Abstract:
An in-duct apparatus for sanitizing air includes a reaction unit, configured to be mounted in an air duct, for generating reactive oxygen species from oxygen in air received in the reaction unit to be sanitized. Airborne contaminants in the received air are substantially neutralized by the generated reactive oxygen species before the air is discharged from the reaction unit.
Abstract:
A filtration system for the reduction of air born contaminates by way of double oxidation and filtration. The primary oxidation is from a low cost method of producing cold plasma ozone. The second oxidation and primary filtration is from a catalyst (MAZ), a manganese activated zeolite. Final filtration is accomplished by a HEPA air filter. Air is drawn or blown into a cabinet by way of fan or blower with sufficient force to overcome pressure drop created by filter media.The air stream flows through or by an ozone generator into a reaction chamber for primary oxidation of contaminates and then flows through the MAZ media for filtration by way of adsorption of contaminates and a secondary oxidation with a catalytic conversion of ozone to oxygen. The air stream then flows through a HEPA filter prior to discharge from the cabinet.
Abstract:
An air sanitization system including a housing having an inlet and an outlet, an ozone generator disposed in the housing and positioned between the inlet and outlet, at least one fiber optic cable positioned in visible proximity to the ozone generator, a visible light detector, and a controller. The housing is configured to receive a flow of an oxygen-containing gas through the inlet, and the ozone generator generates ozone from the flow of oxygen-containing gas. The at least one fiber optic cable is configured to receive and transmit visible light from the ozone generator. The visible light detector detects an amount of visible light transmitted by the at least one fiber optic cable. The controller is in communication with the visible light detector for determining whether the amount of visible light transmitted by the at least one fiber optic cable corresponds to a failure of the ozone generator.
Abstract:
An improved system and method for controlling ozone concentration in connection with a multi-chamber tool. The system and method involve a first and a second concentration controller in combination with an ozone generator. The first concentration controller detects an EVENT (i.e., one of the chambers in the multi-chamber tool coming on-line or off-line) and in response provides a power instruction to the ozone generator in accordance with a predictive control algorithm. The first concentration controller has a fast (i.e, about 1 second) response time. The second concentration controller is masked from the ozone generator during the EVENT, but otherwise controls the generator after an interval of time has lapsed after the EVENT. The second concentration controller has a slower response time than the first concentration controller, however the second concentration controller provides the system with long-term stability and can be used to provide updated data to the predictive control algorithm.
Abstract:
A starting circuit for an electric discharge lamp providing an electric current to a lamp having a first and a second filament. The circuit measures a lamp current and a filament temperature and then compares these against a reference voltage. When the lamp current is below a set threshold value, a relay contact disposed between the first and second filament is closed to direct the electric current through the first and second filaments to initiate pre-heating of the lamp. Once the filament temperature exceeds a set threshold, the relay contact is opened and the electric current passes through heated gas inside the lamp.
Abstract:
An improved system and method for controlling ozone concentration in connection with a multi-chamber tool. The system and method involve a first and a second concentration controller in combination with an ozone generator. The first concentration controller detects an EVENT (i.e., one of the chambers in the multi-chamber tool coming on-line or off-line) and in response provides a power instruction to the ozone generator in accordance with a predictive control algorithm. The first concentration controller has a fast (i.e, about 1 second) response time. The second concentration controller is masked from the ozone generator during the EVENT, but otherwise controls the generator after an interval of time has lapsed after the EVENT. The second concentration controller has a slower response time than the first concentration controller, however the second concentration controller provides the system with long-term stability and can be used to provide updated data to the predictive control algorithm.
Abstract:
An ozone generator comprises a machine box, a cover, a high-voltage supply, an electrode device and a control circuit board. The electrode device has a set of discharging electrodes with pointed members and a guiding electrode. The guiding electrode further comprises a contact plate mounted on the machine box for grounding and an electrode board retained within said cover. The electrode board is provided with a plurality of round holes corresponding to the pointed members of the discharging electrode, Thereby, electric energy will be transported from the high-voltage supply to the electrode device, then emitting into the ozone generating chamber through discharging. The air flowing into the ozone generating chamber will be activated to form ozone gas that will be released to the surroundings. Further, as the cover is removed from the machine box, the discharging will be terminated automatically, ensuring the operational safety of the ozone generator.
Abstract:
An ozone generating system and an ozone generating method producing ozone at a high concentration and operating at high efficiency, in which a raw material gas with no nitrogen added and mainly containing oxygen is used. The amount of generation of NOX by-product is null. A raw material gas not containing nitrogen and mainly containing oxygen is supplied to an ozone generator, an AC voltage is applied to produce discharge light having wavelength of 428 nm to 620 nm, a catalytic material containing a photocatalytic material with a band gap energy of 2.0 eV to 2.9 eV is provided on an electrode or a dielectric in a discharge region, gas pressure is kept at 0.1 MPa to 0.4 MPa, and ozone is generated.
Abstract:
Systems and methods are provided for monitoring and suppressing arcing between a first electrode and a second electrode of an electro-kinetic system. A current (or voltage) associated with the electro-kinetic system is monitored in order to adjust a first count and a second count. Each time a monitored value reaches a threshold, the first count is incremented. Each time the first count reaches a first count threshold, the electro-kinetic system is temporarily shut down for a predetermined period, the second count is incremented, and the first count is re-initialized. The electro-kinetic system restarts after the predetermined period. When the second count reaches a second count threshold, the electro-kinetic system is shut-down until a reset condition is satisfied.
Abstract:
Systems and methods are provided for monitoring and suppressing arcing between a first electrode and a second electrode of an electro-kinetic system. A current (or voltage) associated with the electro-kinetic system is monitored in order to adjust a first count and a second count. Each time a monitored value reaches a threshold, the first count is incremented. Each time the first count reaches a first count threshold, the electro-kinetic system is temporarily shut down for a predetermined period, the second count is incremented, and the first count is re-initialized. The electro-kinetic system restarts after the predetermined period. When the second count reaches a second count threshold, the electro-kinetic system is shut-down until a reset condition is satisfied.