extreme ultra violet) spectral ranges of approximately 0.1 nm to approximately 100 nm, approximately 11.7 nm and 13 nm, approximately 0.5 nm to approximately 1.5 nm, and approximately 2.3 nm to approximately 4.5 nm. The second type of target consists of various types of liquids which contain as a miscible fluid various nano-size particles of different types of metals and non-metal materials.

Abstract translation: 由大功率激光器照射的特殊液滴靶，被等离子体形成点源EUV，XUV和X射线源。 各种类型的液滴靶包括金属溶液和具有低于部分或全部构成金属的熔融温度的溶解溶液中的纳米尺寸颗粒，使用激光点源目标液滴。 这些解决方案没有破坏性碎片，并且可以在约0.1nm至约100nm，约11.7nm和13nm，约0.5nm至约1.5nm的X射线，XUV和EUV（极紫外）光谱范围内产生等离子体发射 nm，约2.3nm至约4.5nm。 第二种类型的目标由各种类型的液体组成，其中含有不同类型金属和非金属材料的各种纳米尺寸颗粒作为混溶流体。

公开(公告)号：US20040208288A1

公开(公告)日：2004-10-21

申请号：US10760827

申请日：2004-01-20

Inventor： Eberhard Lenz

IPC: H01J035/00 ,  H01J035/22 ,  H01J035/32

CPC classification number: H01J35/08 ,  B23H7/108 ,  B23K26/364 ,  B23K26/60 ,  B24C1/045 ,  H01J9/02

Abstract: An X-ray anode is produced by scoring at least a region of a surface of the anode, on which electrons are incident, with a number of defined microslits, thereby making the surface, or at least the region thereof, highly thermally stressable.

Abstract translation: X射线阳极是通过刻划电子入射的阳极的表面的至少一部分区域产生多个限定的微裂纹，从而使表面或至少其区域具有高度的热应力。